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S.O.Hay,W.C.Roman,and M.B.Colket,J.Mater.Res.5,2387(1990). ±È½ÏÄÕ»ðµÄ¾ÍÊÇûÓÐÎÄÏ×µÄÃû×Ö ËÄܰïÏÂæ°¡ лл |
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ÎÄÏ׸øÄãÕÒµ½ÁË£¬Ó¦¸Ã²»»á´í°É CVD diamond deposition processes investigation: CARS diagnostics/modeling Journal of Materials Research -- Nov. 1990 -- vol.5, no.11, pp. 2387-2397 Hay, S.O.; Roman, W.C.; Colket, M.B., III United Technol. Res. Center, East Hartford, CT, USA The authors have applied Coherent Anti-Stokes Raman Spectroscopy (CARS), using a narrowband, scanned colinear configuration, to measure temperatures, relative concentrations, and detect species in low pressure CVD of polycrystalline diamond. CARS measurements were obtained for methane, hydrogen, and acetylene in either or both a RF plasma reactor and a hot filament reactor |
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