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du511

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[求助] 求助检索一篇论文,是否被EI检索了?着急,在线等!

标题为 Neutron and X-ray Reflection Study on Interfacial Structure of TiAlN/CrAlN Nano-scale Multilayer。
期刊为:Atomic energy science and technology, Vol.50, issue 6, 2016。谢谢。

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baiyuefei

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★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★ ★
感谢参与,应助指数 +1
du511: 金币+20, ★★★★★最佳答案, 非常感谢! 2016-09-04 08:57:11
心静_依然: LS-EPI+1, 感谢应助 2016-09-04 09:19:36
Accession number:


20162802580580






Title:

Neutron and X-ray reflection study on interfacial structure of CrAlN/TiAlN nano-scale multilayer






Authors:

Du, Xiao-Ming1; Wang, Min-Peng1; Wang, Yan2; Li, Xin-Xi2; Zhang, Gang1; Huang, Chao-Qiang2; Wu, Er-Dong3





Author affiliation:

1School of Materials Science and Engineering, Shenyang Ligong University, Shenyang; 110159, China






2Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang; 621900, China






3Institute of Metal Research, Chinese Academy of Sciences, Shenyang; 110016, China






Source title:

Yuanzineng Kexue Jishu/Atomic Energy Science and Technology






Abbreviated source title:

Yuanzineng Kexue Jishu






Volume:

50






Issue:

6






Issue date:

June 20, 2016






Publication year:

2016






Pages:

1112-1117






Language:

Chinese






ISSN:

10006931






CODEN:

YKJIEZ






Document type:

Journal article (JA)






Publisher:

Atomic Energy Press






Abstract:

CrN nano-scale monolayer film and CrAlN/TiAIN nano-scale multilayer with different periods were fabricated by DC magnetron sputtering. Neutron and X-ray reflection measured reflectivity were used to characterize the surface, interface structures and properties of the multilayer, such as film thickness, interfacial roughness and interfacial diffusion and so on. The results show that there is a difference of 3.8%-4.2% for the film thickness of CrN monolayer and CrAlN/TiAIN multilayer between the measured values by neutron reflectometry and pre-designed values. The interfaces between films and substrate are sharp and less diffusion. Moreover, the film thickness of CrAlN/TiAIN multilayer obtained by X-ray reflection is larger than that of neutron reflectometry. For the multilayer with the smaller modulation periods, the interfacial diffusion may cause large errors for X-ray reflection results. © 2016, Editorial Board of Atomic Energy Science and Technology. All right reserved.






Number of references:

18






Main heading:

Interfaces (materials)






Controlled terms:

Diffusion - Film thickness - Monolayers - Multilayers - Nanotechnology - Neutron reflection - Neutrons - Reflection - Reflectometers






Uncontrolled terms:

Dc magnetron sputtering - Interface structures - Interfacial diffusion - Interfacial roughness - Interfacial structures - Modulation period - Neutron reflectometry - X ray reflection






Classification code:

761 Nanotechnology - 941.3 Optical Instruments - 951 Materials Science





DOI:

10.7538/yzk.2016.50.06.1112






Database:

Compendex






Compilation and indexing terms, © 2016 Elsevier Inc.



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du511

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非常感谢! @baiyuefei
3楼2016-09-04 08:56:43
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