|
[×ÊÔ´]
SPOS¼¼ÊõÔÚ°ëµ¼ÌåCMPÖƳÌÖеÄÓ¦ÓÃ
SPOS¼¼ÊõÔÚ°ëµ¼ÌåCMPÖƳÌÖеÄÓ¦ÓÃ
Õª Òª£ºÊ¹Óõ¥Á£×Ó¹âѧ´«¸Ð¼¼Êõ½øÐÐÁ£¾¶·ÖÎö£¬¾ßÓи߷ֱæÂʺ;«È·¶ÈµÄÌص㣬½«ÆäÓ뼤¹âÑÜÉäµÈÕûÌå¼ì²â¼¼Êõ½øÐбȽϣ¬Ó¦ÓÃʵÀý£¬ËµÃ÷Á˵¥Á£×Ó¹âѧ´«¸Ð¼¼Êõ¶Ô°ëµ¼ÌåCMPÖƳ̵ıØÒªÐÔ¡£
¹Ø¼ü´Ê£ºµ¥Á£×Ó¹âѧ´«¸Ð¼¼Êõ£»¸ß·Ö±æÂÊ£»¼¤¹âÑÜÉ䣻»¯Ñ§»úеÑÐÄ¥£»Á£¾¶·ÖÎö
High-Sensitivity Particle Size Analysis of Colloidal Suspensions (CMP Slurries) by SPOS: Where Less Becomes More
Abstract£ºThe technique of single particle optical sensing (SPOS) offers high resolution and sensitivity in particle size analysis compared with ensemble techniques like Laser Diffraction, gives a number of samples, describes the necessity of using SPOS in CMP process.
Keywords£ºSingle Particle Optical Sensing (SPOS)£»High resolution£»Laser Diffraction£»CMP£»Particle size analysis
½ºÌå»ìÐüÒºÓë·ÖÉ¢ÌåÓÐ×ÅÊ®·Ö¹ã·ºÓ¦ÓÃÁìÓò£¬¶ø¾ö¶¨ÕâЩÌåϵÖÊÁ¿ºÍÎȶ¨ÐÔµÄÖØÒªÒòËؾÍÊÇÆäÄÚ²¿µÄÁ£¾¶·Ö²¼£¬Òò¶ø׼ȷÕÆÎÕÕâЩÌåϵµÄÁ£¾¶·Ö²¼ÌØÕ÷¾ÍÄÜÈ·±£ÆäÔڹ㷺ÁìÓòµÄ³É¹¦Ó¦Óá£Ïà¶ÔÓÚһЩÕûÌå¼ì²â¼¼Êõ£¬È磺¼¤¹âÑÜÉä¼¼ÊõÓ볬ÉùË¥¼õ¼¼Êõ£¬µ¥Á£×Ó¹âѧ´«¸Ð¼¼Êõ (Single Particle Optical Sensing, SPOS) ÔÚ·Ö±æÂÊÓ뾫ȷ¶È·½ÃæÈ¡µÃÁËÖØ´óµÄÍ»ÆÆ¡£Òò´Ë£¬¶Ô¶àÖÖ»ìÐüÒººÍ·ÖÉ¢ÌåµÄÖÊÁ¿ÓëÎȶ¨ÐÔµÄÑо¿£¬È磺ŨËõÒûÁÏ¡¢´«µÝÒ©ÎïÓëÓªÑøÓõÄË®°üÓÍÈé¼Á£¬°üÒÂÓëÕ³ºÏÓõĸ߷Ö×Ó·ÖÉ¢Ìå¼°°ëµ¼ÌåCMPÖƳÌÖÐʹÓõÄslurryµÈ, SPOS·½·¨¸üÓмÛÖµ¡£
