²é¿´: 2775  |  »Ø¸´: 56

cgetlc

ľ³æ (ÕýʽдÊÖ)


[½»Á÷] »ªÖпƼ¼´óѧÎïÀíѧԺMEMSÍŶÓÕÐÆ¸

¾ßÌ幤×÷µØµã:
Î人
н½ð:
Äêн12ÍòÆð
ѧÀúºÍÑо¿·½Ïò:
MEMS´«¸ÐÆ÷
ÕÐÆ¸¸Úλ:
²©ºó¡¢½²Ê¦¼°ÒÔÉϸÚλ
¹«Ë¾Ãû³Æ:
»ªÖпƼ¼´óѧÎïÀíѧԺMEMSÍŶÓ
ÁªÏµ·½Ê½:
tlc@mail.hust.edu.cn

»ªÖпƼ¼´óѧÎïÀíѧԺMEMSÍŶÓÄâÆ¸Ñо¿ÈËÔ±2µ½3Ãû£¨¿ÉÒÔÊDz©ºó»òÕß½Ìʦ¸Ú룩£¬´ÓÊÂMEMS´«¸ÐÆ÷¼°ÆäÓ¦ÓÃϵͳÑз¢¡£
    ÒªÇó¾ßÓÐMEMSרҵ±³¾°µÄ²©Ê¿±ÏÒµÉú»ò³öÕ¾²©Ê¿ºó£¬ÎïÀí»ù´¡ºÃ£¬ÓÐÔÚMEMS¹¤ÒÕÏßÉϵÄʵ¼Ê¾­Ñ飬¶Ô¹¤ÒÕÓй㷺ÉîÈëµÄ֪ʶ£¬Óй¤×÷¼¤Ç飬ÇÚ·Ṳ̈ʵ£¬ÓÐÍŶӾ«Éñ£¬¹µÍ¨ÄÜÁ¦Ç¿¡£
   Æ½Ì¨Ìõ¼þ£ºÊµÑéÊÒ¾ßÓÐ×Ô¼ºµÄCleanroom£¬ÒÑÓÐÉ豸°üÀ¨°üÀ¨Å£½òÒÇÆ÷µÄPlasmaPro NGP100 Estrelas ·´Ó¦Àë×ÓÉî¿Ìʴϵͳ£¨ÑÇÖÞÊ×̨£©¡¢Ð¾Ë¶°ëµ¼ÌåµÄAdvantools ATD1000¼¤¹âֱдʽ¹â¿Ì»ú¡¢¿¨¶û²Ì˾µÄSigmaÈÈ·¢ÉäɨÃèµç×ÓÏÔ΢¾µµÈ¡¢OLYMPUSµÄBX51M½ðÏàÏÔ΢¾µ¡¢KLA Tencor¹«Ë¾µÄD-100 ÐĮ́½×ÒÇ¡¢´Å¿Ø½¦Éä/ÈÈÕô·¢¸´ºÏ¶ÆÄ¤ÏµÍ³ÒÔ¼°°üÀ¨Êý¿ØÍ¿½ºÒÇ¡¢µÈÀë×ÓÈ¥½º»ú¡¢Êý¿Ø/ÏÔÈĘ̀ÈȰ塢ºæ¿¾ÏäµÈÒ»ÅúСÐÍÉ豸£¬Æ½Ì¨ÀÛ¼ÆÍ¶È볬¹ý1500ÍòÔª¡£ÂÛÖ¤ÖеÄÉ豸°üÀ¨£ºPECVD¡¢·â×°»úµÈ¡£
   Ìرð˵Ã÷£ºÎÒÃǵÄÍŶÓÊÇÁ¥ÊôÎïÀíѧԺ£¬¸Úλ¿ÉÑ¡Ôñ²©ºó£¨²»ÓÃÉϿΣ¬´ýÓö²ÎÕÕ¸±½ÌÊÚ£©»òÕßÈËÊ´úÀíµÄ¹Ì¶¨¸Úλ£¨Ñ§Ð£Í³Ò»µÄÕþ²ß£©£¬ËùƸ¸ÚλÈËÔ±Äêн12ÍòÆð£¬²»Í¬¸ÚλÉÏÏÞ²îÒì½Ï´ó¡£

ÁªÏµ·½Ê½£º
ÓÐÒâÕßÇ뽫ÖÐÓ¢ÎļòÀú£¨¸½ÕÕÆ¬£©µç×Ó°æ·¢¸ø Í¿ÀÏʦ
µç×ÓÓʼþ£ºtlc@mail.hust.edu.cn
°ì¹«µç»°£º+86 27 8755 8394
´«    Õæ£º+86 27 8754 239

[ Last edited by cgetlc on 2012-7-25 at 10:03 ]

» ²ÂÄãϲ»¶

» ÇÀ½ð±ÒÀ²£¡»ØÌû¾Í¿ÉÒԵõ½:

