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The radiation shield is preferably made of silicon, graphite, or silicon carbide (SiC). The material for the radiation shield is not limited to the above though. The radiation shield can be made of any one or combination of two or more selected from the group consisting of, including the above-mentioned materials, silicon carbide-coated material, silicon nitrides (nitrified silicons), silicon oxides, aluminum oxides, boron nitrides, molybdenum or molybdenum-based alloys, tungsten or tungsten-based alloys, tantalum or tantalum-based alloys, silica-based porous materials, aluminosilicate-based porous materials, gold-coated porous materials, gold-coated materials, platinum-coated porous materials, platinum-coated materials, silica-coated porous materials, silica-coated materials, silver-coated porous materials, silver-coated materials, and perlite.

The radiation shield reduces the thermal energy loss from the polysilicon rod by at least one of the following effects; thermal shielding effect by a hot emittance (>400° C.), shielding effect by multiple layers of radiation shields, shielding effect by a low emissivity of the radiation shield material, and insulating effect by reduction of thermal conductivity due to thickness. The efficiency of the shield is strongly dependent on its physical position within the reaction chamber. The shield must be placed in such a way that its source-facing surface (surface facing the heated polysilicon rod) is maintained hot (high temperature) by intercepting the thermal radiant energy leaving the heated rods.

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