²é¿´: 5754  |  »Ø¸´: 163
¡¾½±Àø¡¿ ±¾Ìû±»ÆÀ¼Û145´Î£¬×÷Õßstar_zhangÔö¼Ó½ð±Ò 114.8 ¸ö

star_zhang

½û³æ (ÎÄѧ̩¶·)


[×ÊÔ´] ¡¾Ó¢ÃÀ¾­µäÊé¼®¡¿¡¶Handbook of Thin Film Deposition¡·(µÚ3°æ)¡¾ÒÑËÑË÷£¬ÎÞÖØ¸´¡¿

¡¾Ó¢ÃÀ¾­µäÊé¼®¡¿¡¶Handbook of Thin Film Deposition¡·(µÚ3°æ)¡¾ÒÑËÑË÷£¬ÎÞÖØ¸´¡¿

¡¾ÒÑËÑË÷£¬ÎÞÖØ¸´¡¿ÂÛ̳ÀÓиöͬÃûµÄÌû×Ó£¬Á¬½ÓÒѾ­Ê§Ð§ÁË£¬¶øÇÒÖ»ÊǵÚ2°æ¡£
ʧЧÌû×ÓµÄÁ´½ÓµØÖ·£ºhttp://muchong.com/bbs/viewthread.php?tid=3297120&fpage=1&target=blank
Ϊ´Ë£¬ÎÒÉÏ´«Õâ±¾Ê飬¹©ÅóÓÑÃÇѧϰºÍ²Î¿¼¡£


ÎÒÉÏ´«µÄÕâ±¾Ê飺
×÷ÕߣºKrishna Seshan
2012Ä꣬293 Ò³£¬PDF ¸ñʽ£¬19 MB¡£
Language: English
.
·âÃæ£º
¡£
¡¾Ó¢ÃÀ¾­µäÊé¼®¡¿¡¶Handbook of Thin Film Deposition¡·(µÚ3°æ)¡¾ÒÑËÑË÷£¬ÎÞÖØ¸´¡¿
¡£
¼ò½é£º

"The Handbook of Thin Film Deposition" is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. This is a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications. It covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries. The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics. It is written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM. It is foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned 'Moore's Law' relating to the technology development cycle in the semiconductor industry.
==============================
¾´Çë¸÷λÅóÓÑ£¬ÏÂÔØÖ®ºó£¬¸ø¸ö»ØÌûÆÀ¼Û¡£ÎÒÒ²ºÃ¼ÌÐøÍÆ³öÏÂÒ»¸ö×îпƼ¼Êé¼®¡£
(²»ÏÂÔØ£¬Ò²¿ÉÒÔÆÀ¼Û¡£)
лл£¡
»Ø¸´´ËÂ¥

» ±¾Ìû¸½¼þ×ÊÔ´Áбí

  • »¶Ó­¼à¶½ºÍ·´À¡£ºÐ¡Ä¾³æ½öÌṩ½»Á÷ƽ̨£¬²»¶Ô¸ÃÄÚÈݸºÔð¡£
    ±¾ÄÚÈÝÓÉÓû§×ÔÖ÷·¢²¼£¬Èç¹ûÆäÄÚÈÝÉæ¼°µ½ÖªÊ¶²úȨÎÊÌ⣬ÆäÔðÈÎÔÚÓÚÓû§±¾ÈË£¬Èç¶Ô°æÈ¨ÓÐÒìÒ飬ÇëÁªÏµÓÊÏ䣺xiaomuchong@tal.com
  • ¸½¼þ 1 : Handbook_of_Thin_Film_Deposition_3rd_edition_2012.pdf
  • 2014-12-22 04:59:24, 19.05 M

» ÊÕ¼±¾ÌûµÄÌÔÌûר¼­ÍƼö

Êé¼®ÏÂÔØÍøÕ¾ ¾­µä×ÊÔ´Ìû רҵÊé¼®£¨ÍâÎİ棩WM ÄÉÃ×¼¼ÊõÓëÄÜÔ´¼°Ä£Äâ
ºÃÊ飡ºÃ¶Á£¡ ÎïÀí»¯Ñ§²ÄÁÏÀàÊé¼® ÐÂÄÜÔ´ ÌÔÌùÌÔ±¦
ÄÉÃײÄÁÏ+¹âµç×Óѧ µç»¯Ñ§&ÓлúºÏ³É ×ÔÈ»¿ÆÑ§ ÔÓÊé
´ýÏÂÔØ ¹¤¾ßÊé ºÇºÇ ¶ÁÒ»¶Á