1 Á£¾¶·ÖÎöµÄÖØÒªÐÔ
¶Ô¶àÊý½ºÌå»ìÐüÒºÀ´Ëµ£¬¾ø´ó¶àÊýÁ£×ÓµÄÁ£¾¶Ð¡ÓÚ1¦Ìm£¬µäÐ͵Äƽ¾ùÁ£¾¶·¶Î§ (Ìå»ý/ÖØÁ¿·Ö²¼) Ϊ0.1~0.3¦Ìm¡£È»¶øÎÒÃÇÏ£ÍûµÃµ½µÄÊÇÁ£¾¶´óÓÚ1¦Ìm»ò0.5¦ÌmÕâ¶ÎÁ¿¼«ÉÙÇÒÒ×±»ºöÂÔµÄÁ£×ÓµÄÐÅÏ¢£¬ÒòΪÕâ¶ÎÆ«ÀëÖ÷ÌåµÄβ²¿Á£×Ó¾ö¶¨Á˽ºÌåÈéÒº»ò·ÖÉ¢ÌåµÄÖÊÁ¿ºÍÎȶ¨ÐÔ¡£SPOSÓ¦ÓõÄÒ»¸öµäÐÍÀý×ÓÊÇ°ëµ¼ÌåÖƳÌÖеÄÒ»¸ö¹¤ÒÕ¹ý³Ì¡ª»¯Ñ§»úеÑÐÄ¥£¬¼´³ÆCMP¡£
CMP slurryµÄÖ÷Òª×é³ÉÊÇÑõ»¯Î°üÀ¨¶þÑõ»¯¹è¡¢Ñõ»¯ÂÁ»òÑõ»¯î棬ÁíÍ⻹ÓÐһЩרÊôÐÔÌí¼Ó¼Á¡£µ±¹èƬ±íÃæ¾¹ýÌض¨³Á»ý»òÊ´¿Ì´¦Àíºó£¬ÐèÓÃCMP slurryÑÐÄ¥»òÅ׹⡣ͨ¹ý»úеÑÐÄ¥»ò»¯Ñ§Ê´¿Ì³ýÈ¥±íÃæ±»¸²µÄ²¿·ÖÑõ»¯Îï»ò½ðÊô¡£Îª»ñµÃ³¬´ó¹æÄ£¼¯³É£¨very large scale integrated, VLSI£©µç·µÄ¸ß³ÉÆ·ÂÊ£¬CMP slurryÔÚÅ×¹â¹ý³ÌÖоö²»ÄÜÒý½ø¹ÎºÛ»òÆäËüȱÏÝ¡£Òò´Ë£¬ÔÚÁ£¾¶·Ö²¼Í¼Öмà²âÁ£×ӵľۼ¯³Ì¶È¼°Î²²¿´óÁ£×ӵķֲ¼ÐÅÏ¢£¬¶ÔÓÚ¿ØÖÆÖÊÁ¿ÖÁ¹ØÖØÒª¡£½ºÌå»ìÐüÒº»ò·ÖÉ¢Ìå±¾ÖÊÉϽÔÊDz»Îȶ¨Ìåϵ£¬ÓÐÐí¶àÒòËØ°üÀ¨£ºÏ¡ÊÍÓëpHÍ»±äµ¼ÖµĵçºÉÎȶ¨×÷ÓýµµÍ£»Á½ÖÖ×é·Ö²»Êʵ±µÄ»ìºÏ£»±Ã¡¢ÂËÆ÷¼°¹Ü·¸øÓèµÄ¼ôÇÐÁ¦£»Î¶ȵı仯£»ÎÛȾÎïµÄÒýÈ룻Öü´æÆڵijÁµíµÈµÈ£¬½Ô¿É¼ÓËÙÆäÁ£×Ó¾Û¼¯¡£
2 ´«Í³µÄ¼¤¹âÑÜÉäµÄ·ÖÎö·½·¨
ÔçÆÚÒòΪ¼¤¹âÑÜÉäÒÇ·ÖÎö¾ßÓж¯Ì¬Á£¾¶·¶Î§¹ã(0.1¡«1000¦Ìm)¡¢¼ì²âʱ¼ä¶Ì¼°ÖØÏÖÐԸߵÈÌص㣬ËùÒÔ³£ÓÃÀ´¼ì²âCMP slurryµÄÁ£¾¶·Ö²¼ÌØÕ÷¡£¼¤¹âÑÜÉäÒǵŤ×÷ÔÀíÊÇ»ùÓÚ²»Í¬ÐÔÖʵÄÁ½¸öÎïÀíÁ¿£ºFraunhoferÑÜÉä(Fraunhofer diffraction, FD) ÓëMieÉ¢Éä (Mie