±±¾©Ê¯ÓÍ»¯¹¤Ñ§Ôº2026ÄêÑо¿ÉúÕÐÉú½ÓÊÕµ÷¼Á¹«¸æ
²é¿´: 1059  |  »Ø¸´: 6

201214760216

ľ³æ (ÖøÃûдÊÖ)


[½»Á÷] ¡¾¹¤ÒնԱȡ¿µÈÀë×ÓÇòÄ¥¹¤ÒÕÓ봫ͳÇòÄ¥¹¤ÒÕÔںϳÉAINÖеĶԱÈ

½ñÌì·ÖÏíÌմɲÄÁϵª»¯ÂÁ²ÄÁϵÄÖÆ±¸£¬·¢²»ÁËͼƬ£¬ÓÐÐèÒªÓ¢ÎÄÔ­ÎĵÄÇë˽ÐÅ230403ºÍÓÊÏ䣬ÈÃÎÒÖªµÀÄúÐèÒªÄÄһƪ£¬

Ò»¾ä»°Á˽âÈ«ÎÄ

ÔÚ±¾ÎÄÖУ¬²ÉÓô«Í³µÄÑÐÄ¥ºÍ·ÅµçµÈÀë×ÓÌ帨ÖúÑÐÄ¥£¬Í¨¹ýÑÐÄ¥ÂÁºÍÇâÑõ»¯ï®Ò»Ë®ºÏÎïµÄ»ìºÏÎLiOH¡¤H2OÐγÉLi-Al-OÏࣨLiAlO2£©£¬´Ù½øAlNµÄÉú³É£©£¬ºÏ³Éµª»¯ÂÁ(AlN)ÄÉÃ×·ÛÄ©£¬µÈÀë×Ó¸¨ÖúÑÐÄ¥´¦ÀíµÄ·ÛÄ©µÄ·´Ó¦Î¶ȵÍÓÚ´«Í³ÑÐÄ¥´¦ÀíµÄ·ÛÄ©£¬Ð§Âʸü¸ß£¬¿ÉÒÔ»ñµÃ¸üСµÄ΢¾§³ß´çºÍ»î»¯·ÛÄ©¡£

²ÄÁÏ´¦Àí

²ÉÓò»Í¬Ö±¾¶µÄÓ²»¯¸õ¸ÖÇò×÷ΪÑÐÄ¥½éÖÊ£¬Çò·Û±ÈΪ30:1¡£½«ÂÁ·Û¡¢LiOH¡¤H2O·ÛºÍÇò»ìºÏÔÚÑÐĥСƿÖУ¬1.2¸ö´óÆøÑ¹µªÆøÆø·ÕÖнøÐд¦Àí¡£µÈÀë×ÓÌå±»ÒýÈëÑÐĥСƿÖУ¬¼ÇΪPBM£¬¶øÁíÒ»¸öûÓеÈÀë×ÓÌå¼ÇΪTBM¡£PBMµÄʾÒâͼÈçͼ1Ëùʾ¡£ÔÚ1-8СʱµÄ·¶Î§ÄÚÿСʱÑÐÄ¥ºó¶ÔÑùÆ·½øÐзÖÎö£¬ºóÔÚN2±£»¤ÏÂ680¡ãCÍË»ð´¦Àí¡£

ͼ1 µÈÀë×ÓÇòĥʾÒâͼ



·ÛÌå±íÕ÷

ͼ2£¨a£©TBMºÍPBM´¦Àí1Сʱ·ÛÄ©µÄXRDͼÆ×(b)1¡¢2¡¢3¡¢4hµÄPBMXRDͼ



¾­TBMºÍPBM´¦Àí1СʱºóÑùÆ·¶¼Éú³ÉÁËAlN·ÛÄ©¡£PBMÇúÏߵķåÖµµÍÓÚTBMÇúÏߵķåÖµ£¬¶øPBMÇúÏߵİë·åÈ«¿í£¨FWHM£©±ÈTBMÇúÏ߸ü¿í¡£PBM´¦Àí1-4СʱµÄÑùÆ·£¬Ëæ×ÅÇòĥʱ¼äµÄÔö¼Ó£¬ÇúÏßµÄÇ¿¶È±äµÍ£¬ÇúÏߵİë¸ß¿í±ä¿í¡£