» ²ÂÄãϲ»¶

» ±¾Ö÷ÌâÏà¹Ø¼ÛÖµÌùÍÆ¼ö£¬¶ÔÄúͬÑùÓаïÖú:

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

jinhaozi

гæ (³õÈëÎÄ̳)


¡ï¡ï¡ï¡ï¡ï ÎåÐǼ¶,ÓÅÐãÍÆ¼ö

thanks

[ ·¢×ÔСľ³æ¿Í»§¶Ë ]
12Â¥2014-12-22 18:53:03
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¼òµ¥»Ø¸´
2014-12-22 08:13   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
jedi-j3Â¥
2014-12-22 09:01   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
peterflyer4Â¥
2014-12-22 09:50   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
xuyuxiang5Â¥
2014-12-22 10:44   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
lwg36Â¥
2014-12-22 11:45   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
VDFEPI7Â¥
2014-12-22 12:10   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
tainanlic8Â¥
2014-12-22 13:38   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
wtiger9Â¥
2014-12-22 14:13   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
2014-12-22 18:17   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
2014-12-22 18:24   »Ø¸´  
¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
2014-12-22 19:17   »Ø¸´  
¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
2014-12-22 20:06   »Ø¸´  
¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
zjys588715Â¥
2014-12-22 20:37   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
mengsky16Â¥
2014-12-22 22:13   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
gxw021817Â¥
2014-12-22 23:17   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
highlywood18Â¥
2014-12-23 00:39   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
huchao26906019Â¥
2014-12-23 08:44   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
2014-12-23 08:50   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
2014-12-23 09:07   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
2014-12-23 09:09   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
wm_zhang23Â¥
2014-12-23 11:11   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
muxinjin24Â¥
2014-12-23 14:03   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
li_dongxi25Â¥
2014-12-23 14:26   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
aesar996126Â¥
2014-12-23 14:41   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
zxf98427Â¥
2014-12-23 15:05   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
zhchzhsh207628Â¥
2014-12-23 15:06   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
78526406529Â¥
2014-12-23 16:13   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
wusin30Â¥
2014-12-23 19:36   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
dudubaobao31Â¥
2014-12-23 19:47   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
mike_mei080832Â¥
2014-12-23 20:03   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
aa-123aa33Â¥
2014-12-23 21:26   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
mse37734Â¥
2014-12-23 21:32   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
2014-12-23 21:43   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
yfang6136Â¥
2014-12-23 22:16   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
Chuntetu37Â¥