scattering, MS)¡£ÀíÂÛÉϽ²£¬¶ÔÓÚÌض¨Á£¾¶µÄÁ£×Ó£¬¼¤¹âÑÜÉä»á²úÉúÒ»¸öÃ÷°µÏà¼äµÄÑÜÉä»·¡£ÑÜÉä»·µÄλÖü°ÏàÁڹ⻷¼äµÄ¾àÀëÓëÁ£×ÓµÄÁ£¾¶³É·´±È¡£µ«ÊǶÔÓÚÁ£¾¶Ð¡ÓÚ2¦ÌmµÄÁ£×Ó£¬ÑÜÉä»·¾Í¼ì²â²»µ½£¬´Ëʱ±ØÐëÒÔÁíÒ»Öֵķ½·¨£¬¼´ MS ¡£¸Ã·½·¨ÃèÊöÁËÒ»¸öÌض¨Á£×ÓÓÉÓÚ¸÷µãÉ¢Éä¹â²¨µÄÏ໥¸ÉÉæµ¼ÖµĴó½ÇÉ¢ÉäµÄ¸Ä±ä£¬¶øÕâÖÖÉ¢Éä½Ç¶ÈµÄ±ä»¯²»½öÈ¡¾öÓÚÁ£×ÓÁ£¾¶Ó뼤¹â²¨³¤£¬»¹ÓëÁ£×ÓµÄÎü¹âÐÔÖÊÓëÕÛÉäÂÊÓйء£
Òź¶µÄÊÇ£¬ÓÉÓÚLD¼¼Êõ×ÛºÏÁËÉÏÊöÁ½ÖÖÎïÀíÁ¿µÄÐÔÖʶøÏÞÖÆÁËÒÇÆ÷µÄ·Ö±æÂÊÓëÁéÃô¶È£¬Ò²¾ÍÊÇ˵£¬ÎÞÂÛÊÇFD²úÉúµÄÑÜÉä»·µÄ´óСÓëÁÁ¶È£¬»¹ÊÇMS´øÀ´µÄ´ó½ÇÉ¢ÉäµÄ±ä»¯Çé¿ö£¬¶¼ÊÇͬһʱ¼äËùÓÐÁ£¾¶µÄÁ£×Ó²úÉúµÄµ¥¸öÑÜÉäºÍ/»òÉ¢ÉäÏìÓ¦Ðźŵĵþ¼Ó¡£ËùÒÔ£¬ÕâЩFDºÍMSÏìÓ¦ÐźŵÄ×éºÏ£¬±ØÐëÏȾ¹ýһЩÊʵ±µÄ·½Ê½ºÏ²¢£¬È»ºóͨ¹ýÏàÓ¦µÄÊýѧÔËËã·½·¨½«Æäת»¯£¬Ä¿µÄÊǵõ½Ïà¶Ô¾«È·ÇÒ½Ó½üÕæʵµÄÁ£¾¶·Ö²¼Í¼¡£ÖÚËùÖÜÖª£¬ÈκÎÊýѧÔËËãÆä±¾Éí¶¼ÓÐÒ»¶¨µÄ²»×㣬Òò¶øÔÚ¸ø³öÁ£¾¶·Ö²¼Í¼Ê±½«»á²úÉúÎÞ·¨±ÜÃâµÄÎó²îÓë¼ÙÏó¡£
¶Ô³¬Ð¡Î¢Á£µÄ½ºÌå»ìÐüÒºÓë·ÖÉ¢Ì壬¼¤¹âÑÜÉäÒǶÔÁ£¾¶·Ö²¼Í¼ÖÐÏà¶Ô½ÏÉÙµÄβ²¿´óÁ£×Ó²»Ãô¸Ð£¬¶øÕýÊÇÕⲿ·ÖÁ£×Ó¶Ô³¬Ð¡Î¢Á£µÄ»ìÐüÒº/·ÖÉ¢ÌåÖÁ¹ØÖØÒª¡£¾ÙÀýÀ´Ëµ£¬¡°ºÃ¡±Óë¡°»µ¡±µÄCMP slurry¼äµÄ¹âÉ¢ÉäÇ¿¶ÈºÍ/»ò¹âÑÜÉäÇ¿¶ÈµÄÐźž»±ä»¯ÖµºÜС£¬Ð¡µ½Ê¹ÓÃÏÖÓеÄÊýѧת»»¼¼Êõ¶¼²»ÄÜÌṩ¿É¿¿µÄ½á¹û¡£²»ÐÒµÄÊÇ£¬ÕâÉÙ²¿·Ö¡°Î²²¿¡±´óÁ£×Ó·Ö²¼²ÅÄÜÌṩCMP slurryÊÇ·ñ¡°°²È«¡±µÄ¹Ø¼üÐÔÐÅÏ¢¡£
3 ¸ß·Ö±æÂʺ;«È·¶ÈµÄSPOS¼¼Êõ