ͼ3ƽ¾ù΢¾§³ß´çºÍ¾§¸ñÓ¦±ä·Ö±ð×÷ΪÇòĥʱ¼äµÄº¯Êý¶ø±ä»¯



¶ÔÓÚPBM¹¤ÒÕ£¬Çòĥʱ¼äΪ4h£¬¾§Á£³ß´ç¼±¾ç¼õС£¬¶ø¾§¸ñÓ¦±äËæ×ÅÇòĥʱ¼äµÄÔö¼Ó¶øÔö¼Ó£¬×îÖÕÆ½¾ù¾§Á£³ß´çԼΪ40nm£¬×îÖÕ¾§¸ñÓ¦±äԼΪ0.37%¡£¶ÔÓÚTBM¹¤ÒÕ£¬ÔÚ6СʱÇòÄ¥ºó£¬×îÖÕÆ½¾ù΢¾§³ß´çԼΪ44nm£¬×îÖÕ¾§¸ñÓ¦±äԼΪ0.32%¡£ÔÚÏàͬÇòĥʱ¼äÏ£¬PBMµÄƽ¾ù¾§Á£³ß´çСÓÚTBM£¬¶øPBMµÄ¾§¸ñÓ¦±ä´óÓÚTBM¡£»»¾ä»°Ëµ£¬PBM¿ÉÒÔÔÚÏàͬµÄÑÐĥʱ¼äÄÚ½«¾§Á£Ï¸»¯µ½¸üСµÄ³ß´ç£¬±íÃ÷PBM¸üÓÐЧµØÏ¸»¯ºÍ»î»¯·ÛÄ©¡£

ͼ4·ÛÄ©ÑÐÄ¥1СʱµÄSEMͼ°¸£¬·Å´óͼÏÔʾΪ£¨a£©PBM£¬£¨b£©TBM



SEM·Å´óÕÕÆ¬±íÃ÷£¬TBM´¦ÀíºóµÄÑùÆ·ÐÎò³ÊÖÂÃÜ¿é×´½á¹¹£¬¶øPBM´¦ÀíºóµÄ¿ÅÁ£³Ê²»¹æÔò·Ö²¼µÄËÉÉ¢²ã×´½á¹¹¡£ÔÚPBMºÍTBM¹ý³ÌÖж¼»á³öÏÖÃ÷ÏÔµÄÈÈЧӦ¡£ÔÚTBM¹¤ÒÕÖУ¬²»¶ÏÖØ¸´µÄº¸½ÓºÍѹÁѹý³Ìʹ¿ÅÁ£½ôÃܽӴ¥£¬Ðγɿé×´½á¹¹¡£ÔÚPBM¹ý³ÌÖУ¬»îÐÔÎïÖʺ͸ßÄܵç×ÓµÄÅöײ½«½ôÃܵĽçÃæ·Ö¿ª£¬´Ó¶øÐγÉËÉÉ¢µÄ²ã×´½á¹¹¡£

ͼ5 TBM£¨a£©ºÍPBM£¨b£©´¦Àí1Сʱºó·ÛÄ©µÄDTAÇúÏß



103¡æµÄ·ÅÈÈ·åÊÇÓÉÓÚLiOH¡¤H2O·Å³ö½á¾§Ë®£¬ÂÁ·ÛµÄÈÛ»¯ÔÚ652¡æ³öÏÖÎüÈÈ·å¡£PBMÇúÏßÖÐ548¡ãCµÄ·ÅÈÈ·å±íÃ÷·´Ó¦¶¯Á¦Ñ§ÔöÁ¿£¬¶øTBMÖеķÅÈÈ·å´óÔ¼³öÏÖÔÚ624¡ãC¡£ÕâÒ»ÏÖÏó˵Ã÷PBM±ÈTBMÄܸüÓÐЧµØ½µµÍÔöÁ¿·´Ó¦Î¶ȡ£

