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The development of science and technology has an increasingly higher demand on material, and the creation of a new material will have a great influence on the society. The research of thin-film material depends on its preparation technology, and thin-films with high quality are conducive to the physical thin-film research and the development of its application devices, which requires a basic investigation on the preparation of the thin-film materials and their characterization methods. This paper first elaborates the definition of thin-film materials, its classification, as well as the common chemical and physical preparation methods and principles, and then summarizes the advantages and disadvantages of the various methods, which is followed by the introduction of the instrument and method for the analysis of the film surface composition, structure, morphology, thickness, so as to provide references for the development of thin-film materials, synthesis, research and their application in the new materials and the new energy.
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