Ïà¶Ô¶øÑÔ£¬SPOS¼¼Êõ¶ÔÁ£×ÓµÄÐźÅÏìÓ¦·½Ê½ÊÇÐźÅÓëÌض¨Á£×ÓÏà¶ÔÓ¦µÄ¡£ÐźÅΪÿһÁ£×ÓÏàÓ¦²úÉúµÄÒ»¶¨Ç¿¶ÈµÄÂö³å£¬¶ø²»ÐèÒª½øÐÐת»¯¡£Á£¾¶·Ö²¼Í¼ÖеÄÐźÅÖ±½ÓÀ´×ÔÓÚÿ´ÎÒ»¸öÁ£×ӵĿìËÙ¼ì²â£¨< 10,000/sec£©¡£ÒÔSPOSΪ»ù´¡µÄAccuSizer 780Á£¾¶¼ì²âϵͳ£¨Particle Sizing Systems, Santa Barbara, CA£©¶ÔŨËõ»ìÐüÒº½øÐÐ×Ô¶¯Ï¡ÊÍ£¨×¨Àû£©£¬ÒÔÈ·±£Á£¾¶ÔÚÁ¿³Ì·¶Î§ÄÚµÄÁ£×Ó£¨> 0.5 ¦Ìm£©Öð¸öͨ¹ý¹âѧ´«¸ÐÆ÷£¬Òò¶ø±ÜÃâÁ£×ÓÖصþ²¢ÔÚÁ£¾¶·Ö²¼Í¼ÖвúÉú¼ÙÏó¡£AccuSizer 780ÖеĴ«¸ÐÆ÷ͨ¹ýÁ½ÖÖ²»Í¬ÐÔÖʵÄÎïÀí×÷Óã¨×¨Àû£©¡ª¹âÏû¼õ£¨light extinction, LE£©Óë¹âÉ¢É䣨light scattering, LS£©¶Ôͨ¹ý´«¸ÐÆ÷µÄÁ£×Ó½øÐвⶨ¡£
¹âÏû¼õ¼¼Êõ¼ì²âͨ¹ýÁ÷¶¯³ØµÄ¹âÇ¿±ä»¯£¬ÓµÓмì²âÁ£×ÓµÄÁ£¾¶·¶Î§¹ãÇÒÓëÁ£×Ó×é·ÝÎ޹صÈÓŵ㡣Ȼ¶ø£¬ËüµÄÁéÃô¶ÈÓÐÏÞ£¬¶ÔÓÚͨ¹ýºáÇÐÃæΪ400¡Á1000¦Ìm µÄÁ÷¶¯³ØËùÄܼì²âµ½µÄ×îСÁ£×ÓÁ£¾¶Îª1.3¦Ìm¡£ÁíÒ»·½Ã棬¹âÉ¢Éä¼¼Êõ¾ßÓÐÏà¶ÔյĶ¯Ì¬Á£¾¶·¶Î§ (È¡¾öÓÚ¼ì²âÆ÷ / ·Å´óÆ÷µÄ±¥ºÍÖµ)£¬µ«Äܼì²âµ½0.5¦ÌmÁ£¾¶µÄÁ£×Ó£¬Ê¹Óôó¹¦Âʼ¤¹â¹âÔ´»¹Äܼì²âµ½Á£¾¶¸üСµÄÁ£×Ó¡£Í¨¹ýºÏ²¢¹âÏû¼õºÍ¹âÉ¢ÉäÏìÓ¦Ðźţ¬´«¸ÐÆ÷¿ÉͬʱӵÓÐÕâÁ½ÖÖ·½·¨µÄÓŵ㣬Òò¶øÔÚ²»Ëðʧµ¥Á£×Ó·Ö±æÂʾ޴óÓÅÊƵÄÇ°ÌáÏÂÓµÓÐÏà¶Ô½Ï¹ãµÄ¶¯Ì¬Á£¾¶·¶Î§ (¼´0.5¡«400 ¦Ìm) ¡£
»ùÓÚSPOS¼¼Êõ»ñµÃµÄÁ£¾¶·Ö²¼À´×ÔÓÚÿһ¸öÁ£×Ó£¬Òò¶ø´Ó¸ù±¾É϶žøÁËÒÇÆ÷µÄ²»Îȶ¨ÐÔºÍÑÏÖؼÙÏóµÄʵÑé½á¹û£¬¶øÕâÔÚʹÓùâÑÜÉäÐÍÒÇÆ÷ʱ¾³£·¢Éú¡£ÓÉÓÚ¶Ôµ¥¸öÁ£×Ó½øÐмì²â£¬SPOS¼¼Êõ¶ÔÓ°ÏìCMP slurryÖÊÁ¿µÄÁ£×Ó£¨ÈçÁ£¾¶0.5 ¡« 20 ¦Ìm£©ÌṩÁ˼«¸ßµÄ·Ö±æÂʺÍÁéÃô¶È¡£µ±È»£¬SPOS·½·¨¶ÔCMP slurryµÄ¾ø´ó²¿·Ö£¨Ìå»ý±È> 99.9 %£©Á£¾¶Ð¡ÓÚ0.5 ¦ÌmµÄÁ£×ÓûÓÐÏìÓ¦¡£Õâ¾ø´ó²¿·ÖÁ£×ÓÔÚCMP¹ý³ÌÖв»»á¶Ô¾§Æ¬±íÃæÔì³ÉË𺦡£ËùÒÔ£¬¹Û²ìÁ£¾¶·Ö²¼Í¼ÖеĺÜÉÙÒ»²¿·Öβ²¿µÄ´óÁ£×Ó·Ö²¼£¬¾Í¿É»ñµÃÐí¶àÓëCMP slurry¡°°²È«ÐÔ¡±ÓйصÄÐÅÏ¢¡£