ͼ6 PBM ºÍ TBM ´¦ÀíµÄ·ÛÄ©µÄXRDͼ£¬È»ºóÔÚÁ÷¶¯µÄN2ÆøÌå±£»¤ÏÂÔÚ680¡ãCÏÂÈÈÍË»ð¡£



PBM´¦ÀíµÄÑùÆ·ÖÐÖ»ÓÐAlNÑÜÉä·å£¬TBM´¦ÀíµÄÑùÆ·ÖдæÔÚAlºÍAlNÑÜÉä·å¡£PBM´¦ÀíµÄ·ÛÄ©¾ßÓиü¸ßµÄ»îÐÔ¡£·ÅµçµÈÀë×ÓÌå²úÉúµÄ»îÐÔÎïÖʺ͸ßÄܵç×Óºä»÷·ÛÄ©±íÃæ£¬²úÉú´óÁ¿ÐÂÏʱíÃæºÍ´óÁ¿È±ÏÝ¡£ÕâЩ¹ý³ÌʹÄÜÁ¿×ªÒƵ½·ÛÄ©ÉÏ£¬Ôö¼ÓÁËϵͳµÄÄÜÁ¿ºÍ·ÛÄ©µÄ»îÐÔ¡£ÔÚPBM¹ý³ÌÖУ¬»îÐÔÎïÖʵÄÈÈЧӦºÍ¸ßÄܵç×ӵijå»÷ЧӦ£¬ÒÔ¼°¸ÖÇò¶Ô·ÛÄ©µÄÅöײºÍ¼ôÇУ¬¸üÈÝÒ׻ºÍϸ»¯·ÛÄ©¡£ÓÉÓÚÈÈЧӦ£¬PBM¹¤ÒÕÖÐ×ÔÓÉÔ­×ӺͻîÐÔ·Ö×ÓµÄÀ©É¢±ÈTBM¹¤ÒÕÈÝÒ׵ö࣬ÓÐÀûÓÚ»¯Ñ§·´Ó¦¡£

½áÂÛ

PBMÔںϳÉAlN·½Ãæ¾ßÓиü¸ßµÄЧÂÊ£¬»ñµÃ¸üСµÄ¾§Á£³ß´çºÍ»î»¯·ÛÄ©¡£

ÒÔÉϽáÂÛÀ´×ÔÓÚ

Yang, Dezheng, Wang, et al. Comparative research of plasma-assisted milling and traditional milling in synthesizing AIN[J]. Plasma Science & Technology, 2017, 19(6).
»Ø¸´´ËÂ¥

» ²ÂÄãϲ»¶

» ±¾Ö÷ÌâÏà¹ØÉ̼ÒÍÆ¼ö: (ÎÒÒ²ÒªÔÚÕâÀïÍÆ¹ã)

» ÇÀ½ð±ÒÀ²£¡»ØÌû¾Í¿ÉÒԵõ½:

²é¿´È«²¿É¢½ðÌù

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

201214760216

ľ³æ (ÖøÃûдÊÖ)


