ÒÑÈëפСľ³æ 20 Ìì
http://www.rdmicro.com
¹â¿Ì½º£¬¹èƬ£¬¸÷Öֳĵף¬ÌØÊâºÄ²Ä£¬Î¯Íмӹ¤
½­ËÕÊ¡ËÕÖÝÊй¤ÒµÔ°ÇøÈôˮ·398ºÅ ÖпÆÔºËÕÖÝÄÉÃ×ËùB705
ÁªÏµÈË: Ðì¼ÑÔ£ / ÓÊÏä: xujy@rdmicro.com / QQ: 154733475 / µç»°: 0512-68636965 / ÊÖ»ú: 13776045471
²é¿´: 3968  |  »Ø¸´: 107
µ±Ç°Ö»ÏÔʾÂú×ãÖ¸¶¨Ìõ¼þµÄ»ØÌû£¬µã»÷ÕâÀï²é¿´±¾»°ÌâµÄËùÓлØÌû

ÑвÄ-jiali

¾èÖú¹ó±ö (СÓÐÃûÆø)

[É̼ҹ©Ó¦] ÑвÄ΢ÄÉ-ÈÈÏú¸÷¿î¹â¿Ì½º£¬SU-8ϵÁУ¬S1800ϵÁУ¬lift-off½ºµÈ£¬ÏÖ»õ£¡

±¾É̼ÒûÓвμÓÓŻݻ£¬Ò»ÆðÑûÇëËûÀ´²Î¼Ó°É ÎҵĴú½ðȯ

´ú½ðȯ0Ôª
ÏÞÁ¿ x ÕÅ
Âú x ¿ÉʹÓã»ÓÐЧÆÚ x Ì죻¹ýÆÚ¿ÉÍË

ÄÚÈÝ

ÎÒÃǹ«Ë¾ÌṩÊÀ½ç¸÷´óÆ·ÅƵĹâ¿Ì½º£¬ÈçShipley£¬Dow£¬SU-8µÈ¡£
°´ÀàÐÍÀ´·Ö£º
1.³£Óñ¡½ºÓÐS1800ϵÁУ¬BCI-3511......²»Í¬µÄÐͺŶÔÓ¦µÄ²»Í¬ºñ¶È·¶Î§ºÍ·Ö±æÂÊ£¬ºñ¶È´Ó0.5umµ½5um£¬·Ö±æÂÊ´Ó0.5umµ½1um¡£ÊÊÓÃÓÚ¸÷Àà½Ó´¥Ê½¹â¿Ì»ú£¬stepper£¬Îȶ¨ÐԺ㬹㷺ӦÓÃÓÚ°ëµ¼ÌåÖÆÔì¡£

2.³£Óúñ½ºÈçSU-8 2000£¬3000ϵÁÐÊǸºÐÔ»·ÑõÀà¹â¿Ì½º£¬¾ßÓиßÉî¿í±È£¬¹â¿Ìºó¿É´ïµ½·Ç³£ºÃµÄ¶¸Ö±¶È¡£³©Ïú¿îÕýÐÔºñ½ºSPR220£¬ºñ¶È·¶Î§1-30um£¬·Ö±æÂÊ1um£¬ÓÐÁ¼ºÃµÄ𤸽ÐÔ£¬¿ÉÓÃ×÷µç¶Æ¹¤ÒÕ£¬¹ã·ºÓ¦ÓÃÓÚMEMSºÍBump¹¤ÒÕ

3.Lift off¹â¿Ì½º³£ÓõÄÊÇKXN5735-LOºÍLORϵÁУ¬KXN5735-LO·Ö±æÂÊΪ4um£¬ºñ¶È·¶Î§2.2-5.2um£¬µ¹½Ç70¡ã×óÓÒ¡£LORÓÃÓÚË«²ã½º¹¤ÒÕÖеĵײ㽺¡£
4.»¹Óи÷ÖÖµç×ÓÊø¹â¿Ì½º£¬¾ßÓм«¼ÑµÄ·Ö±æÂÊ¡£HSQ XR-1541-006ºñ¶È·¶Î§85nm-180nm£¬·Ö±æÂÊ¿É´ï6nm¡£½ø¿Ú¡¢¹ú²úPMMAÓкܶ಻ͬµÄ·Ö×ÓÁ¿£¬¶ÔÓ¦²»Í¬·Ö±æÂÊ£¬×Ý¿í±È£»ÊÊÓÃÓÚË«²ã¹¤ÒÕ¡£

