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ebook:Microengineering, MEMS, and Interfacing-A practical guide -CRC2006
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Danny Banks, «Microengineering, MEMS, and Interfacing» CRC | ISBN 0824723058 | March 23, 2006 | PDF | 352 Pages | 13.8 MB Designed to address particular problems across a range of disciplines, Microengineering, MEMS, and Interfacing: A Practical Guide provides a general overview of micromachining techniques and presents micromachining approaches to problem solving. The author outlines techniques for micromachining materials, including silicon, metals, and polymers, and then illustrates how to combine these technologies to create a variety of structures and devices. He also includes discussions on nanotechnology and how it overlaps with microengineering, introduces the subject of sensor interfacing, and raises the tricky subject of MEMS packaging Features: * Presents a non-technical introduction to MEMS fabrication, design, and integration techniques for application in a variety of areas * Covers mask design and silicon micromachining in detail * Offers qualitative comparisons of many materials and processes (both silicon and nonsilicon) * Includes abundant line drawings and micrographs to illustrate the discussion * Devotes a chapter to nanotechnology and its relation to the current state of microengineering downloadlink: http://www.ftp2share.com/file/6000/0824723058.rar.html 点击上面的下载连接，进入画面以后寻找“Download”面板点击即可进入另一下载画面，提供了不同下载网址链接供您选择 [ Last edited by 604gq on 2007-4-13 at 09:07 ] |
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