½ñÌì·ÖÏíÌմɲÄÁϵª»¯ÂÁ²ÄÁϵÄÖÆ±¸£¬·¢²»ÁËͼƬ£¬ÓÐÐèÒªÓ¢ÎÄÔ­ÎĵÄÇë˽ÐÅ230403ºÍÓÊÏ䣬ÈÃÎÒÖªµÀÄúÐèÒªÄÄһƪ£¬
3Â¥2023-04-03 14:05:46
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¼òµ¥»Ø¸´
tzynew2Â¥
2023-04-03 14:04   »Ø¸´  
201214760216(½ð±Ò+1): лл²ÎÓë
o ·¢×ÔСľ³æAndroid¿Í»§¶Ë
2023-04-03 22:19   »Ø¸´  
201214760216(½ð±Ò+1): лл²ÎÓë
nono20095Â¥
2023-04-04 14:00   »Ø¸´  
201214760216(½ð±Ò+1): лл²ÎÓë
¡¤
shenrenren6Â¥
2023-04-04 20:49   »Ø¸´  
201214760216(½ð±Ò+1): лл²ÎÓë
XG-WUST7Â¥
2023-04-15 20:38   »Ø¸´  
201214760216(½ð±Ò+1): лл²ÎÓë
up ·¢×ÔСľ³æIOS¿Í»§¶Ë
Ïà¹Ø°æ¿éÌø×ª ÎÒÒª¶©ÔÄÂ¥Ö÷ 201214760216 µÄÖ÷Ìâ¸üÐÂ
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[¿¼ÑÐ] Ò»Ö¾Ô¸¼ª´ó»¯Ñ§327Çóµ÷¼Á +6 ÍõÍõ°×ʯ 2026-04-06 7/350 2026-04-06 21:46 by dongzh2009
[¿¼ÑÐ] ÉúÎïѧÇóµ÷¼Á Ò»Ö¾Ô¸»¦9£¬326·Ö +6 Áõīī 2026-04-06 6/300 2026-04-06 19:36 by lijunpoly
[¿¼ÑÐ] 0854Çóµ÷¼Á +7 ºàÊÏ·¬ÇÑɳ˾ 2026-04-06 8/400 2026-04-06 17:27 by ÍÁľ˶ʿÕÐÉú
[¿¼ÑÐ] Ò»Ö¾Ô¸Î人Àí¹¤´óѧ080200»úе¹¤³Ì308·Ö£¬Çóµ÷¼Á +4 ÖÕ²»ËÆ´Óǰ 2026-04-05 4/200 2026-04-06 11:46 by ¿¼ÑÐѧУÕеãÈË
[¿¼ÑÐ] ¹¤¿Æ370Çóµ÷¼Á +3 äçÐļ弦µ° 2026-04-05 3/150 2026-04-06 10:55 by ÕâÊÇÒ»¸öÎÞÁĵÄê
[¿¼ÑÐ] 085410È˹¤ÖÇÄÜ ³õÊÔ316·Ö Çóµ÷¼Á +7 ²ÐÐÇ·÷Êï 2026-03-31 7/350 2026-04-06 10:09 by À¶ÔÆË¼Óê
[¿¼ÑÐ] µ÷¼Á Ò»Ö¾Ô¸¼ªÁÖ´óѧ357·Ö +5 .Starry. 2026-04-04 5/250 2026-04-06 09:28 by cql1109
[¿¼ÑÐ] 331Çóµ÷¼Á +8 ÓÚÕ÷yz 2026-04-05 8/400 2026-04-06 00:54 by fmesaito
[¿¼ÑÐ] Çóµ÷¼ÁÇóµ÷¼Á +8 121. 2026-04-02 8/400 2026-04-05 20:15 by lys0704
[¿¼ÑÐ] Çóµ÷¼Áµ½0856²ÄÁϹ¤³Ì +3 ³Ì9915 2026-04-05 3/150 2026-04-05 18:15 by À¶ÔÆË¼Óê
[¿¼ÑÐ] 313Çóµ÷¼Á +5 º£ÈÕº£ÈÕ 2026-04-04 7/350 2026-04-05 13:58 by imissbao
[¿¼ÑÐ] 280Çóµ÷¼Á +21 ¹¾ààÏþÏþ 2026-04-02 22/1100 2026-04-04 11:12 by Öí»á·É
[¿¼ÑÐ] Ò»Ö¾Ô¸ÖйúʯÓÍ´óѧ»¯Ñ§¹¤³Ì323·ÖÇóµ÷¼Á +4 »¯¹¤×¨Ë¶323·Ö 2026-04-03 6/300 2026-04-03 22:12 by dongzh2009
[¿¼ÑÐ] 320µ÷¼Á +4 ũҵ¹¤³ÌÓëÐÅÏ¢¼ 2026-04-03 4/200 2026-04-03 21:40 by lbsjt
[¿¼ÑÐ] 335Çóµ÷¼Á +7 ÉòÇåÁ§ 2026-04-03 7/350 2026-04-03 18:55 by lijunpoly
[¿¼ÑÐ] 366Çóµ÷¼Á +7 sbdnd 2026-04-03 7/350 2026-04-03 12:40 by cymywx
[¿¼ÑÐ] 260Çóµ÷¼Á +3 ÖìÜÆÁÕ 2026-04-02 3/150 2026-04-03 08:44 by yulian1987
[¿¼ÑÐ] 271Çóµ÷¼Á +15 ÀÕ²¼ÀÊ@ 2026-03-31 20/1000 2026-04-02 11:24 by Sammy2
[¿¼ÑÐ] Ò»Ö¾Ô¸ÏÃÃÅ´óѧ»¯Ñ§¹¤³Ì£¨×¨Ë¶£©-Êý¶þÓ¢¶þ406·Ö-Çóµ÷¼Á +5 Ïô󻯹¤ 2026-04-01 5/250 2026-04-02 10:03 by jp9609
[¿¼ÑÐ] ²ÄÁϵ÷¼Á +11 Ò»ÑùYWY 2026-03-31 11/550 2026-04-01 22:25 by zhouyuwinner
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û