²é¿´: 2776  |  »Ø¸´: 56

cgetlc

ľ³æ (ÕýʽдÊÖ)


[½»Á÷] »ªÖпƼ¼´óѧÎïÀíѧԺMEMSÍŶÓÕÐÆ¸

¾ßÌ幤×÷µØµã:
Î人
н½ð:
Äêн12ÍòÆð
ѧÀúºÍÑо¿·½Ïò:
MEMS´«¸ÐÆ÷
ÕÐÆ¸¸Úλ:
²©ºó¡¢½²Ê¦¼°ÒÔÉϸÚλ
¹«Ë¾Ãû³Æ:
»ªÖпƼ¼´óѧÎïÀíѧԺMEMSÍŶÓ
ÁªÏµ·½Ê½:
tlc@mail.hust.edu.cn

»ªÖпƼ¼´óѧÎïÀíѧԺMEMSÍŶÓÄâÆ¸Ñо¿ÈËÔ±2µ½3Ãû£¨¿ÉÒÔÊDz©ºó»òÕß½Ìʦ¸Ú룩£¬´ÓÊÂMEMS´«¸ÐÆ÷¼°ÆäÓ¦ÓÃϵͳÑз¢¡£
    ÒªÇó¾ßÓÐMEMSרҵ±³¾°µÄ²©Ê¿±ÏÒµÉú»ò³öÕ¾²©Ê¿ºó£¬ÎïÀí»ù´¡ºÃ£¬ÓÐÔÚMEMS¹¤ÒÕÏßÉϵÄʵ¼Ê¾­Ñ飬¶Ô¹¤ÒÕÓй㷺ÉîÈëµÄ֪ʶ£¬Óй¤×÷¼¤Ç飬ÇÚ·Ṳ̈ʵ£¬ÓÐÍŶӾ«Éñ£¬¹µÍ¨ÄÜÁ¦Ç¿¡£
   Æ½Ì¨Ìõ¼þ£ºÊµÑéÊÒ¾ßÓÐ×Ô¼ºµÄCleanroom£¬ÒÑÓÐÉ豸°üÀ¨°üÀ¨Å£½òÒÇÆ÷µÄPlasmaPro NGP100 Estrelas ·´Ó¦Àë×ÓÉî¿Ìʴϵͳ£¨ÑÇÖÞÊ×̨£©¡¢Ð¾Ë¶°ëµ¼ÌåµÄAdvantools ATD1000¼¤¹âֱдʽ¹â¿Ì»ú¡¢¿¨¶û²Ì˾µÄSigmaÈÈ·¢ÉäɨÃèµç×ÓÏÔ΢¾µµÈ¡¢OLYMPUSµÄBX51M½ðÏàÏÔ΢¾µ¡¢KLA Tencor¹«Ë¾µÄD-100 ÐĮ́½×ÒÇ¡¢´Å¿Ø½¦Éä/ÈÈÕô·¢¸´ºÏ¶ÆÄ¤ÏµÍ³ÒÔ¼°°üÀ¨Êý¿ØÍ¿½ºÒÇ¡¢µÈÀë×ÓÈ¥½º»ú¡¢Êý¿Ø/ÏÔÈĘ̀ÈȰ塢ºæ¿¾ÏäµÈÒ»ÅúСÐÍÉ豸£¬Æ½Ì¨ÀÛ¼ÆÍ¶È볬¹ý1500ÍòÔª¡£ÂÛÖ¤ÖеÄÉ豸°üÀ¨£ºPECVD¡¢·â×°»úµÈ¡£
   Ìرð˵Ã÷£ºÎÒÃǵÄÍŶÓÊÇÁ¥ÊôÎïÀíѧԺ£¬¸Úλ¿ÉÑ¡Ôñ²©ºó£¨²»ÓÃÉϿΣ¬´ýÓö²ÎÕÕ¸±½ÌÊÚ£©»òÕßÈËÊ´úÀíµÄ¹Ì¶¨¸Úλ£¨Ñ§Ð£Í³Ò»µÄÕþ²ß£©£¬ËùƸ¸ÚλÈËÔ±Äêн12ÍòÆð£¬²»Í¬¸ÚλÉÏÏÞ²îÒì½Ï´ó¡£

ÁªÏµ·½Ê½£º
ÓÐÒâÕßÇ뽫ÖÐÓ¢ÎļòÀú£¨¸½ÕÕÆ¬£©µç×Ó°æ·¢¸ø Í¿ÀÏʦ
µç×ÓÓʼþ£ºtlc@mail.hust.edu.cn
°ì¹«µç»°£º+86 27 8755 8394
´«    Õæ£º+86 27 8754 239

