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bote

it seems to mean the line width of the Cu but not the thickness.

It is difficult to reach this tiny width using a lab photolithography system. A special photolithography machine is required which employs ArF or FKr laser as the light source

[ Last edited by bote on 2009-9-5 at 14:15 ]
3Â¥2009-09-05 12:52:18
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