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[资源] Handbook of Compound Semiconductors

Handbook of Compound Semiconductors: Growth, Processing, Characterization, and Devices (Materials Science and Process Technology Series)

By Paul H. Holloway, Gary E. McGuire

Publisher: Noyes Publications
Number Of Pages: 914
Publication Date: 1996-01-01
ISBN-10 / ASIN: 0815513747
ISBN-13 / EAN: 9780815513742
Binding: Hardcover

This book reviews the recent advances and current technologies used to produce micro-electronic and optoelectronic devices from both III-V and II-VI compound semiconductors. The emphasis of the chapters is on the gallium arsenide and indium phosphide-based III-V materials, however, other III-V and some of the II-VI materials are also discussed. The chapters provide a complete overview of the technologies necessary to grow bulk single crystal substrates, grow hetero or homoepitaxially films, and process advanced devices such as HBT's, OW diode lasers, etc.

The epitaxial growth techniques of metal organic chemical vapor deposition and molecular beam epitaxy are reviewed. Processing technologies for electrical contacts, dielectric isolation, and interface passivation are described. Processing procedures for ion implantation, wet and dry etching, rapid thermal processing and epitaxial lift-off are described. Techniques to characterize the materials and devices by electrons, ions, and photons are described, and a summary is given of microelectronic and optoelectronic devices, along with their packaging.