| ²é¿´: 1271 | »Ø¸´: 8 | ||
| µ±Ç°Ö»ÏÔʾÂú×ãÖ¸¶¨Ìõ¼þµÄ»ØÌû£¬µã»÷ÕâÀï²é¿´±¾»°ÌâµÄËùÓлØÌû | ||
ruanvirusͳæ (³õÈëÎÄ̳)
|
[ÇóÖú]
Ç󼏯ªÂÛÎÄ×÷ÕßµÄÓÊÏä
|
|
|
ÎÒÏëÒÔһϼ¸ÆªÎÄÕµÄ×÷Õß×÷ΪÉó¸åÍÆ¼öÈË£¬µ«ÊÇÕÒ²»µ½ËûÃǵÄÓÊÏ䵨ַ£¬Ð»Ð»À²£¡ Investigation of gray-scale technology for large area 3D silicon MEMS structures Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching |
» ²ÂÄãϲ»¶
315·ÖÇóµ÷¼Á
ÒѾÓÐ3È˻ظ´
²ÄÁÏÓ뻯¹¤304ÇóBÇøµ÷¼Á
ÒѾÓÐ3È˻ظ´
Ò»Ö¾Ô¸Ìì½ò´óѧ339²ÄÁÏÓ뻯¹¤Çóµ÷¼Á
ÒѾÓÐ3È˻ظ´
297Çóµ÷¼Á
ÒѾÓÐ3È˻ظ´
Ò»Ö¾Ô¸±±¾©»¯¹¤´óѧ²ÄÁÏÓ뻯¹¤£¨085600£©296Çóµ÷¼Á
ÒѾÓÐ3È˻ظ´
´ò¹ýºÜ¶à¾ºÈü£¬085406¿ØÖƹ¤³Ì300·Ö£¬Çóµ÷¼Á
ÒѾÓÐ3È˻ظ´
±±¾©ÁÖÒµ´óѧ˶µ¼ÕÐÉú¹ã¸æ
ÒѾÓÐ5È˻ظ´
Ò»Ö¾Ô¸±±¾©»¯¹¤´óѧ²ÄÁÏÓ뻯¹¤ 264·Ö¸÷¿Æ¹ýAÇø¹ú¼ÒÏß
ÒѾÓÐ4È˻ظ´
Ò»Ö¾Ô¸ Î÷±±´óѧ ×Ü·Ö282 Ó¢ÓïÒ»62 Çóµ÷¼Á
ÒѾÓÐ4È˻ظ´
274Çóµ÷¼Á
ÒѾÓÐ15È˻ظ´
» ±¾Ö÷ÌâÏà¹Ø¼ÛÖµÌùÍÆ¼ö£¬¶ÔÄúͬÑùÓаïÖú:
Ͷ¸åʱµÄÓÊÏäÎÊÌâ
ÒѾÓÐ5È˻ظ´
ÇëÎÊReview of Scientific InstrumentsͶ¸åºó ͨÐÅ×÷Õß µÄÓÊÏäÔõô±ä¸ü£¿
ÒѾÓÐ9È˻ظ´
УÑù¸ü»»Í¨Ñ¶×÷ÕßÓÊÏäºóÔÀ´µÄÓÊÏ仹ÄÜÓÃÂð£¿
ÒѾÓÐ10È˻ظ´
ÇëÎÊElsevier×î¶à¿ÉÒÔÌ¸öÁªÏµÓÊÏ䣿
ÒѾÓÐ7È˻ظ´
¼±ÇóÑÇÖÞ»¯Ñ§ÔÓÖ¾µÄÓÊÏä
ÒѾÓÐ5È˻ظ´
¹ÜÀíÏÖ´ú»¯Í¶¸åÓÊÏäÇóÖú
ÒѾÓÐ9È˻ظ´
Çó¡¶»úеÉè¼Æ¡·Í¶¸åÒªÇó¼°Í¶¸åÓÊÏä
ÒѾÓÐ11È˻ظ´
Ͷ¸å×÷ÕßÓÊÏäÎÊÌâ
ÒѾÓÐ9È˻ظ´
Ͷ¸å¼¸Ìì¾Í³öÏÖSent Back to Author£¬Í¨ÐÅ×÷ÕßÐÅÏäÎÞÐżþ¡£¸ÃÈçºÎ¸ø±à¼Ð´ÐÅѯÎÊ
ÒѾÓÐ5È˻ظ´
ÂÛÎÄͶ¸åÓÊÏäµÄÎÊÌâ
ÒѾÓÐ7È˻ظ´
Çó£ºICC2011(IEEE International Conference on Communications)»áÒéÂÛÎļ¯
ÒѾÓÐ5È˻ظ´
ÂÛÎÄÓÊÏäͶ¸åûÓлظ´
ÒѾÓÐ9È˻ظ´
ÓÊÏäͶ¸åÔõô¶Ô±à¼Ëµ»°
ÒѾÓÐ3È˻ظ´
¿²¿ÀµÄͶ¸å·£¬±»¸÷ÖÖÀíÓɾÜÁË4´ÎµÄ1ƪÂÛÎÄ¡¡ ½ñÌìÔçÉÏ´ò¿ªÓÊÏäÒ»¿´ÓÖ±¾ßÁË
ÒѾÓÐ16È˻ظ´
¡¾ÇóÖú¡¿Ò©Ê¹ÜÀíµÄ˶ʿ±ÏÒµÂÛÎÄÔõôд£¿»¹Óе÷Ñб¨¸æ£¿
ÒѾÓÐ9È˻ظ´
Ͷ¡¶¹âµç×Ó.¼¤¹â¡·ÔÓ־ӦעÒâʲôÎÊÌ⣿
ÒѾÓÐ11È˻ظ´
´ó¼Ò¶ÔͶÎÄÕÂÓÊÏäÓÐʲô¿´·¨Ñ½
ÒѾÓÐ59È˻ظ´
ºþÄÏ´óѧ»úе¹¤³Ì²©Ê¿±ÏÒµÒªÇ󼏯ªÎÄÕ£¿
ÒѾÓÐ9È˻ظ´
ÂÛÎÄͶ´íÁËÓÊÏä
ÒѾÓÐ26È˻ظ´
xiaomumu_
Òø³æ (³õÈëÎÄ̳)
- Ó¦Öú: 0 (Ó×¶ùÔ°)
- ½ð±Ò: 679.3
- Ìû×Ó: 21
- ÔÚÏß: 4.2Сʱ
- ³æºÅ: 2445303
- ×¢²á: 2013-05-02
- ÐÔ±ð: GG
- רҵ: ΢/ÄÉ»úеϵͳ

