| ²é¿´: 737 | »Ø¸´: 2 | |||||||||||||||||
[½»Á÷]
ÖпÆÔºËÕÖÝÄÉÃ×Ëù »úе ¾«ÒÇ ×Ô¶¯»¯ »úµçÒ»Ì廯ÁªÅàÉú»ú»á
|
ÖпÆÔºËÕÖÝÄÉÃ×ËùÉ豸Ñз¢ÏîÄ¿×éÖ÷Òª´ÓÊÂ×ÔÖ÷֪ʶ²úȨ°ëµ¼ÌåÉú³¤ºÍ¹¤ÒÕÉ豸µÄ¿ª·¢¡£ÏÖÕÐÊÕÁªºÏÅàÑøÑ§Éú¶àÃû¡£¿ÎÌâ·½ÏòΪÔÚµ¼Ê¦Ö¸µ¼Ï£¬½øÐÐMOCVDÉ豸µÄÉè¼Æ£¬Èȳ¡£¬Á÷³¡µÄ·ÂÕæ£¬×Ô¶¯¿ØÖÆÏµÍ³Éè¼ÆµÈ¡£Í¨¹ýÁªºÏÅàÑø£¬Ñ§Éú½«ÊìÁ·ÕÆÎÕ´óÐͰ뵼ÌåÉ豸µÄÉè¼ÆºÍÑз¢µÄ¹ý³Ì£¬¾ßÓÐÁ¼ºÃµÄ¾ÍÒµ¾ºÕùÁ¦¡£ÓÅÐãѧÉú¿ÉÒÔÁôËù¹¤×÷¡£ ×ʸñ 1£© ¶ÔÉ豸Ñз¢ÓÐŨºñÐËȤ£¬¾ßÓÐ×êÑо«Éñ¡£ 2£© רҵ¿Î³Ì³É¼¨ÓÅÐã¡£ 3£© ¶¯ÊÖÄÜÁ¦Ç¿¡£ 4£© ÄÜÊìÁ·Ê¹ÓÃÏà¹ØµÄÉè¼ÆµÄÄ£ÄâÈí¼þ¡£ 5£© ÄÜ¿ìËÙÔĶÁÓ¢ÎÄÎÄÏס£ ÁªÏµ·½Ê½£º zhang_zehong@hotmail.com µ¼Ê¦ÕÅÔóºé½éÉÜ£º 1999ÄêÇ廪´óѧ±¾¿Æ±ÏÒµ£¬2002ÄêÖйú¿ÆÑ§Ôº°ëµ¼ÌåËù˶ʿ±ÏÒµ£¬2005ÄêÃÀ¹úUniversity of South Carolina´óѧ²©Ê¿±ÏÒµ£¬²¢´Óʲ©Ê¿ºó¹¤×÷¡£2006ÄêÈÎÖ°ÃÀ¹ú¹è¹ÈÓ¦ÓòÄÁϹ«Ë¾Applied Material, Inc£¬ÈÎ×ÊÉî¹Ø¼ü¿Í»§¼¼Êõʦ¡£ 2011Ä꣬¼ÓÈëÖпÆÔºËÕÖÝÄÉÃ×Ëù£¬ÊÜÆ¸ÎªÖпÆÔº¡°°ÙÈ˼ƻ®¡±Ñо¿Ô±¡¢²©Ê¿Éúµ¼Ê¦¡£ ÃÀ¹úUniversity of South Carolina¿í´øÏ¶°ëµ¼Ìå×éÊÇÊÀ½ç¶¥¼âµÄÑо¿SiCºÍGaN²ÄÁÏºÍÆ÷¼þµÄʵÑéÊÒ¡£¸ÃʵÑéÊÒµÄSiCÑо¿Ôø¾µÃµ½¾·ÑÖ§³ÖÀÛ¼ÆÔ¼1800ÍòÃÀÔª¡£ÔÚ¸Ã×é¹¥¶Á²©Ê¿ºÍ²©Ê¿ºóÆÚ¼ä£¬Ö÷Òª´ÓÊÂSiCÍâÑÓCVDÉ豸µÄÑÐÖÆ£¬¹¤ÒÕ¿ª·¢£¬Î»´í·ÖÎö¼°Æ÷¼þ²âÊÔ¡£ÔÚÆÚ¿¯ºÍ¹ú¼Ê»áÒéÎļ¯ÉÏ·¢±íµÚÒ»×÷ÕßÂÛÎÄÊ®ÓàÆª£¬ÆäÖÐ4ƪ·¢±íÔÚAppl. Phys. Lett.