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After the discovery of high temperature superconductors (HTS) by Mueller and Bednorz in 1986’ and the subsequent preparation a year later2 of YBa2Cu307-x (YBCO) with a value of T, above the b.p. of liquid nitrogen, the first article describing the preparation of thin films of YBCO by CVD appeared in 1988.3 Subsequently, the discoveries of other HTS containing Bi, Sr, Ca and Cu (BSCCO) and Tl, Ba, Ca and Cu (TBCCO) in 1988 were rapidly followed by methods describing the CVD of these materials.4T5 Since that time there have been more than 250 articles on the CVD of HTS materials.6 The most potentially interesting application of HTS is in the field of microelectronics.7 However, in order to build HTS devices it will be necessary to produce thin films of HTS by techniques which are compatible with fabrication lines, which allow close control of layer properties, which produce conformal thin films over large areas and have a high level of intra- and inter-sample uniformity, and which give a high sample throughput. CVD is just such a technique. The C in CVD emphasises that the technique is very dependent on precursor chemistry, deposition chemistry, and reaction parameters. |
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zuodg
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sltmac(金币+1): 谢谢交流~~ 2011-06-03 17:38:22
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米勒和Bednorz在1986年发现高温超导体（HTS）, 随后一年制备了YBa2Cu307-x (钇钡铜氧)，其T值比液氮的沸点高。1988年，出现了第一篇通过化学气相沉淀法（CVD）制备YBCO薄膜。随后发现的高温超导化合物，如铋，锶，钙，铜（BSCCO）也都通过CVD法进行了描述。至今有关CVD法描述HTS的文章已经多达 250多篇。HTS最有前途的用武之地是微电子领域。然而，生产HTS器件工艺要求很多。HTS薄膜工艺要与生产线兼容，能够对片层性质进行紧密控制，大面积生产共性薄膜，并且样品间或样品内具有较高的均一性，还应该能够高通粮生产。CVD就是这样一种技术。CVD方法强调该技术非常依赖前提化学、沉积化学以及反应参数。 最后一句中的C不知道是什么简称。还有很多专业术语翻译不准，lz参考啊 |
2楼2011-06-03 17:00:53
