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[×ÊÔ´] ¡ï¡ï¡ï¡ï¡ï¡ï¡ï20141ÉñÒ»ÑùµÄÊé¼®£¡£¡£¡Copper Wire Bonding

ÊéÃûPreeti S. Chauhan
Anupam Choubey
ZhaoWei Zhong
Michael G. Pecht
³ö°æÉçspringer
ISBN 978-1-4614-5760-2
1 Copper Wire Bonding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 Wire Bonding Technologies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.2 Ball Bonding vs. Wedge Bonding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.3 From Gold to Cu Wire Bonding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.4 Market Adoption . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.5 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2 Bonding Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1 Bond Wire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.2 Oxidation Prevention Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.3 Free Air Ball Formation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.4 First (Ball) and Second (Wedge) Bond . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.5 Wire Bond Process Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.5.1 Ultrasonic Energy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.5.2 Electric Flame-Off Current and Firing Time . . . . . . . . . . . . . 21
2.5.3 Bond Force . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
2.5.4 Bonding Temperature and Time . . . . . . . . . . . . . . . . . . . . . . . . 26
2.6 Bonding Process Optimization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
2.7 Bonding Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
2.8 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
3 Bonding Metallurgies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
3.1 Bare Copper (Cu) and Palladium-Coated Cu Wire . . . . . . . . . . . . . . . 39
3.2 Bare Cu Wire on Al Pads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
3.3 Bare Cu Wire on Au- and Ni-Based Die Bond Pads . . . . . . . . . . . . . 44
3.4 Cu¨CCu Bond . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.5 Bond¨CPad Interfacial Metallurgies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
3.5.1 Au¨CAl and Cu¨CAl Intermetallics . . . . . . . . . . . . . . . . . . . . . . . . 46
3.5.2 Cu¨CAu and Cu¨CAl Intermetallics . . . . . . . . . . . . . . . . . . . . . . . 54
3.5.3 Au¨CAuNi, Au¨CAuPdNi, Cu¨CAuNi, and Cu¨CAlPdNi . . . . . . . 55
3.6 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
4 Wire Bond Evaluation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
4.1 Criteria for Good Bond Formation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
4.2 Pre-bonding Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
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