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Origin of thin film stress
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In general, residual stress refers to the internal stress distribution present in a material system when all external boundaries of the system are free of applied traction. Virtually any thin film bonded to a substrate or any individual lamina within a multilayer material supports some state of residual stress over a size scale on the order of its thickness. The presence of residual stress implies that, if the fillm would be relieved of the constraint of the substrate or an individual lamina would be relieved of the constraint of its neighboring layers, it would change its in-plane dimensions and/or would become curved. If the internal distribution of mismatch strain is incompatible with a stress-free state, then some residual stress distribution will remain even under these conditions. [ Last edited by wolfliu on 2008-1-2 at 10:21 ] |
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