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Originally posted by ru0629 at 2007-8-23 15:20:
1.you should check Cu/surfuric ratio . For your case you had better try copper  sulfate 200g/L surfuric acid 100 g/L.
2.YOU had try plasma dry etching to clean residue of photoresist .
3.You had  ...

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Originally posted by Îâ¸Õ3 at 2007-9-4 03:54:
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cooboo

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Originally posted by shangjunqiang at 2007-9-8 07:53:
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