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In this article we report on results obtained from studies of the effect of total pressure and carrier gas flow rate on the rate of precursor evaporation for typical precursors used in the MOCVD of high temperature superconductors (HTS). We find that this process is under significant mass transfer control and we consider the implications of this for growth of HTS. In particular, we discuss the problems associated with the use of solid precursors and possible strategies for solving the difficulties. 0 1996 Elsevier Science Limited and Techna S.r.1. |
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in this article we report on results obtained from studies of the effect oftotal pressure and carrier gas flow rate on the rate of precursor evaporation fortypical precursors used in the MOCVD of high temperature superconductors(HTS). ÔÚÕâÆªÎÄÕÂÖУ¬ÎÒÃDZ¨µÀµÄ½áÂÛÊÇÀ´×ÔÓÚ¶Ô×ÜѹºÍÓ¦ÓÃÓÚ¸ß㬵¼µÄ½ðÊôÓлúÆøÏà³Á»ýµÄµäÐÍǰÌåµÄǰŨËõµÄÔØÆøÁ÷Á¿µÄÓ°ÏìµÄÑо¿ We find that this process is under significant mass transfer control and weconsider the implications of this for growth of HTS. In particular, we discuss theproblems associated with the use of solid precursors and possible strategies forsolving the difficulties. 0 1996 Elsevier Science Limited and Techna S.r.1. ÎÒÃÇ·¢ÏÖ£¬ÕâÒ»½ø³ÌÊÇÔÚÖØÒªµÄ´«ÖÊ¿ØÖÆÏ£¬ÎÒÃÇÈÏΪÕâ¶Ô³¬µ¼Ôö³¤ÓÐÓ°Ïì¡£ÓÈÆäÊÇ£¬ÎÒÃÇÌÖÂÛÁ˹ÌÌåǰÌåÓ¦ÓÃÏà¹ØµÄÎÊÌâºÍ½â¾öÕâ¸öÎÊÌâµÄ²ßÂÔ¡£ 1996 Elsevier£¨www.sciencedirect.com£© ¿ÆÑ§ÓÐÏÞ¹«Ë¾ and Techna(Ó¦¸ÃÒ²ÊÇÒ»¹«Ë¾) S.r.1. |
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