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Single-walled carbon nanotubes (SWNTs) have many potential applications in areas such as electronics, energy storage, stiff composites, and sensors due to their unique properties.13 This has led to considerable efforts to improve the carbon nanotube growth process using the catalytic chemical vapor deposition (CVD) method, whether for nanotubes grown as vertically aligned forests on surfaces47 or grown in bulk reactors. For nanotube forests, there has been extensive work to maximize the growth rates and the catalyst lifetimes. In electronics, carbon nanotubes (CNTs) have great potential to replace copper as interconnects in integrated circuits because they are the only material capable of carrying high current densities over 108 A/cm2.This application is more important to the semiconductor roadmap than, for example, the use of SWNTs as semiconductors in field-effect transistors. However, CNTs will not be used as interconnects unless the interconnect resistance is as low as that of the copper that it replaces. Each wall of a CNT is a one-dimensional conductor, and this will introduce a series resistances from their quantum of conductance. To reduce this resistance, we must parallel many CNTs, and this requires CNTs to be grown in densities of at least 2 1013 cm2.20 Çë´óÉñ½â´ðÒ»ÏÂÉÏÃæ±êºìµÄµØ·½¡£Èç¹û¶¼ÄÜ·Òë¾Í¸üºÃÁË£¡ |
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