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硅半导体计量学(Handbook of Silicon Semiconductor Metrology )电子书
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Handbook of Silicon Semiconductor Metrology By: Alain C. Diebold(Editor) ISBN-10: 0824705068 ISBN-13: 9780824705060 Publisher: CRC - 2001-06-29 Hardcover | 896 Pages Editorial Review: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies. Table of Contents: Preface Acknowledgments Contributors 1 Silicon Semiconductor Metrology 1 2 Gate Dielectric Metrology 17 3 Metrology for Ion Implantation 49 4 MOS Device Characterization 59 5 Carrier Illumination Characterization of Ultra-Shallow Implants 97 6 Modeling of Statistical Manufacturing Sensitivity and of Process Control and Metrology Requirements for a 0.18-[mu]m NMOSFET 117 7 Overview of Metrology for On-Chip Interconnect 143 8 Metrology for On-Chip Interconnect Dielectrics 149 9 Thin-Film Metrology Using Impulsive Stimulated Thermal Scattering (ISTS) 167 10 Metal Interconnect Process Control Using Picosecond Ultrasonics 197 11 Sheet Resistance Measurements of Interconnect Films 215 12 Characterization of Low-Dielectric Constant Materials 245 13 High-Resolution Profilometry for CMP and Etch Metrology 279 14 Critical-Dimension Metrology and the Scanning Electron Microscope 295 15 Scanned Probe Microscope Dimensional Metrology 335 16 Electrical CD Metrology and Related Reference Materials 377 17 Metrology of Image Placement 411 18 Scatterometry for Semiconductor Metrology 477 19 Unpatterned Wafer Defect Detection 515 20 Particle and Defect Characterization 547 21 Calibration of Particle Detection Systems 583 22 In Situ Metrology 601 23 Metrology Data Management and Information Systems 679 24 Statistical Metrology, with Applications to Interconnect and Yield Modeling 705 25 Physics of Optical Metrology of Silicon-Based Semiconductor Devices 723 26 Ultraviolet, Vacuum Ultraviolet, and Extreme Ultraviolet Spectroscopic Reflectometry and Ellipsometry 761 27 Analysis of Thin-Layer Structures by X-Ray Reflectometry 789 28 Ion Beam Methods 811 29 Electron Microscopy-Based Measurement of Feature Thickness and Calibration of Reference Materials 851 30 Status of Lithography Metrology as of the End of 2000 865 Index 869 下载地址： http://mihd.net/denhsq http://rapidshare.com/files/49245481/0824705068.rar |
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