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Accession number: 20161102092737 |
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Accession number: 20161102092737 Title: On-line scheduling of cluster tools based on hybrid quantum evolutionary algorithm Authors: Li, Linying1 ; Lu, Rui2 Author affiliation: 1School of Software, Dalian University of Foreign Languages, Dalian, Liaoning Provice, China 2Police Information Department, Liaoning Police College, Dalian, Liaoning Provice, China Source title: 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics Abbreviated source title: IEEE Int. Conf. Inf. Autom., ICIA - conjunction IEEE Int. Conf. Autom. Logist. Monograph title: 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics Issue date: September 28, 2015 Publication year: 2015 Pages: 2558-2562 Article number: 7279716 Language: English ISBN-13: 9781467391047 Document type: Conference article (CA) Conference name: 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics Conference date: August 8, 2015 - August 10, 2015 Conference location: Yunnan, China Conference code: 116345 Sponsor: CAS Shenzhen Institute of Advanced Technology; Harbin Institute of Technology Shenzhen Graduate School; HIT State Key Laboratory of Robotics and Systems; IEEE Robotics and Automation Society; Shanghai Gaitech Scientific Instruments Co., Ltd.; The Chinese University of Hong Kong Publisher: Institute of Electrical and Electronics Engineers Inc. Abstract: For on-line scheduling problem of cluster tools in semiconductor manufactory, this paper proposes an on-line scheduling method based on hybrid quantum evolutionary algorithm. This method determines the optimal wafer sequence by quantum evolutionary, while the heuristic algorithm determines the robot sequence based on the given sequence by two-stage recursion procedure. One recursion procedure is to search the feasible solution space of a new insert wafer in a forward stepwise manner, which guarantees both logic correctness and temporal constraints. The other computes the optimal solution among the feasible solution space obtained in the previous phase in a maximum backtracking manner. The simulations show that the mentioned method is effective for solving the large-scale scheduling problems. © 2015 IEEE. Number of references: 11 Main heading: Evolutionary algorithms Controlled terms: Algorithms - Automation - Clustering algorithms - Heuristic algorithms - Heuristic methods - Optimization - Scheduling - Silicon wafers - Tools Uncontrolled terms: Cluster tool - Feasible solution spaces - Large-scale scheduling problems - Online scheduling - Optimal solutions - Quantum evolutionary algorithms - Recursions - Temporal constraints Classification code: 714.2 Semiconductor Devices and Integrated Circuits - 723.1 Computer Programming - 731 Automatic Control Principles and Applications - 903.1 Information Sources and Analysis - 912.2 Management - 921.5 Optimization Techniques DOI: 10.1109/ICInfA.2015.7279716 Database: Compendex Compilation and indexing terms, © 2016 Elsevier Inc. |
2Â¥2016-03-27 16:35:17













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