5.´ËÍ⻹ÓвÊÉ«¹â¿Ì½º£¬¹â¹Ì»¯½º£¬¸ÉĤµÈ~²»Í¬µÄ¹¤ÒÕÓ¦ÓöÔÓ¦²»Í¬µÄÐͺţ¬»¶Ó­´ó¼ÒÇ°À´×Éѯ~ÎÒ»á¸ø¸÷λÍƼöÊʺϵĹâ¿Ì½º£¬¼Û¸ñ¾ªÏ²£¬Æ·ÖÊÓÅÁ¼£¡

ËÕÖÝÑвÄ΢ÄɿƼ¼ÓÐÏÞ¹«Ë¾
Suzhou Research Materials Microtech Co., Ltd
Tel: 0512-68636965
QQ£º154733475
Fax: 0512-62872362
Phone:13776045471
Email: xujy@rdmicro.com
Address:ËÕÖݹ¤ÒµÔ°Çø¶ÀÊûºþ¸ß½ÌÇøÈôˮ·398ºÅËÕÖÝÄÉÃ×Ëù¼Ó¹¤Æ½Ì¨B705
**********************************************
ºÏ×÷µ¥Î»ÓÑÇéÁ´½Ó£º
ÖпÆÔºËÕÖÝÄÉÃ×Ëùhttp://www.sinano.cas.cn/
ÖпÆԺ΢µç×ÓËùhttp://www.ime.ac.cn/
ËÕÖÝÃÀͼ°ëµ¼Ìåhttp://www.memstools.cn/

» ²ÂÄãϲ»¶

» ÇÀ½ð±ÒÀ²£¡»ØÌû¾Í¿ÉÒԵõ½:

²é¿´È«²¿É¢½ðÌù

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
23Â¥2018-09-26 16:04:12
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
Ïà¹Ø°æ¿éÌøת ÎÒÒª¶©ÔÄÂ¥Ö÷ ÑвÄ-jiali µÄÖ÷Ìâ¸üÐÂ
×î¾ßÈËÆøÈÈÌûÍƼö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[ÂÛÎÄͶ¸å] ÂÛÎÄÒ»ÉóÒâ¼û»ØÀ´ºó·¢ÏÖʵÑé³ÌÐò±à´íÁËÂÛÖ¤·ÖÎö²¿·Ö¿ÉÄÜÒª´ó¸Ä 5+4 hshhenb 2024-05-20 5/250 2024-05-21 11:03 by bnullh
[»ù½ðÉêÇë] Õâ¸öÄ£¿éÔõô³ÉÁËÉÕÏã°Ý·ðµÄµØ·½ÁË +7 shrz98 2024-05-18 7/350 2024-05-21 10:26 by lancet0903
[ÂÛÎÄͶ¸å] SENSORS AND ACTUATORS B-CHEMICAL 15+4 ÈÙСƲ 2024-05-20 4/200 2024-05-21 10:07 by ca0yan9
[˶²©¼ÒÔ°] ÓÖ¼ûÆæÝâѧÉú£¬¿ÉÕ¦°ì +25 appleapple2 2024-05-17 30/1500 2024-05-21 09:13 by qyws
[½Ìʦ֮¼Ò] ÁíÒ»°ëÊÇÀÏʦ»á¼Ó·ÖŶ +14 acogw9004 2024-05-14 14/700 2024-05-21 08:54 by bxwisdom_886
[½Ìʦ֮¼Ò] ÇཷµÄδÀ´ÔÚÄÄÀ +17 sxhuabin 2024-05-15 18/900 2024-05-20 22:55 by ˲ϢÓîÖæ
[ÕÒ¹¤×÷] ÉÜÐËÎÄÀíѧԺÔõôÑù£¿ÓÐûÓпӰ¡ +9 zhaojiang427 2024-05-16 23/1150 2024-05-20 21:44 by ¸ß°½²Ü
[˶²©¼ÒÔ°] µ¼Ê¦ÕâÑù˵µ½µ×ÓÐûÓлú»á°¡¡­¡­¡­ +9 Àí¿ÆÉúyes 2024-05-14 16/800 2024-05-20 15:28 by holypower
[»ù½ðÉêÇë] Á¬Ðø3Äê¹úÉç¿ÆÇàÄê±¾×Ó¶¼Ã»ÖУ¬½ñÄê×îºóÒ»´ÎÇàÄêÁË£¬Ð´±¾×ÓÍêÈ«ÀË·Ñʱ¼ä +15 ddkk3000 2024-05-15 23/1150 2024-05-20 11:34 by ddkk3000
[¿¼²©] 25Ä격ʿÉêÇë +6 lixinmiao9 2024-05-18 6/300 2024-05-20 11:19 by ÅáÏÈÉú533
[»ù½ðÉêÇë] ÓÐÖªµÀ¹¤²Äe01Çé¿öµÄÂ𣿠+13 xiaopang8958 2024-05-17 19/950 2024-05-20 09:52 by Íɱä123~
[ÂÛÎÄͶ¸å] ÍƼöתͶ£¨ transfer pending£©ÊÇ·ñÓÐÓã¿ 50+3 lily5289 2024-05-17 7/350 2024-05-19 15:11 by wanghuawei
[¿¼²©] Ïë±»211ÒÔÉϸßУ¿ÎÌâ×é½ÓÊÕ +8 ·çÆð²×À½ 2024-05-16 10/500 2024-05-19 06:52 by Guo369
[»ù½ðÉêÇë] ¹ú×ÔÈ»Çà»ù°Ñ¹²Í¬µÚÒ»×÷Õß±ê³ÉÁËΨһµÚÒ»×÷Õß +27 1137025804 2024-05-15 29/1450 2024-05-18 16:22 by CQmadfrog
[ÂÛÎÄͶ¸å] Ò»¸öÉó¸åÈËÒÑ·µ»Ø£¬Ò²Ã»ÑûÇëÉó¸åÈË£¬Ò²Ã»ÈËÉó¸åÖУ¬±à¼­ÒªÄÖɶ£¿ 3+3 ÁÖʦÃà 2024-05-14 12/600 2024-05-17 22:33 by ÁÖʦÃÃ
[ÁôѧDIY] ÇóÖú£ºÒ½ÉúÏëÈó +7 safrina 2024-05-15 7/350 2024-05-17 18:50 by ¿¨Æ¤°ÉÀ²123
[ÂÛÎÄͶ¸å] Ͷ¸å³É¹¦ºóÓÖÏë³·»Ø +5 otani 2024-05-16 5/250 2024-05-17 16:02 by topedit
[˶²©¼ÒÔ°] Öйú¿ÆѧԺ´óѧÀÑÞÀÏʦ¿ÎÌâ×é³ÏÕÐ˶/²©Ñо¿ÉúºÍ²©Ê¿ºó£¬³ÏƸ¿Í×ù±¾/˶/²©Ñ§Éú +4 ucaszmh 2024-05-14 5/250 2024-05-16 19:51 by ÎÒÊÇС°à
[»ù½ðÉêÇë] ϵͳµ¼³öÉ걨ÊéÖвÎÓëÈËÄÇÒ»Ò³µÄ¸ñʽ£¬¿çÈëÁ½Ò³£¬ÒªÍ¨¹ýµ÷ÕûÐмä¾àµ÷Õûµ½Ò»Ò³Â𣿠+3 danisha 2024-05-15 5/250 2024-05-16 18:21 by danisha
[»ù½ðÉêÇë] ÓÐÈË¿´ÁËÎҵĿÆÑÐÖ®ÓÑ +9 jurkat.1640 2024-05-14 12/600 2024-05-15 16:04 by arthas_007
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û