[ Last edited by cgetlc on 2012-7-25 at 10:03 ]

» ²ÂÄãϲ»¶

» ÇÀ½ð±ÒÀ²£¡»ØÌû¾Í¿ÉÒԵõ½:

²é¿´È«²¿É¢½ðÌù

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
»ØÌûÖö¥ ( ¹²ÓÐ4¸ö )

discover_wj

ľ³æ (ÕýʽдÊÖ)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
ûÓÐMEMS±³¾°£¬ÊÇÎïÀíµç×Óѧ²©Ê¿£¬×ö¹ýһЩMEMS¹¤ÒÕ£¬Äܲ»ÄÜӦƸ½²Ê¦°¡£¿
4Â¥2012-07-25 10:28:31
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

·²Áú

½ð³æ (ÖøÃûдÊÖ)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
Å£±ÇµÄÈËÉú²»ÐèÒª½âÊÍ
36Â¥2012-07-25 12:31:05
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

heyang835

½û³æ (ÕýʽдÊÖ)

¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
±¾ÌûÄÚÈݱ»ÆÁ±Î

51Â¥2012-07-25 13:13:23
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

cgetlc

ľ³æ (ÕýʽдÊÖ)


cgetlc: »ØÌûÖö¥ 2012-07-26 17:46:40
ÒýÓûØÌû:
4Â¥: Originally posted by discover_wj at 2012-07-25 10:28:31
ûÓÐMEMS±³¾°£¬ÊÇÎïÀíµç×Óѧ²©Ê¿£¬×ö¹ýһЩMEMS¹¤ÒÕ£¬Äܲ»ÄÜӦƸ½²Ê¦°¡£¿

·¢¸ö¼òÀú¿´¿´°É£¬ºÇºÇ
54Â¥2012-07-26 17:46:14
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

John126

ľ³æ (Ö°Òµ×÷¼Ò)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
ºÃ»ú»á£¡¶¥£¡
15Â¥2012-07-25 10:53:09
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

ke30ke

ľ³æÖ®Íõ (ÎÄ̳¾«Ó¢)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
ding
40Â¥2012-07-25 12:44:31
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

ħÍõ@Î÷Óò

Í­³æ (ÖªÃû×÷¼Ò)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
   HUST
49Â¥2012-07-25 13:07:21
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¼òµ¥»Ø¸´
whbo2Â¥
2012-07-25 10:06   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
bestlike3Â¥
2012-07-25 10:21   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
flyxu5Â¥
2012-07-25 10:29   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 10:31   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 10:32   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
wuge4158Â¥
2012-07-25 10:35   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
longway1029Â¥
2012-07-25 10:36   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
bestlike10Â¥
2012-07-25 10:38   »Ø¸´  
198611Â¥
2012-07-25 10:41   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
wlxwlx102612Â¥
2012-07-25 10:42   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
zhaoyan197813Â¥
2012-07-25 10:46   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
qingheyouyou14Â¥
2012-07-25 10:50   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
bai12316Â¥
2012-07-25 11:00   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
jjlxyf17Â¥
2012-07-25 11:00   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
bush28618Â¥
2012-07-25 11:06   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
yexuqing19Â¥
2012-07-25 11:08   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
icebergwu20Â¥
2012-07-25 11:21   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
jiangxl.061821Â¥
2012-07-25 11:30   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
wenbin990322Â¥
2012-07-25 11:36   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 11:39   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
leipei.12324Â¥
2012-07-25 11:43   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
lxz30725Â¥
2012-07-25 11:45   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 11:51   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
nwxjh27Â¥
2012-07-25 11:51   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
huigoo28Â¥
2012-07-25 11:53   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
clszdy29Â¥
2012-07-25 11:54   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 11:54   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
JOEF31Â¥
2012-07-25 11:55   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
frw1_79_7932Â¥
2012-07-25 12:13   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
spc0833Â¥
2012-07-25 12:28   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 12:28   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
mlanqiang35Â¥
2012-07-25 12:29   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
xgj2008best37Â¥
2012-07-25 12:32   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
ansonal38Â¥
2012-07-25 12:39   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
zhaowei356339Â¥
2012-07-25 12:44   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
ÒýÓûØÌû:
4Â¥: Originally posted by discover_wj at 2012-07-25 10:28:31 ûÓÐMEMS±³¾°£¬ÊÇÎïÀíµç×Óѧ²©Ê¿£¬×ö¹ýһЩMEMS¹¤ÒÕ£¬Äܲ»ÄÜӦƸ½²Ê¦°¡£¿

