| 查看: 366 | 回复: 3 | ||
| 【奖励】 本帖被评价2次，作者songjieguang增加金币 2 个 | ||
| 当前主题已经存档。 | ||
| 当前只显示满足指定条件的回帖，点击这里查看本话题的所有回帖 | ||
[资源]
经典书籍：Fundamentals of Semiconductor Manufacturing and Process Control
|
||
|
Fundamentals of Semiconductor Manufacturing and Process Control ISBN: 0471784060 Author: Gary S. May Costas J. Spanos Publisher: Wiley-IEEE Press WorldPublication Date: 2006-05-22 Number Of Pages: 463www A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields. The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and management of overall manufacturing systems * Instructor support includes electronic copies of the figures and an instructor's manual WorldGraduate-level students and industrial practitioners will benefit from the detailed exami?nation of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment. 链接地址： http://rapidshare.de/files/35771676/FSMPC.rar |
回复此楼» 猜你喜欢
317一志愿华南理工电气工程求调剂
已经有10人回复
-
材料学调剂
已经有6人回复
-
材料化工调剂
已经有5人回复
-
291分工科求调剂
已经有8人回复
-
0856化工专硕求调剂
已经有5人回复
-
材料284求调剂，一志愿郑州大学英一数二
已经有4人回复
-
博士自荐
已经有4人回复
-
2025届双非化工硕士毕业，申博
已经有4人回复
-
0856求调剂285
已经有6人回复
-
博士自荐
已经有10人回复
4楼2011-08-27 21:44:43
30