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[求助] LAMMPS Tersoff提示出错已有1人参与

我在用LAMMPS编写铜在硅上沉积的过程中，使用了Tersoff style，然后提示Tersoff使用的不正确，找了好久问题没找到，因此求教各位大神。错误如图，代码如下。其中加下划线部分为提示出错的地方，但是我认为不应该是这里的问题。
附in文件：
#input file for copper deposition

clear
units metal
dimension 3
atom_style atomic
boundary p p f

#Definition of the simulation box
lattice fcc 5.43
region box block 0 20 0 20 0 22
create_box 4 box

#Definition of mass
mass 1 28
mass 2 28
mass 3 28
mass 4 63.5

#Definition of pair style and pair coefficient
newton on
pair_style tersoff
pair_coeff * * Si.tersoff Si
pair_coeff 3 4 Si.tersoff.modc Si Cu
pair_style eam/alloy
pair_coeff 4 4 Cu_u3.eam Cu

#Definition of substrate atoms
region substrate_down block 0 20 0 20 0 1
create_atoms 1 region substrate_down
group fix_atoms region substrate_down

region substrate_middle block 0 20 0 20 1 4
create_atoms 2 region substrate_middle
group temperature_atoms region substrate_middle

region substrate_up block 0 20 0 20 4 6
create_atoms 3 region substrate_up
group mobile_atoms region substrate_middle

neigh_modify delay 0

#Definition of the deposition atoms
group Cu_atoms type 4
region atoms_region block 0 20 0 20 6 22
group atoms_region region atoms_region

#Definition of the computation information
compute atoms_temperature atoms_region temp
compute_modify atoms_temperature dynamic yes extra 0

#Setting of other conditions
fix 1 fix_atoms nve
fix 2 temperature_atoms langevin 220 220 1 587283
fix 3 temperature_atoms nve
fix 4 mobile_atoms langevin 220 220 1 587283
fix 5 mobile_atoms nve
fix 6 Cu_atoms nve

#Position of deposition atoms
region       slab block 0 20 0 20 16 22

#
fix 7 Cu_atoms deposit 2200 4 100 12345 region slab near 4.0 &
   vz -0.0055 -0.0055
fix 8 Cu_atoms wall/reflect zhi EDGE
thermo_style custom step atoms temp epair etotal press
thermo       100
thermo_modify temp atoms_temperature lost/bond ignore lost warn

dump 1 all atom 50 dump.deposit.atom

#dump 2 all image 50 image.*.jpg type type &
# axes yes 0.8 0.02 view 80 -30
#dump_modify 2 pad 5

dump 3 all movie 50 movie.mpg type type &
axes yes 0.8 0.02 view 80 -30
dump_modify 3 pad 5

run          300000

错误.png

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