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Title:  Method for absolute flatness measurement of optical surfaces

Authors:  Xu, Chen1 ; Chen, Lei1 ; Yin, Jiayi1  

Author affiliation:  1  School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, 200 Xiao-ling-wei, Nanjing 210094, China
  
Source title:  Applied Optics

Abbreviated source title:  Appl. Opt.

Volume:  48

Issue:  13

Issue date:  May 1, 2009
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Originally posted by xiewenfa at 2009-9-19 14:55:
GA  448JX
UT  ISI:000266260000017
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happychen823(½ð±Ò+5,VIP+0):ллÄ㣡 9-19 14:29
ͨѶ×÷ÕßµØÖ·: Chen, L (ͨѶ×÷Õß), Nanjing Univ Sci & Technol, Sch Elect Engn & Optoelect Technol, 200 Xiao Ling Wei, Nanjing 210094, Peoples R China  
µØÖ·:
1. Nanjing Univ Sci & Technol, Sch Elect Engn & Optoelect Technol, Nanjing 210094, Peoples R China  
µç×ÓÓʼþµØÖ·: chenleiy@126.com  
³ö°æÉÌ: OPTICAL SOC AMER, 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036 USA  
ѧ¿ÆÀà±ð: Optics  
IDS ºÅ: 448JX
2Â¥2009-09-19 14:10:40
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zhang0jch

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3Â¥2009-09-19 14:19:20
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SCIÊÕ¼ºÅΪ£ºUT  WOS:000266260000017

ÏêÇ飺
FN ISI Export Format
VR 1.0
PT  J
TI  Method for absolute flatness measurement of optical surfaces
AU  Xu, C
Chen, L
Yin, JY
SO  APPLIED OPTICS
VL  48
IS  13
BP  2536
EP  2541
PY  2009
TC  0
AB  To determine the absolute flatness deviations of optical surfaces, a novel method using two optical plates to achieve the absolute flatness test is presented. Absolute deviations of three surfaces, the rear surface of plate I and the front and rear surfaces of plate II, are obtained by four measurements. Wavefront error due to the inhomogeneity of plate II is measured beforehand and is then subtracted from the test results. Vertical profiles of the three surfaces are compared with the measurement results obtained by Zygo's three-flat application. Good agreement validates our method. The advantage of our method is that only one transmission flat is needed during the absolute test, which is especially useful for large-aperture interferometer calibration. (C) 2009 Optical Society of America  
UT  WOS:000266260000017
SN  0003-6935
5Â¥2009-09-19 14:31:24
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