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After the discovery of high temperature superconductors (HTS) by Mueller and Bednorz in 1986¡¯ and the subsequent preparation a year later2 of YBa2Cu307-x (YBCO) with a value of T, above the b.p. of liquid nitrogen, the first article describing the preparation of thin films of YBCO by CVD appeared in 1988.3 Subsequently, the discoveries of other HTS containing Bi, Sr, Ca and Cu (BSCCO) and Tl, Ba, Ca and Cu (TBCCO) in 1988 were rapidly followed by methods describing the CVD of these materials.4T5 Since that time there have been more than 250 articles on the CVD of HTS materials.6 The most potentially interesting application of HTS is in the field of microelectronics.7 However, in order to build HTS devices it will be necessary to produce thin films of HTS by techniques which are compatible with fabrication lines, which allow close control of layer properties, which produce conformal thin films over large areas and have a high level of intra- and inter-sample uniformity, and which give a high sample throughput. CVD is just such a technique. The C in CVD emphasises that the technique is very dependent on precursor chemistry, deposition chemistry, and reaction parameters. |
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sltmac(½ð±Ò+1): лл½»Á÷~~ 2011-06-03 17:38:22
sltmac(½ð±Ò+50, ·ÒëEPI+1): ³£À´~~ 2011-06-10 12:41:30
sltmac(½ð±Ò+1): лл½»Á÷~~ 2011-06-03 17:38:22
sltmac(½ð±Ò+50, ·ÒëEPI+1): ³£À´~~ 2011-06-10 12:41:30
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