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MRS Bulletin_Microelectromechanical Systems (MEMS) Technology and Applications
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 Microelectromechanical Systems (MEMS): Technology and Applications Volume 26, No. 4 Guest Editors: D. Bishop, A. Heuer, and D. Williams. We invite you to view the introductory article for this issue, "Microelectromechanical Systems (MEMS) Technologies and Applications" by David Bishop, Arthur Heuer, and David Williams, Guest Editors. On the Cover | Masthead All visitors have access to the article abstracts. MRS Members (login for access) and those with institutional access may view the complete article by selecting the "View Paper" button beneath each article. (NOTE: "View Paper" will only appear for logged-in users with the appropriate access.) Non-Members can purchase individual articles by selecting the "Purchase Paper" button beneath each article. Theme Article - Surface Micromachining: A Brief Introduction Mehran Mehregany and Christian A. Zorman Theme Article - Integrated MEMS Technology Andrea E. Franke, Tsu-Jae King, and Roger T. Howe Theme Article - Designing for MEMS Reliability Susanne Arney Theme Article - On-Chip Testing of Mechanical Properties of MEMS Devices H. Kahn, A.H. Heuer, and R. Ballarini Theme Article - Tribology of MEMS M.P. de Boer and T.M.Mayer Theme Article - Measuring Motions of MEMS Dennis M. Freeman Theme Article - High-Aspect-Ratio Structures for MEMS Stella W.Pang Theme Article - Diamond and Amorphous Carbon MEMS J.P. Sullivan, T.A. Friedmann, and K. Hjort Theme Article - Microsystems Technology (MST) and MEMS Applications: An Overview Job Elders, Vincent Spiering, and Steve Walsh Theme Article - Defense Applications of MEMS William C.Tang and Abraham P. Lee Theme Article - A "Silicon Eye" Using MEMS Micromirrors Natalie Clark Them Article The DMDTM Projection Display Chip: A MEMS-Based Technology Larry J. Hornbeck Theme Article - MEMS for Light-Wave Networks C. Randy Giles, David Bishop, and Vladimir Aksyuk Theme Article - Micromachining for rf Communications Darrin J. Young Theme Article - Microsystems for Chemical and Biological Applications Duane Lindner Theme Article - LIGA Technologies and Applications Jill Hruby 还缺少两三篇请各位高手一起努力收集！！！！ http://www.sharebig.com/share.php?id=s14jutwuoxwaNJPNK |
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