lsyzlp41Â¥
2012-07-25 12:51   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 12:52   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
sqs8617sqs43Â¥
2012-07-25 12:52   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
song_ge44Â¥
2012-07-25 12:53   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
zhengkning45Â¥
2012-07-25 12:54   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 12:58   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
ll999947Â¥
2012-07-25 13:04   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 13:06   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
jxgznd_zyj50Â¥
2012-07-25 13:12   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
Ïà¹Ø°æ¿éÌø×ª ÎÒÒª¶©ÔÄÂ¥Ö÷ cgetlc µÄÖ÷Ìâ¸üÐÂ
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[¿¼ÑÐ] Ò»Ö¾Ô¸±±¾©»¯¹¤´óѧ²ÄÁÏÓ뻯¹¤£¨085600£©296Çóµ÷¼Á +6 µ¾ÆÞС±à 2026-03-26 6/300 2026-03-26 15:12 by 852137818
[¿¼ÑÐ] 292Çóµ÷¼Á +8 ¶ì¶ì¶ì¶î¶î¶î¶î¶ 2026-03-25 9/450 2026-03-26 12:21 by ÕÅ¿­Ê®°ËºÅ
[¿¼ÑÐ] 332Çóµ÷¼Á +6 032500 2026-03-25 6/300 2026-03-25 22:45 by 418490947
[¿¼ÑÐ] »úеѧ˶×Ü·Ö317Çóµ÷¼Á£¡£¡£¡£¡ +4 Acaciad 2026-03-25 4/200 2026-03-25 19:59 by hanserlol
[¿¼ÑÐ] 290·Öµ÷¼ÁÇóÖú +3 ¼ªÏéÖ¹Ö¹³Â 2026-03-25 3/150 2026-03-25 19:58 by barlinike
[¿¼ÑÐ] ÉúÎï¼¼ÊõÓ빤³Ì +3 1294608413 2026-03-25 4/200 2026-03-25 18:02 by 1294608413
[¿¼ÑÐ] 0854È˹¤ÖÇÄÜ·½ÏòÕÐÊÕµ÷¼Á +4 ÕÂСÓã567 2026-03-24 4/200 2026-03-25 13:29 by 2177681040
[¿¼ÑÐ] ²ÄÁϵ÷¼Á +6 Æ¥¿Ëi 2026-03-23 6/300 2026-03-24 21:09 by greychen00
[¿¼ÑÐ] ²ÄÁÏר˶ÕÒµ÷¼Á +5 ¹þ¹þ¹þºðºðºð¹þ 2026-03-23 5/250 2026-03-24 19:07 by ÁËÁËÁËÁË¡£¡£
[¿¼²©] 26É격×Ô¼ö +3 whh869393 2026-03-24 3/150 2026-03-24 09:55 by 21018060
[»ù½ðÉêÇë] Çë½ÌÏ´ó¼Ò 2026Äê¹ú¼Ò»ù½ðÉêÇëÊÇ˫äÉóÂ𣿠+3 lishucheng1 2026-03-22 5/250 2026-03-24 08:22 by gltch
[¿¼ÑÐ] Ò»Ö¾Ô¸±±¾©»¯¹¤´óѧ 070300 ѧ˶ 336·Ö Çóµ÷¼Á +7 vvÃÔ 2026-03-22 7/350 2026-03-23 23:44 by Txy@872106
[¿¼ÑÐ] 284Çóµ÷¼Á +3 yanzhixue111 2026-03-23 6/300 2026-03-23 22:58 by pswait
[¿¼ÑÐ] 328Çóµ÷¼Á +4 LHHL66 2026-03-23 4/200 2026-03-23 14:55 by lbsjt
[¿¼ÑÐ] 298Çóµ÷¼ÁÒ»Ö¾Ô¸211 +3 Éϰ¶6666@ 2026-03-20 3/150 2026-03-22 15:50 by ColorlessPI
[¿¼ÑÐ] 311Çóµ÷¼Á +3 26ÑÐ0 2026-03-20 3/150 2026-03-22 14:46 by ColorlessPI
[¿¼ÑÐ] Çóµ÷¼Á +3 .m.. 2026-03-21 4/200 2026-03-21 16:25 by barlinike
[¿¼ÑÐ] ²ÄÁÏÓ뻯¹¤£¨0856£©304Çó BÇø µ÷¼Á +3 Çñgl 2026-03-21 3/150 2026-03-21 13:47 by lature00
[¿¼ÑÐ] AÇøÏß²ÄÁÏѧµ÷¼Á +5 ÖÜÖÜÎÞ¼« 2026-03-20 5/250 2026-03-20 21:33 by laoshidan
[¿¼ÑÐ] 353Çóµ÷¼Á +3 À­¹³²»Ðí±ä 2026-03-20 3/150 2026-03-20 19:56 by JourneyLucky
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û