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[资源] Micro and Nanomanufacturing

Mark J. Jackson, «Micro and Nanomanufacturing»
Springer | ISBN: 0387258744 | 1 edition (November 27, 2006) | 702 pages | PDF | 43.2 Mb

Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems.

Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.

Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about:



Manufacturing and fabrication techniques at the micro and nanoscales

Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors

Producing master molds with micromachining

The deposition of thin films, pulsed water drop machining, and nanomachining


link:
http://rapidshare.com/files/3865 ... -PDF-0387258744.zip

[ Last edited by memser on 2009-1-14 at 08:56 ]
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★★★★★ 五星级,优秀推荐

不错的电子书,
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