4 SPOSÔÚCMPÖƳÌÖеÄʵÀý
ͼ1aÏÔʾµÄÊÇͨ¹ýSPOS¼¼Êõ¼ì²âÁ½·ÝÑõ»¯îæCMP slurryÑùÆ·µÃµ½µÄ×ÜÌåÁ£¾¶·Ö²¼Í¼£¬ÓÉͼ¿ÉÖªslurry1µÄ·Ö²¼½ÏºÃ£¬¶øslurry2ÔÚÈÝÆ÷µ×²¿²úÉú³Áµí£¬¿ÉÊÓΪÆä²»Îȶ¨¡£ºÜÃ÷ÏÔ£¬slurry2ÔÚÿһ¸öÁ£¾¶Í¨µÀ±Èslurry1Óиü¶àµÄÁ£×Ó¡£ÕâÒ»²îÒìÔÚÌå»ý£ÖØÁ¿·Ö²¼Í¼ÖбíÏֵĸüÃ÷ÏÔ£¬Èçͼ1bËùʾ¡£¶Ôslurry2À´Ëµ£¬Á£¾¶´óÓÚ2¦ÌmµÄÁ£×ÓÕ¼¾ÝÁËβ²¿(Á£¾¶>1¦Ìm)¹ÌÌåÁ£×ÓÌå»ýµÄ´ó²¿·Ö¡£´ËÍ⣬ʹÓÃSPOS¼¼ÊõÄܹ»¼ÆËã³öÈÎÒ»Ìض¨Á£¾¶·¶Î§ÄÚ±»¼ì²âÁ£×ÓÌå»ýµÄ¾ø¶Ô°Ù·Ö±È¡£ÔÚslurry1ÖУ¬Á£¾¶´óÓÚ1¦ÌmµÄÁ£×ÓµÄÌå»ýÕ¼ËùÓÐslurryÖÐÁ£×ÓÌå»ý×ܺ͵Ä0.25%£¬¶øÔÚslurry2ÖУ¬´ËÖµÉÏÉýΪ0.68%¡£ÕâЩ½á¹ûÓëʵÑéÏÖÏóÒ»Ö£ºslurry2±Èslurry1ÓиüÏÔÖøµÄ¾Û¼¯¡£ËäÈ»¶ÔÓÚÿһ·ÝslurryÀ´Ëµ£¬Î»ÓÚÁ£¾¶·Ö²¼Í¼Î²²¿µÄÁ£×ÓÆä¾ø¶ÔÌå»ýºÜС£¬µ«ÊÇËüÃǶÔslurryÐÔÄܵÄÓ°ÏìÈ´ÊǾ޴óµÄ¡£
ͼ2a,bÏÔʾµÄÊÇͨ¹ý¼¤¹âÑÜÉä¶ÔÁ½·ÝÏàͬÑõ»¯îæÑùÆ·½øÐмì²âËùµÃµ½µÄÁ£¾¶·Ö²¼Í¼£¨Ìå»ý£ÖØÁ¿·Ö²¼£©¡£Í¼ 2a¼ÙÉèÕÛÉäÂÊn = 1.65 + 0.01i£¬Í¼2b°ÑÎüÊÕϵÊýÌá¸ß10±¶£¬¼´¼ÙÉèÕÛÉäÂÊn=1.65 + 0.1i£¬Á½Õß¼ì²âµÄÆäËûÔʼÊý¾ÝÏàͬ¡£´ÓÖпÉÒԵóöһЩ½áÂÛ£ºÈçÔ¤ÆÚµÄÄÇÑù£¬slurry1µÄÁ£¾¶·Ö²¼Í¼·Ç³£ºÃ£¬¾ßÓÐÒ»¸öÒÔ0.3¦ÌmΪÖÐÐÄ¡¢Ïà¶ÔÏÁÕ¡¢½Ó½ü¶Ô³Æ·Ö²¼µÄ·å¡£È»¶ø£¬ÐéÊýÕÛÉäÂʵĸıäÒýÆðƽ¾ùÁ£¾¶Æ¯ÒÆ10%¡£
