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A model is developed for calculating a low-current moderate-pressure RF discharge with allowance for an electron cloud that is formed by electrons produced during the preceding periods of the RF field and fills the electrode sheath at regular intervals in accordance with the phase of the RF voltage applied to the electrodes. The cloud arises due to a phase shift of ¦Ð/2 between the voltage across the sheath and that across the column of a low-current RF discharge plasma. |
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