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After the discovery of high temperature superconductors
(HTS) by Mueller and Bednorz in
1986¡¯ and the subsequent preparation a year later2
of YBa2Cu307-x (YBCO) with a value of T, above
the b.p. of liquid nitrogen, the first article describing
the preparation of thin films of YBCO by CVD
appeared in 1988.3 Subsequently, the discoveries of
other HTS containing Bi, Sr, Ca and Cu (BSCCO)
and Tl, Ba, Ca and Cu (TBCCO) in 1988 were
rapidly followed by methods describing the CVD
of these materials.4T5 Since that time there have
been more than 250 articles on the CVD of HTS
materials.6 The most potentially interesting application
of HTS is in the field of microelectronics.7
However, in order to build HTS devices it will be
necessary to produce thin films of HTS by techniques
which are compatible with fabrication lines,
which allow close control of layer properties, which
produce conformal thin films over large areas and
have a high level of intra- and inter-sample uniformity,
and which give a high sample throughput.
CVD is just such a technique. The C in CVD
emphasises that the technique is very dependent
on precursor chemistry, deposition chemistry, and
reaction parameters.

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sltmac(½ð±Ò+1): лл½»Á÷~~ 2011-06-03 17:38:22
sltmac(½ð±Ò+50, ·­ÒëEPI+1): ³£À´~~ 2011-06-10 12:41:30
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