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Titanium oxide is a useful catalytic1 and gas-sensing2 material. Titanium oxide thin films with nanoporous structures are desirable for these applications due to their large surface areas and high reactivities. Nanoporous titanium oxide films have been fabricated by anodizing titanium sheets in hydrofluoric acid containing solutions. 3,4 The anodizing approach is able to build a porous titanium oxide film of controllable pore size, good uniformity, and conformability over large areas at low cost.5 Moreover, as dependent upon the titanium alloy used, metal impurities can be readily introduced. Despite these advantages, there is a dearth of literature on anodization of titanium and titanium-based alloys. Our work is aimed toward better understanding of the anodizing mechanism, as well as the fabrication of new nanodimensional structures for possible application in catalytic, biotemplating, 6,7 gas-sensing8 and electronic applications. In this work, we examine the morphology of porous titanium oxide thin films fabricated by anodizing pure titanium sheets under variable conditions. It has been found that the anodized titanium films have more complicated morphologies than anodized aluminum.9 In addition to porous films, such as those reported earlier,3 well-aligned nanotubelike structures composed of titanium oxide were obtained. In contrast to the continuous pore structures achieved with aluminum anodization, discrete titanium oxide nanotubes are found to grow from the discontinuous nanoporous titanium oxide film. |
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