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wangll876853

新虫 (小有名气)


[交流] 扫面电镜做光刻,注意事项

有人用扫面电镜做过光刻吗?请问需要注意哪些事项?PMMA对电镜腔室是否会造成污染、腐蚀等?
请高人指点!
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guoguo988

禁虫 (著名写手)


wangll876853(金币+5, 博学EPI+1): 2011-03-28 17:00:25
引用回帖:
Originally posted by wangll876853 at 2011-03-07 13:45:01:
有人用扫面电镜做过光刻吗?请问需要注意哪些事项?PMMA对电镜腔室是否会造成污染、腐蚀等?
请高人指点!

https://define.cnki.net/WebForms ... 5%88%BB&page=11
https://www.phy.cuhk.edu.hk/inte ... nts_2009/thkpre.pdf
2楼2011-03-07 17:20:11
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