| 查看: 1113 | 回复: 21 | ||
| 【奖励】 本帖被评价20次，作者gyliu增加金币 19.5 个 | ||
| 当前主题已经存档。 | ||
| 当前只显示满足指定条件的回帖，点击这里查看本话题的所有回帖 | ||
[资源]
《Handbook of Physical Vapor Deposition (PVD) Processing》
|
||
|
Donald M. Mattox “Handbook of Physical Vapor Deposition (PVD) Processing" Noyes Publications; 1 edition (March 1, 1998) | ISBN: 0815514220 | 949 pages | PDF | 6,3 Mb This book covers all aspects of Physical Vapor Deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to postdeposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called “war stories”, to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. http://depositfiles.com/en/files/4545551 http://w16.easy-share.com/1700052255.html http://rapidshare.com/files/1051 ... apor_Deposition.rar  [ Last edited by 江南豪情 on 2008-4-13 at 11:55 ] |
回复此楼» 猜你喜欢
材料工程281还有调剂机会吗
已经有8人回复
-
农学0904 312求调剂
已经有3人回复
-
290调剂生物0860
已经有12人回复
-
求调剂
已经有7人回复
-
11408。358求调剂
已经有3人回复
-
求助调剂，跨调
已经有8人回复
-
271求调剂
已经有8人回复
-
一志愿厦大0856，306求调剂
已经有10人回复
-
269求调剂
已经有11人回复
-
366求调剂
已经有7人回复
7楼2008-04-13 16:02:51
5楼2008-04-13 09:54:00
8楼2008-04-13 19:05:17
13楼2008-04-14 12:07:09
简单回复
ycwbycwb2楼
2008-04-13 07:39
回复
2008-04-13 09:43
回复
