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eBook：MEMS Design and Fabrication: The MEMS Handbook Volume II
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MEMS Design and Fabrication: The MEMS Handbook by Gad-El-Hak, Mohamed Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications. Table of ContentsIntroduction; Mohamed Gad-el-Hak Materials for Microelectromechanical Systems; Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon MEMS Fabrication; Guangyao Jia and Marc J. Madou LIGA and Micromolding; Guangyao Jia and Marc J. Madou X-Ray Based Fabrication; Todd Christenson EFAB(R) Technology and Applications; Adam L. Cohen and Chris A. Bang Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Robert S. Okojie Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Glenn M. Beheim and Laura J. Evans Polymer Microsystems: Materials and Fabrication; Gary M. Atkinson and Zoubeida Ounaies Optical Diagnostics to Investigate the Entrance Length in Microchannels; Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley Microfabricated Chemical Sensors for Aerospace Applications; Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel Packaging of Harsh Environment MEMS Devices; Liang-Yu Chen and Jih-Fen Lei Fabrication Technologies for Nanoelectromechanical Systems; Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider Molecular Self-Assembly: Fundamental Concepts and Applications; Jill A. Miwa and Federico Rosei Index [ Last edited by memser on 2009-1-13 at 23:31 ] |
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