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The nanoindentation experimental results is in the Fig.3. The experimental results shows, the spring stiffness of oxde film is 4-15¦ÌN/nm. The results is in line with the simulation results and experimental results from K. Fatima[2]. Due to the oxide film is thinner, the spring stiffness of the oxide film is smaller, and the effect of spring stiffness of oxde film on grinding process can be ignored when the abrasive grain¡¯s cutting depth is very large. In the precision grinding, the abrasive grain¡¯s cutting depth is very small, by this time the spring stiffness of the oxide film can¡¯t be ignored. The elastic deformation of oxide film makes the grains at the same hight, and the cooperativity of grains increases. At same time, the actual cutting depth of the abrasive decreases, even the oxide film with grains burnishes the grinding surface. Therefore the grinding surface quality is improved due to elastic deformation of the oxide film.
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The results of nanoindentation experiment are shown in Fig.3. The spring stiffness of oxde film is 4-15¦ÌN/nm, which is in agreement with the previous study by K. Fatima[2]. As the oxide film is thinner and the spring stiffness of the oxide film is smaller, the effect of spring stiffness of oxide film on grinding process can be ignored when the abrasive grain¡¯s cutting depth is very large. In the precision grinding, the abrasive grain¡¯s cutting depth is very small, by this time the spring stiffness of the oxide film can¡¯t be ignored. The elastic deformation of oxide film makes the grains at the same hight, and the cooperativity of grains increases. At same time, the actual cutting depth of the abrasive decreases, even the oxide film with grains burnishes the grinding surface. Therefore, it can be concluded that the improvement of grinding surface quality is attributed to the elastic deformation of the oxide film.

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