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微尺度加工：微产品的设计与制造（英文版）
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Micro-Manufacturing: Design and Manufacturing of Micro-Products 简介如下： This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples. 目录如下： FOREWORD vii CONTRIBUTORS ix 1 FUNDAMENTALS OF MICRO-MANUFACTURING 1 2 MICRO-FABRICATION PROCESSES IN SEMICONDUCTOR INDUSTRY 25 3 MODELING AND ANALYSIS AT MICRO-SCALES 43 4 METROLOGY, INSPECTION, AND PROCESS CONTROL IN MICRO-SCALES 71 5 MICRO-LAYERED MANUFACTURING 97 6 MICRO-LASER PROCESSING 159 7 POLYMER MICRO-MOLDING/FORMING PROCESSES 197 8 MECHANICAL MICRO-MACHINING 235 9 MICRO-FORMING 275 10 MICRO-ELECTRO DISCHARGE MACHINING (μEDM) 301 11 METAL INJECTION MOLDING AT MICRO-SCALES (μMIM) 347 INDEX 371 |
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2014-11-27 09:01:13, 66.72 M
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2014-11-27 09:21
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