²é¿´È«²¿É¢½ðÌù

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
»ØÌûÖö¥ ( ¹²ÓÐ4¸ö )

discover_wj

ľ³æ (ÕýʽдÊÖ)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
ûÓÐMEMS±³¾°£¬ÊÇÎïÀíµç×Óѧ²©Ê¿£¬×ö¹ýһЩMEMS¹¤ÒÕ£¬Äܲ»ÄÜӦƸ½²Ê¦°¡£¿
4Â¥2012-07-25 10:28:31
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

·²Áú

½ð³æ (ÖøÃûдÊÖ)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
Å£±ÇµÄÈËÉú²»ÐèÒª½âÊÍ
36Â¥2012-07-25 12:31:05
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

heyang835

½û³æ (ÕýʽдÊÖ)

¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
±¾ÌûÄÚÈݱ»ÆÁ±Î

51Â¥2012-07-25 13:13:23
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

cgetlc

ľ³æ (ÕýʽдÊÖ)


cgetlc: »ØÌûÖö¥ 2012-07-26 17:46:40
ÒýÓûØÌû:
4Â¥: Originally posted by discover_wj at 2012-07-25 10:28:31
ûÓÐMEMS±³¾°£¬ÊÇÎïÀíµç×Óѧ²©Ê¿£¬×ö¹ýһЩMEMS¹¤ÒÕ£¬Äܲ»ÄÜӦƸ½²Ê¦°¡£¿

·¢¸ö¼òÀú¿´¿´°É£¬ºÇºÇ
54Â¥2012-07-26 17:46:14
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

John126

ľ³æ (Ö°Òµ×÷¼Ò)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
ºÃ»ú»á£¡¶¥£¡
15Â¥2012-07-25 10:53:09
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

ke30ke

ľ³æÖ®Íõ (ÎÄ̳¾«Ó¢)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
ding
40Â¥2012-07-25 12:44:31
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

ħÍõ@Î÷Óò

Í­³æ (ÖªÃû×÷¼Ò)


¡ï
cgetlc(½ð±Ò+1): лл²ÎÓë
   HUST
49Â¥2012-07-25 13:07:21
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¼òµ¥»Ø¸´
whbo2Â¥
2012-07-25 10:06   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
bestlike3Â¥
2012-07-25 10:21   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
flyxu5Â¥
2012-07-25 10:29   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 10:31   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 10:32   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
wuge4158Â¥
2012-07-25 10:35   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
longway1029Â¥
2012-07-25 10:36   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
bestlike10Â¥
2012-07-25 10:38   »Ø¸´  
198611Â¥
2012-07-25 10:41   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
wlxwlx102612Â¥
2012-07-25 10:42   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
zhaoyan197813Â¥
2012-07-25 10:46   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
qingheyouyou14Â¥
2012-07-25 10:50   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
bai12316Â¥
2012-07-25 11:00   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
jjlxyf17Â¥
2012-07-25 11:00   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
bush28618Â¥
2012-07-25 11:06   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
yexuqing19Â¥
2012-07-25 11:08   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
icebergwu20Â¥
2012-07-25 11:21   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
jiangxl.061821Â¥
2012-07-25 11:30   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
wenbin990322Â¥
2012-07-25 11:36   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 11:39   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
leipei.12324Â¥
2012-07-25 11:43   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
lxz30725Â¥
2012-07-25 11:45   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 11:51   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
nwxjh27Â¥
2012-07-25 11:51   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
huigoo28Â¥
2012-07-25 11:53   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
clszdy29Â¥
2012-07-25 11:54   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 11:54   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
JOEF31Â¥
2012-07-25 11:55   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
frw1_79_7932Â¥
2012-07-25 12:13   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
spc0833Â¥
2012-07-25 12:28   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 12:28   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
mlanqiang35Â¥
2012-07-25 12:29   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
xgj2008best37Â¥
2012-07-25 12:32   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
ansonal38Â¥
2012-07-25 12:39   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
zhaowei356339Â¥
2012-07-25 12:44   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
ÒýÓûØÌû:
4Â¥: Originally posted by discover_wj at 2012-07-25 10:28:31 ûÓÐMEMS±³¾°£¬ÊÇÎïÀíµç×Óѧ²©Ê¿£¬×ö¹ýһЩMEMS¹¤ÒÕ£¬Äܲ»ÄÜӦƸ½²Ê¦°¡£¿

