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185012831

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Titanium oxide is a useful catalytic1 and gas-sensing2
material. Titanium oxide thin films with nanoporous
structures are desirable for these applications due to their
large surface areas and high reactivities. Nanoporous titanium
oxide films have been fabricated by anodizing
titanium sheets in hydrofluoric acid containing solutions.
3,4 The anodizing approach is able to build a porous
titanium oxide film of controllable pore size, good uniformity,
and conformability over large areas at low cost.5
Moreover, as dependent upon the titanium alloy used,
metal impurities can be readily introduced. Despite these
advantages, there is a dearth of literature on anodization
of titanium and titanium-based alloys. Our work is
aimed toward better understanding of the anodizing
mechanism, as well as the fabrication of new nanodimensional
structures for possible application in catalytic, biotemplating,
6,7 gas-sensing8 and electronic applications.
In this work, we examine the morphology of porous
titanium oxide thin films fabricated by anodizing pure
titanium sheets under variable conditions. It has been
found that the anodized titanium films have more complicated
morphologies than anodized aluminum.9 In
addition to porous films, such as those reported earlier,3
well-aligned nanotubelike structures composed of titanium
oxide were obtained. In contrast to the continuous
pore structures achieved with aluminum anodization, discrete
titanium oxide nanotubes are found to grow from
the discontinuous nanoporous titanium oxide film.
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zhangjunlong

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