±È½Ï¶øÑÔ£¬slurry2µÄÁ£¾¶·Ö²¼Í¼ÊÇ¿íµÃ¶àµÄË«·å·Ö²¼¡£ÔÚÕâ¸öÀý×ÓÖУ¬¼ÙÉèÎüÊÕϵÊýµÄ¸Ä±äµ¼ÖÂÁ£¾¶·Ö²¼·åÐÍ·¢ÉúÏÔÖø¸Ä±ä¡£È»¶ø£¬ÕæÕýµÄÎÊÌâÔÚÓÚʵÑéµÃ³öµÄ½áÂÛ£ºÁ£¾¶´óÓÚ1¦ÌmµÄÁ£×ÓµÄÌå»ýÕ¼×ÜÁ£×ÓÌå»ýµÄ´ó²¿·Ö£¨>70%£©¡£ÕâÓëÇ°ÃæÌÖÂÛµÄSPOS·¨ËùµÃµ½µÄ½á¹û (Á£¾¶´óÓÚ1¦ÌmµÄÁ£×ÓÌå»ýÕ¼ËùÓÐÁ£×ӵIJ»µ½1%) Ïàì¶Ü£¬¶øSPOS¼ì²â½á¹ûÓÖ¾¹ýÖØÁ¿·ÖÎö·¨ÑéÖ¤ÊÇ׼ȷµÄ£¬Òò¶ø˵Ã÷ͼ2ÖеÄslurry2µÄ·Ö²¼ÊǼ«²»×¼È·µÄ¡£Í¬Ê±£¬Í¼2bÒ²¸ø³öÁËslurry1¾20s³¬ÉùºóÓɼ¤¹âÑÜÉä·¨¼ì²âËùµÃµ½µÄÁ£¾¶·Ö²¼Í¼¡£³¬ÉùºóÖ÷·å¼¯ÖÐÔÚ0.3¦Ìm£¬Õâͬslurry1ÏàÒ»Ö£¬È»¶ø»¹³öÏÖÁËÒ»¸öÒÔ35¦ÌmΪÖÐÐÄÕ¼×ÜÁ£×ÓÌå»ý50%µÄ´Î¼¶·å£¬Õâ¸ö½á¹ûÏÔÈ»ÓÖÊÇ´íÎóµÄ¡£ÓÉSPOSµÃµ½µÄÁ£¾¶·Ö²¼Í¼±íÃ÷£¬³¬ÉùÓÐÖúÓÚ¼õÉÙβ²¿´óÁ£×ÓµÄ×ÜÊý£¬¶ø²»ÊÇÏ󼤹âÑÜÉä·¨²â¶¨½á¹ûÏÔʾµÄÖÆÔì³ö´óÁ£×Ó¡£ÕâЩ½á¹û¶¼Ö¤Ã÷ÁËʹÓü¤¹âÑÜÉä·¨Ô¤²âslurryÖÊÁ¿´æÔÚ×ÅDZÔÚµÄΣÏÕ¡£
ͼ3ÏÔʾÁËÁ½·ÝÑõ»¯ÂÁCMP slurry¾SPOS¼ì²âËùµÃµ½µÄÁ£¾¶·Ö²¼Í¼£¨ÒÔÁ£×Ó°Ù·ÖÊý±íʾ£©¡£Ò»·ÝslurryÓÃÁòËáÏ¡ÊÍ£¬ÁíÒ»·ÝÓÃÏõËáÏ¡ÊÍ¡£Ã¿·ÝÏ¡ÊÍslurryµÄpHÖµ¶¼µ÷µ½3£¬µÃµ½Ò»ÑùµÄËá¶È¡£Ææ¹ÖµÄÊÇ£¬ÕâÁ½·ÝÑùÆ·µÄÁ£¾¶·Ö²¼Í¼²îÒìÏÔÖø¡£½«ÁòËáÏ¡Ê͵ÄslurryÓëÏõËáÏ¡Ê͵ÄslurryÏà±È½Ï£¬ÔÚ´óÓÚ0.5¦Ìm´¦ÓнϿíµÄβ²¿´óÁ£×Ó·Ö²¼¡£Ç°ÕßÑùÆ·ÖÐÓÐ70¦Ìm´óÁ£×Ó£¬¶øºóÕßÔòûÓÐÁ£¾¶´óÓÚ10¦ÌmµÄÁ£×Ó¡£ºÜÃ÷ÏÔ£¬ÁòËáµÄ¼ÓÈëÒýÆðÁËÑõ»¯ÂÁÁ£×ÓÑÏÖصľۼ¯ºÍÐõÄý¡£ÔÒòÊÇ£ºÁ£×Ӽ侲µç³âÁ¦ÓÐÖúÓÚ½ºÌå»ìÐüÒºµÄÎȶ¨£¬Àë×ÓÇ¿¶È¶ÔÁ£×Ӽ侲µç³âÁ¦ÓС°ÆÁ±Î×÷Óá±£»Ôں㶨pHÖµÌõ¼þÏ£¬¼ÓÈëÁòËá±È¼ÓÈëÏõËáʹÀë×ÓÇ¿¶ÈÔö¼ÓµÃ¸ü¶à£¬Òò¶øÆÆ»µÁ˾²µç³âÁ¦£¬´ó´óµØ´Ù½øÁËÐõÄý¡£