lsyzlp41Â¥
2012-07-25 12:51   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 12:52   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
sqs8617sqs43Â¥
2012-07-25 12:52   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
song_ge44Â¥
2012-07-25 12:53   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
zhengkning45Â¥
2012-07-25 12:54   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 12:58   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
ll999947Â¥
2012-07-25 13:04   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
2012-07-25 13:06   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
jxgznd_zyj50Â¥
2012-07-25 13:12   »Ø¸´  
cgetlc(½ð±Ò+1): лл²ÎÓë
Ïà¹Ø°æ¿éÌø×ª ÎÒÒª¶©ÔÄÂ¥Ö÷ cgetlc µÄÖ÷Ìâ¸üÐÂ
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[¿¼ÑÐ] Ò»Ö¾Ô¸ºÓ¹¤´ó 081700 276Çóµ÷¼Á +4 µØÇòÈÆ×ÅÌ«Ñôת 2026-03-23 4/200 2026-03-26 14:27 by zzll406
[¿¼ÑÐ] Ò»Ö¾Ô¸ Î÷±±´óѧ ×Ü·Ö282 Ó¢ÓïÒ»62 Çóµ÷¼Á +6 18419759900 2026-03-25 6/300 2026-03-26 13:58 by ´ß»¯´ó°×
[¿¼ÑÐ] 296Çóµ÷¼Á +5 www_q 2026-03-20 5/250 2026-03-26 12:56 by 3Strings
[¿¼ÑÐ] 291 Çóµ÷¼Á +7 »¯¹¤2026½ì±ÏÒµÉ 2026-03-21 8/400 2026-03-26 11:25 by AlenQIN.
[¿¼ÑÐ] ²ÄÁÏÓ뻯¹¤328·Öµ÷¼Á +6 ¡££¬¡££¬¡££¬¡£i 2026-03-23 6/300 2026-03-25 22:30 by 418490947
[¿¼ÑÐ] 299Çóµ÷¼Á +7 ijijijijλ 2026-03-21 8/400 2026-03-25 20:34 by ÈÈÇéɳĮ
[¿¼ÑÐ] ÍøÂç¿Õ¼ä°²È«0839Õе÷¼Á +4 w320357296 2026-03-25 6/300 2026-03-25 17:59 by 255671
[¿¼ÑÐ] 0703»¯Ñ§Çóµ÷¼Á +6 ÄÌÓͲÝÝ®. 2026-03-22 7/350 2026-03-25 10:00 by shangxh
[¿¼ÑÐ] ÉϺ£µçÁ¦´óѧ²ÄÁÏ·À»¤ÓëвÄÁÏÖØµãʵÑéÊÒÕÐÊÕµ÷¼ÁÑо¿Éú£¨²ÄÁÏ¡¢»¯Ñ§¡¢µç»¯Ñ§£¬»·¾³£© +4 ÎÒ°®Ñ§µç³Ø 2026-03-23 4/200 2026-03-25 00:59 by 1027_324
[Óлú½»Á÷] ÓлúºÏ³ÉÇóÖú 20+3 FENGSHUJEI 2026-03-23 5/250 2026-03-24 19:31 by 88817753
[¿¼ÑÐ] Çóµ÷¼Á +5 ÁÖ֮Ϧ 2026-03-24 5/250 2026-03-24 17:16 by dick_runner
[¿¼ÑÐ] Çóµ÷¼Á +6 ÑÐÑУ¬½Óµç»° 2026-03-24 7/350 2026-03-24 17:01 by barlinike
[¿¼ÑÐ] ²ÄÁÏ¿¼Ñе÷¼ÁÉú +3 »ÆÁ»Ò»ÃÎǧÄê 2026-03-24 3/150 2026-03-24 17:00 by barlinike
[¿¼ÑÐ] 292Çóµ÷¼Á +4 ¶ì¶ì¶ì¶î¶î¶î¶î¶ 2026-03-24 4/200 2026-03-24 16:41 by peike
[¿¼ÑÐ] 279·ÖÇóµ÷¼Á Ò»Ö¾Ô¸211 +18 chaojifeixia 2026-03-19 20/1000 2026-03-24 10:34 by dolphin_ycj
[¿¼ÑÐ] Ò»Ö¾Ô¸ºÓ±±¹¤Òµ´óѧ0817»¯¹¤278·ÖÇóµ÷¼Á +7 jhybd 2026-03-23 12/600 2026-03-24 09:03 by jhybd
[¿¼ÑÐ] 328Çóµ÷¼Á +4 LHHL66 2026-03-23 4/200 2026-03-23 14:55 by lbsjt
[¿¼ÑÐ] 291Çóµ÷¼Á +5 ‹üÈA 2026-03-22 5/250 2026-03-23 09:20 by haoshis
[¿¼ÑÐ] Ò»Ö¾Ô¸»ªÖÐũҵ071010£¬×Ü·Ö320Çóµ÷¼Á +5 À§À§À§À§À¤À¤ 2026-03-20 6/300 2026-03-22 17:41 by hxsm
[¿¼ÑÐ] ÉúÎïѧµ÷¼Á +5 Surekei 2026-03-21 5/250 2026-03-22 14:39 by tcx007
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û