| 查看: 822 | 回复: 2 | ||
[交流]
【求助】急求FlexPDE电势差分布问题
|
|
用 大面积PECVD平行板电极间电势差分布均匀性数值研究 这篇文献的波动方程和边界条件，文章用的软件是FlexPDE进行该电势差分析，具体怎么编程？即求电极板长为120cm，宽为100cm,顶部电极间距为0.6cm，底部电极间距为2cm,频率在13.56MHz，s=1mm即波长衰减因子为3.16时电势差的分布，求详细编程步骤。 [ Last edited by 295435736 on 2011-1-17 at 16:30 ] |
回复此楼
2楼2011-01-12 16:57:34
295435736(金币+5):谢谢了，不过我学的是ansys,我想用ansys可不可以模拟？Comsol我没有用过 2011-01-12 18:03:25
|
我看过一点点关于FlexPDE的资料，需要用C++把方程、求解域、边界条件等描述出来。从这点来说不如用Comsol方便。 不懂专业，只是推荐楼主试试Comsol，在Comsol中有个平板电容的例子，摘一点例子的说明。 In an electrostatically tunable parallel plate capacitor you can modify the distance between the two plates when the applied voltage changes. For tuning of the distance between the plates the capacitor includes a spring that attaches to one of the plates. If you know the characteristics of the spring and the voltage between the plates, you can compute the distance between the plates. This model includes an electrostatic simulation for a given distance. A postprocessing step then computes the capacitance. The capacitor in this model is a typical component in various microelectromechanical systems (MEMS) for electromagnetic fields in the radio frequency range 300 MHz to 300 GHz. 模型图：  附件中是操作文档。 [ Last edited by xiegangmai on 2011-1-12 at 17:51 ] |
3楼2011-01-12 17:39:44