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[资源] Thin Film Analysis by X-Ray Scattering

Thin films have become an important branch of materials science and technology
over the last few decades. A thin film is considered in this book as having a thickness
between about 1 nm and some 10 μm. Their first application was probably in
the field of decorative coatings, but in the last century many other applications in
microelectronics, optics, data storage, sensorics, protection and other purposes
have had a large impact on the development of thin films and related deposition
techniques. Figure 1 displays a variety of thin-film applications from the areas
mentioned. Depending on the intended application, thin films are made of metals,
inorganic compounds, organic compounds or from biological molecules. The task
of the thin-film developer is easily described by stating that the deposition process
has to be optimized such that the arrangement of atoms enables the film to fulfill
the intended functionality.
Since structure and function are intimately related properties in any material,
the characterization of structural properties is a very relevant issue in thin-film development.
This book is concerned with the structural analysis of thin films by
x-ray scattering procedures. There exist various other characterization techniques
like electron microscopy, scanning tunneling methods, ion beam scattering, magnetic
resonance, optical spectroscopy and others by which important structure
properties may be elucidated. Here, however, the focus is on x-ray scattering. The
suitability of this technique for thin-film analysis is mainly motivated by two
reasons:
1. The wavelengths of x-rays are of the order of atomic distances in condensed matter,
which especially qualifies their use as structural probes.
2. X-ray scattering techniques are nondestructive and leave the investigated sample
or – more importantly – the produced device intact.
Electron microscopy might be considered of comparative importance for the
characterization of structure and morphology. This technique is a complementary
one to x-ray scattering, since it probes a rather confined volume of the sample,
whereas x-ray scattering yields information from a much larger volume. Therefore,
some micrographs from electron microscopy will appear in the text, but the reader
is referred to the special literature for an introduction to the subject.

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