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MEMS: Applications:The MEMS Handbook volume III
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Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts in the field, this volume explores a wide range of MEMS applications, ranging from inertial sensors, microactuators, and microscale vacuum pumps to microrobtics and micro-droplet generators. The final section of the book looks toward the future of MEMS, including MEMS autonomous control of free-shear flows and fabrication technologies for nanoscale devices. New chapters in this edition explore topics such as nonlinear electrokinetic devices and molecular self-assembly. Table of ContentsIntroduction; Mohamed Gad-el-Hak Inertial Sensors; Paul L. Bergstrom, Melissa L. Trombley, and Gary G. Li Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits; Yogesh B. Gianchandani, Chester G. Wilson, and Jae-Sing Park Surface Micromachined Devices; Andrew D. Oliver and David W. Plummer Microactuators; Alberto Borboni Sensors and Actuators for Turbulent Flows; Lennart Lofdahl and Mohamed Gad-el-Hak Microrobotics; Thorbjorn Ebefors and Goran Stemme Microscale Vacuum Pumps; E. Phillip Muntz, Marcus Young, and Stephen E. Vargo Nonlinear Electrokinetic Devices; Yuxing Ben and Hsueh-Chia Chang Microdroplet Generators; Fan-Gang Tseng Micro Heat Pipes and Micro Heat Spreaders; G.P. 'Bud' Peterson and Choondal B. Sobhan Microchannel Heat Sinks; Yitshak Zohar Flow Control; Mohamed Gad-el-Hak Reactive Control for Skin-Friction Reduction; Haecheon Choi Toward MEMS Autonomous Control of Free-Shear Flows; Ahmed Naguib Index [ Last edited by memser on 2009-1-13 at 23:30 ] |
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