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标题为 Neutron and X-ray Reflection Study on Interfacial Structure of TiAlN/CrAlN Nano-scale Multilayer。 期刊为：Atomic energy science and technology, Vol.50, issue 6, 2016。谢谢。 |
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Accession number: 20162802580580 Title: Neutron and X-ray reflection study on interfacial structure of CrAlN/TiAlN nano-scale multilayer Authors: Du, Xiao-Ming1; Wang, Min-Peng1; Wang, Yan2; Li, Xin-Xi2; Zhang, Gang1; Huang, Chao-Qiang2; Wu, Er-Dong3 Author affiliation: 1School of Materials Science and Engineering, Shenyang Ligong University, Shenyang; 110159, China 2Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang; 621900, China 3Institute of Metal Research, Chinese Academy of Sciences, Shenyang; 110016, China Source title: Yuanzineng Kexue Jishu/Atomic Energy Science and Technology Abbreviated source title: Yuanzineng Kexue Jishu Volume: 50 Issue: 6 Issue date: June 20, 2016 Publication year: 2016 Pages: 1112-1117 Language: Chinese ISSN: 10006931 CODEN: YKJIEZ Document type: Journal article (JA) Publisher: Atomic Energy Press Abstract: CrN nano-scale monolayer film and CrAlN/TiAIN nano-scale multilayer with different periods were fabricated by DC magnetron sputtering. Neutron and X-ray reflection measured reflectivity were used to characterize the surface, interface structures and properties of the multilayer, such as film thickness, interfacial roughness and interfacial diffusion and so on. The results show that there is a difference of 3.8%-4.2% for the film thickness of CrN monolayer and CrAlN/TiAIN multilayer between the measured values by neutron reflectometry and pre-designed values. The interfaces between films and substrate are sharp and less diffusion. Moreover, the film thickness of CrAlN/TiAIN multilayer obtained by X-ray reflection is larger than that of neutron reflectometry. For the multilayer with the smaller modulation periods, the interfacial diffusion may cause large errors for X-ray reflection results. © 2016, Editorial Board of Atomic Energy Science and Technology. All right reserved. Number of references: 18 Main heading: Interfaces (materials) Controlled terms: Diffusion - Film thickness - Monolayers - Multilayers - Nanotechnology - Neutron reflection - Neutrons - Reflection - Reflectometers Uncontrolled terms: Dc magnetron sputtering - Interface structures - Interfacial diffusion - Interfacial roughness - Interfacial structures - Modulation period - Neutron reflectometry - X ray reflection Classification code: 761 Nanotechnology - 941.3 Optical Instruments - 951 Materials Science DOI: 10.7538/yzk.2016.50.06.1112 Database: Compendex Compilation and indexing terms, © 2016 Elsevier Inc. Full-text and Local Holdings Links |
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