×îºó£¬Í¼4ÏÔʾSPOS¼ì²âÒ»·Ý¶þÑõ»¯¹èCMP slurryËùµÃµ½µÄÁ£¾¶·Ö²¼Í¼£¬²¢½«Á£×ÓÊýÁ¿×÷Ϊ´«µÝϵͳÖÐÑ»·Ê±¼äµÄº¯ÊýÀ´·ÖÎö¡£¿ÉÒÔ¿´³ö£¬ÔÚ×î³õ16Сʱѻ·¹ý³ÌÖУ¬Á£¾¶·Ö²¼Í¼ÖÐÁ£¾¶´óÓÚ2¦ÌmµÄÁ£×Ó¸öÊýûÓÐÏÔÖø±ä»¯£¬Î²²¿Á£×Ó×ÜÊý´óԼΪ10,000Á££¬ËùÕ¼Ìå»ýΪ0.002%¡£È»¶ø£¬Ñ»·24Сʱºó£¬slurry Ã÷ÏÔ±íÏÖ³öÎȶ¨ÐÔϽµµÄ¼£Ïó¡£Î²²¿Á£×Ó×ÜÊýÔö¼Óµ½100,000Á££¬ÆäËùÕ¼Ìå»ýÒ²Ôö¼Óµ½0.016%¡£ÕâЩ½á¹û¶¼ÊÇÊ®·ÖÖØÒªµÄ£¬ÒòΪËüÖ¤Ã÷Á˱ôøÀ´µÄѹÁ¦¶Ô¶þÑõ»¯¹èCMP slurryÓÐÈ¥Îȶ¨×÷Óᣱ¾ÌåÖ®Íâβ²¿´óÁ£×Ó/¾Û¼¯Á£×ÓµÄÌå»ý·ÖÊý×ܹ²²Å±ä»¯ÁË0.014%£¬ÕâôСµÄ±ä»¯£¬Ê¹ÓÃÈκγ£ÓõÄÕûÌåÐÔ¼ì²âÒÇÊÇÍêÈ«¼ì²â²»³öÀ´µÄ¡£
5 ½áÂÛ
ÒÔÉÏʵÀý¼°ÆäËûÐí¶àÏà¹ØÀý×Ó½Ô²ûÃ÷ÁËSPOS¼¼ÊõÓÅÒìµÄÐÔÄÜÓëÖØÒªµÄ×÷Óã¬ÄǾÍÊÇ£ºÖ»Ðè¹Ø×¢Á£¾¶·Ö²¼ÖÐβ²¿¼«ÉÙÊý´óÁ£×ӵķֲ¼£¬¼´¿É»ñµÃ±ÈÕûÌå¼ì²â¼¼Êõ£¨È缤¹âÑÜÉä·¨£©¶àµÃ¶àµÄÓйؽºÌå»ìÐüÒº£¨ÈçCMPslurry£©ÖÊÁ¿ºÍÎȶ¨ÐÔµÄÖØÒªÐÅÏ¢¡£
²Î¿¼ÎÄÏ×£º
[1] D.F. Nicoli, D.C. McKenzie and J.S. Wu, "Application of dynamic light scattering to particle size analysis of macromolecules", American Laboratory, Volume 23, No. 17, pp. 32-40 (Nov. 1991)
[2] D.F. Nicoli, J.S. Wu, Y.J. Chang, D.C. McKenzie and K. Hasapidis, "Automatic, high-resolution particle size analysis by single-particle optical sensing", American Laboratory, Volume 24, No. 11, pp. 39-44 (July 1992)