ÉÏ¡£ Ó¦ÓòÄÁϹ«Ë¾ÊÇÈ«Çò×î´óµÄ°ëµ¼ÌåÉ豸ºÍÌ«ÑôÄÜÉ豸ÌṩÉÌ¡£ÔÚÓ¦ÓòÄÁÏÈÎÖ°ÆÚ¼ä£¬•ûΪ¶àÃû¹Ø¼ü¿Í»§£¬°üÀ¨µÂ¹úÔAMD, ÐÂ¼ÓÆÂÌØÐí°ëµ¼Ì壬IBM, ̨ÍåÄÏÑÇ£¬»ªÑÇ£¬»ª°î£¬Á¦¾§¡¢Èð¾§£¬ÆæÃδÃÀ¹â£¬Ì¨»ýµçµÈÌṩ´ó¹æÄ£¼¯³ÉµçÂ·ÖÆÔìÓÃÉ豸ºÍ¹¤ÒÕ¼¼Êõ¡£Ôø¾¸ºÔð¹ýµÄÉ豸²úÆ·°üÀ¨MOCVD, CVD, PVD, ALD, PEALD, PrecleanµÈ¡£ ĿǰÑо¿ÁìÓòΪ°ëµ¼Ìå²ÄÁÏ£¬É豸ºÍÆ÷¼þ [ Last edited by zhang224 on 2011-11-21 at 13:39 ] |
» ²ÂÄãϲ»¶
085600²ÄÁÏÓ뻯¹¤349·ÖÇóµ÷¼Á
ÒѾÓÐ16È˻ظ´
085801µçÆø×¨Ë¶272Çóµ÷¼Á
ÒѾÓÐ14È˻ظ´
271Çóµ÷¼Á
ÒѾÓÐ27È˻ظ´
µ÷¼ÁÇóÊÕÁô
ÒѾÓÐ33È˻ظ´
300·ÖÇóµ÷¼Á £¨085501»úеר˶£¬±¾¿ÆÑï´ó£©
ÒѾÓÐ10È˻ظ´
Çóµ÷¼Á
ÒѾÓÐ15È˻ظ´
²ÄÁÏ085601µ÷¼Á
ÒѾÓÐ34È˻ظ´
»úе»¹Óл¹ÓÐÃû¶îÂð£¿Ì«ÄÑÁË
ÒѾÓÐ8È˻ظ´
288Çóµ÷¼Á£¬Ò»Ö¾Ô¸»ªÄÏÀí¹¤´óѧ071005
ÒѾÓÐ24È˻ظ´
085600²ÄÁÏÓ뻯¹¤329·ÖÇóµ÷¼Á
ÒѾÓÐ23È˻ظ´
cao_dw
Ìú³æ (³õÈëÎÄ̳)
- Ó¦Öú: 0 (Ó×¶ùÔ°)
- ½ð±Ò: 22
- Ìû×Ó: 10
- ÔÚÏß: 5.9Сʱ
- ³æºÅ: 1868919
- ×¢²á: 2012-06-25
- רҵ: µç·Óëϵͳ
2Â¥2012-06-28 15:19:16
![]() ![]() ![]() |
3Â¥2012-06-28 19:40:02














»Ø¸´´ËÂ¥