2014-12-24 07:15   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
spxjyemrl38Â¥
2014-12-24 14:33   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
huayuwuqi39Â¥
2014-12-24 15:09   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
yapiliu40Â¥
2014-12-24 16:14   »Ø¸´  
ÈýÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
IORI_ABC41Â¥
2014-12-24 17:48   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
sighthill42Â¥
2014-12-24 18:49   »Ø¸´  
ÎåÐÇºÃÆÀ  
wangpinger43Â¥
2014-12-24 20:33   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
whq1051344Â¥
2014-12-24 21:19   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
cfok45Â¥
2014-12-24 22:21   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
nilongdao22546Â¥
2014-12-24 23:12   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
jackiemwd47Â¥
2014-12-25 07:25   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
zjn189248Â¥
2014-12-25 08:15   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
cs12329249Â¥
2014-12-25 08:57   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
chenpine50Â¥
2014-12-25 10:40   »Ø¸´  
ÎåÐÇºÃÆÀ  ¶¥Ò»Ï£¬¸Ðл·ÖÏí£¡
Ïà¹Ø°æ¿éÌø×ª ÎÒÒª¶©ÔÄÂ¥Ö÷ star_zhang µÄÖ÷Ìâ¸üÐÂ
¡î ÎÞÐǼ¶ ¡ï Ò»ÐǼ¶ ¡ï¡ï¡ï ÈýÐǼ¶ ¡ï¡ï¡ï¡ï¡ï ÎåÐǼ¶
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[¿¼ÑÐ] 336»¯¹¤µ÷¼Á +4 Íõ´ó̹1 2026-03-23 5/250 2026-03-23 18:32 by allen-yin
[¿¼ÑÐ] Ò»Ö¾Ô¸211 ³õÊÔ270·Ö Çóµ÷¼Á +3 ¹ÈÓêÉϰ¶ 2026-03-23 4/200 2026-03-23 15:53 by ACS Nano¡ª¡ª
[¿¼ÑÐ] 0854 ¿¼Ñе÷¼Á ÕÐÉúÁË£¡AI ·½Ïò +3 pk3725069 2026-03-19 14/700 2026-03-23 14:44 by Jack_333
[¿¼ÑÐ] Çóµ÷¼Á²ÄÁÏѧ˶080500£¬×Ü·Ö289·Ö 5+3 @taotao 2026-03-19 21/1050 2026-03-23 10:17 by ¹Úc¸ç
[¿¼ÑÐ] Ò»Ö¾Ô¸¶«»ª´óѧ»¯Ñ§070300£¬Çóµ÷¼Á +7 2117205181 2026-03-21 8/400 2026-03-22 22:55 by chixmc
[¿¼ÑÐ] 280·ÖÇóµ÷¼Á Ò»Ö¾Ô¸085802 +4 PUMPT 2026-03-22 7/350 2026-03-22 22:13 by ÐÇ¿ÕÐÇÔÂ
[¿¼ÑÐ] 310Çóµ÷¼Á +4 baibai1314 2026-03-16 4/200 2026-03-22 20:19 by edmund7
[¿¼ÑÐ] 307Çóµ÷¼Á +11 ÀäóÏ123 2026-03-17 11/550 2026-03-22 20:16 by edmund7
[¿¼ÑÐ] 315·Ö£¬³ÏÇóµ÷¼Á£¬²ÄÁÏÓ뻯¹¤085600 +3 13756423260 2026-03-22 3/150 2026-03-22 20:11 by edmund7
[¿¼ÑÐ] 289²ÄÁÏÓ뻯¹¤£¨085600£©BÇøÇóµ÷¼Á +3 ÕâôÃû×ÖÕ¦Ñù 2026-03-22 4/200 2026-03-22 17:56 by ÔÆÃñ´óÀîÀÏʦ
[¿¼ÑÐ] ÉúÎïѧ071000 329·ÖÇóµ÷¼Á +5 ÎÒ°®ÉúÎïÉúÎﰮΠ2026-03-17 5/250 2026-03-22 16:42 by tcx007
[¿¼ÑÐ] Çóµ÷¼Á +5 Zhangbod 2026-03-21 7/350 2026-03-22 13:13 by Zhangbod
[¿¼ÑÐ] 286·ÖÈ˹¤ÖÇÄÜרҵÇëÇóµ÷¼ÁÔ¸Òâ¿ç¿¼£¡ +4 lemonzzn 2026-03-17 8/400 2026-03-21 22:49 by lemonzzn
[¿¼ÑÐ] ²ÄÁϹ¤³Ìר˶ 348·ÖÇóµ÷¼Á +3 ¶¬´Ç. 2026-03-17 5/250 2026-03-21 18:47 by ѧԱ8dgXkO
[¿¼ÑÐ] Ò»Ö¾Ô¸ÄÏ´ó£¬0703»¯Ñ§£¬·ÖÊý336£¬Çóµ÷¼Á +3 ÊÕµ½VS 2026-03-21 3/150 2026-03-21 18:42 by ѧԱ8dgXkO
[¿¼ÑÐ] 311Çóµ÷¼Á +3 Ó¸ҵÄСÎâ 2026-03-20 3/150 2026-03-21 17:40 by ColorlessPI
[¿¼ÑÐ] 336Çóµ÷¼Á +5 rmc8866 2026-03-21 5/250 2026-03-21 17:24 by ѧԱ8dgXkO
[¿¼ÑÐ] Ò»Ö¾Ô¸»ªÄÏʦ´ó 070300£¨»¯Ñ§£©304·ÖÇóµ÷¼Á +3 0703ÎäÜ·»ÛÑ©304 2026-03-18 3/150 2026-03-21 00:48 by JourneyLucky
[¿¼ÑÐ] 288Çóµ÷¼Á +16 ÓÚº£º£º£º£ 2026-03-19 16/800 2026-03-20 22:28 by JourneyLucky
[¿¼ÑÐ] ¿¼Ñе÷¼Á +3 ä¿ya_~ 2026-03-17 5/250 2026-03-17 09:25 by Winj1e
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û