[3] D.F. Nicoli, K. Hasapidis and D.C. McKenzie, "High Resolution Particle Size Analysis by a Combination of DLS and SPOS", Lab Asia, Volume 3, Issue 5, pp. 38-40 (Oct/Nov 1996)
[4] D.F. Nicoli, J.S. Wu, Y.J. Chang, V. Ovod and K. Hasapidis, "Zeta Potential Analysis of Colloidal Systems by ELS, with Combined DLS Sizing Capability", International Labmate, Volume XXII, Issue I, pp. 20-22 (Feb/Mar 1997)
[5] D.F. Nicoli, J.S. Wu, Y.J. Chang, V. Ovod and K. Hasapidis, "Zeta potential and particle size analysis of colloids using ELS and DLS", American Laboratory (News Edition), Volume 29, No. 19, p. 12 (Sept. 1997)
[6] D. Nicoli, K. Hasapidis, P. O'Hagan, G. Pokrajac and B. Schade, "Particle size analysis of colloidal suspensions by SPOS compared to DLS: A sensitive indicator of quality and stability", American Laboratory, Volume 33, No. 1, pp. 32-39 (Jan. 2001)
1.jpg
2.jpg
3.jpg
4.jpg |
» ±¾Ìû¸½¼þ×ÊÔ´Áбí
-
»¶Ó¼à¶½ºÍ·´À¡£ºÐ¡Ä¾³æ½öÌṩ½»Á÷ƽ̨£¬²»¶Ô¸ÃÄÚÈݸºÔð¡£
±¾ÄÚÈÝÓÉÓû§×ÔÖ÷·¢²¼£¬Èç¹ûÆäÄÚÈÝÉæ¼°µ½ÖªÊ¶²úȨÎÊÌ⣬ÆäÔðÈÎÔÚÓÚÓû§±¾ÈË£¬Èç¶Ô°æȨÓÐÒìÒ飬ÇëÁªÏµÓÊÏ䣺libolin3@tal.com
- ¸½¼þ 1 : AN-CN-07_SPOS¼¼ÊõÔÚ°ëµ¼ÌåCMPÖƳÌÖеÄÓ¦ÓÃ.pdf
2015-12-29 13:43:25, 278.4 K
» ÊÕ¼±¾ÌûµÄÌÔÌùר¼ÍƼö
» ±¾ÌûÒÑ»ñµÃµÄºì»¨£¨×îÐÂ10¶ä£©
» ²ÂÄãϲ»¶
|