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¶Ô²»Æð£¬Éí¼Û¾Í6¸ö½ð±Ò£¬ÇóһƪÎÄÕµÄSCIºÅ Title: Method for absolute flatness measurement of optical surfaces Authors: Xu, Chen1 ; Chen, Lei1 ; Yin, Jiayi1 Author affiliation: 1 School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, 200 Xiao-ling-wei, Nanjing 210094, China Source title: Applied Optics Abbreviated source title: Appl. Opt. Volume: 48 Issue: 13 Issue date: May 1, 2009 |
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likeupp
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SCIÊÕ¼ºÅΪ£ºUT WOS:000266260000017 ÏêÇ飺 FN ISI Export Format VR 1.0 PT J TI Method for absolute flatness measurement of optical surfaces AU Xu, C Chen, L Yin, JY SO APPLIED OPTICS VL 48 IS 13 BP 2536 EP 2541 PY 2009 TC 0 AB To determine the absolute flatness deviations of optical surfaces, a novel method using two optical plates to achieve the absolute flatness test is presented. Absolute deviations of three surfaces, the rear surface of plate I and the front and rear surfaces of plate II, are obtained by four measurements. Wavefront error due to the inhomogeneity of plate II is measured beforehand and is then subtracted from the test results. Vertical profiles of the three surfaces are compared with the measurement results obtained by Zygo's three-flat application. Good agreement validates our method. The advantage of our method is that only one transmission flat is needed during the absolute test, which is especially useful for large-aperture interferometer calibration. (C) 2009 Optical Society of America UT WOS:000266260000017 SN 0003-6935 |
5Â¥2009-09-19 14:31:24
xiewenfa
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happychen823(½ð±Ò+5,VIP+0):ллÄ㣡 9-19 14:29
happychen823(½ð±Ò+5,VIP+0):ллÄ㣡 9-19 14:29
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ͨѶ×÷ÕßµØÖ·: Chen, L (ͨѶ×÷Õß), Nanjing Univ Sci & Technol, Sch Elect Engn & Optoelect Technol, 200 Xiao Ling Wei, Nanjing 210094, Peoples R China µØÖ·: 1. Nanjing Univ Sci & Technol, Sch Elect Engn & Optoelect Technol, Nanjing 210094, Peoples R China µç×ÓÓʼþµØÖ·: chenleiy@126.com ³ö°æÉÌ: OPTICAL SOC AMER, 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036 USA ѧ¿ÆÀà±ð: Optics IDS ºÅ: 448JX |
2Â¥2009-09-19 14:10:40
3Â¥2009-09-19 14:19:20
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6Â¥2009-09-19 14:45:08














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