6Â¥2013-05-02 19:25:59
jhhou
ľ³æ (ÖøÃûдÊÖ)
- Ó¦Öú: 37 (СѧÉú)
- ½ð±Ò: 3447.7
- É¢½ð: 1341
- ºì»¨: 25
- Ìû×Ó: 1709
- ÔÚÏß: 197.7Сʱ
- ³æºÅ: 1836816
- ×¢²á: 2012-05-27
- ÐÔ±ð: GG
- רҵ: ¹Ú×´¶¯ÂöÐÔÐÄÔಡ
2Â¥2013-05-02 19:11:52
goslar
ľ³æ (Ö°Òµ×÷¼Ò)
ÎÒ²»ÔÙÓ¦Öú!
- Ó¦Öú: 118 (¸ßÖÐÉú)
- ½ð±Ò: 3592.7
- ºì»¨: 6
- Ìû×Ó: 3115
- ÔÚÏß: 174.5Сʱ
- ³æºÅ: 1547023
- ×¢²á: 2011-12-22
- ÐÔ±ð: MM
- רҵ: ÃâÒßÉúÎïѧ
¡¾´ð°¸¡¿Ó¦Öú»ØÌû
¡ï ¡ï ¡ï
¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
ruanvirus: ½ð±Ò+3, ¡ïÓаïÖú, ллÀ²£¬ÎÒÒ²Ö»ÕÒµ½ÁËÕâ¸ö¡£ 2013-05-02 19:49:59
¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
ruanvirus: ½ð±Ò+3, ¡ïÓаïÖú, ллÀ²£¬ÎÒÒ²Ö»ÕÒµ½ÁËÕâ¸ö¡£ 2013-05-02 19:49:59
|
Investigation of gray-scale technology for large area 3D silicon MEMS structures ghodssi@umd.edu |

3Â¥2013-05-02 19:20:01
goslar
ľ³æ (Ö°Òµ×÷¼Ò)
ÎÒ²»ÔÙÓ¦Öú!
- Ó¦Öú: 118 (¸ßÖÐÉú)
- ½ð±Ò: 3592.7
- ºì»¨: 6
- Ìû×Ó: 3115
- ÔÚÏß: 174.5Сʱ
- ³æºÅ: 1547023
- ×¢²á: 2011-12-22
- ÐÔ±ð: MM
- רҵ: ÃâÒßÉúÎïѧ
¡¾´ð°¸¡¿Ó¦Öú»ØÌû
¡ï ¡ï ¡ï ¡ï ¡ï ¡ï
ruanvirus: ½ð±Ò+6, ¡ï¡ï¡ïºÜÓаïÖú, лл°¡£¬Õâ¸öÎÒÕÒ²»µ½¡£ 2013-05-02 19:50:23
ruanvirus: ½ð±Ò+6, ¡ï¡ï¡ïºÜÓаïÖú, лл°¡£¬Õâ¸öÎÒÕÒ²»µ½¡£ 2013-05-02 19:50:23
|
cwaits@arl.army.mil C.M. Waits |

4Â¥2013-05-02 19:22:53













»Ø¸´´ËÂ¥
