| ²é¿´: 678 | »Ø¸´: 6 | |||
| ±¾Ìû²úÉú 1 ¸ö ·ÒëEPI £¬µã»÷ÕâÀï½øÐв鿴 | |||
| µ±Ç°Ö»ÏÔʾÂú×ãÖ¸¶¨Ìõ¼þµÄ»ØÌû£¬µã»÷ÕâÀï²é¿´±¾»°ÌâµÄËùÓлØÌû | |||
Ë®ÖÐÂÌÖÞÒø³æ (СÓÐÃûÆø)
|
[ÇóÖú]
·Ò뼸¾ä»° лл
|
||
| ±¡Ä¤(film)´Ó[111]µ½[100]½á¹¹µÄ±ä»¯Ò²±»ÈÏΪÊǼ¤»îÄÜ(activation energy)µÄ¸Ä±ä¡£»ùƬζÈ(substrate temperature)Éý¸ßÓÐÖúÓÚ¼õÉÙ±¡Ä¤ÖеÄÑõº¬Á¿£¬Ê¹Ñõ¿Õλ(oxygen vacancies)Ôö¼Ó£¬¶øÑõ¿ÕλµÄÔö¼ÓÓÐÖúÓÚÌá¸ß±¡Ä¤ÖÐÀë×ÓµÄÇ¨ÒÆÂÊ(mobility)£¬¼ÓËÙÀë×ÓÀ©É¢(diffusion)£» |
» ²ÂÄãϲ»¶
Çóµ÷¼Á
ÒѾÓÐ4È˻ظ´
0854Çóµ÷¼Á
ÒѾÓÐ27È˻ظ´
²ÄÁÏÏà¹Ø×¨Òµ344Çóµ÷¼ÁË«·Ç¹¤¿ÆÑ§Ð£»ò¿ÎÌâ×é
ÒѾÓÐ27È˻ظ´
300Çóµ÷¼Á
ÒѾÓÐ12È˻ظ´
291Çóµ÷¼Á
ÒѾÓÐ10È˻ظ´
Ò»Ö¾Ô¸»¦9£¬326ÇóÉúÎïѧµ÷¼Á
ÒѾÓÐ12È˻ظ´
ÉúÎïѧµ÷¼Á
ÒѾÓÐ10È˻ظ´
320Çóµ÷¼Á
ÒѾÓÐ5È˻ظ´
½ÓÊÜÈκε÷¼Á
ÒѾÓÐ7È˻ظ´
»¯Ñ§070300 Çóµ÷¼Á
ÒѾÓÐ29È˻ظ´
zou-yanhua
½ð³æ (СÓÐÃûÆø)
- ·ÒëEPI: 24
- Ó¦Öú: 0 (Ó×¶ùÔ°)
- ½ð±Ò: 782.6
- É¢½ð: 25
- ºì»¨: 1
- Ìû×Ó: 167
- ÔÚÏß: 114.8Сʱ
- ³æºÅ: 1030634
- ×¢²á: 2010-05-28
- רҵ: Åäλ»¯Ñ§
¡¾´ð°¸¡¿Ó¦Öú»ØÌû
¡ï
sltmac(½ð±Ò+1): ¸Ðл½»Á÷~ 2011-07-30 13:17:14
sltmac(½ð±Ò+1): ¸Ðл½»Á÷~ 2011-07-30 13:17:14
| The change of the structure from the plane [111] to [100] of the film was also considered as the change of the activation energy. The increase of the substrate temperature is helpful to reduce the oxygen content of the film and thus increase the oxygen vacancies. And the increase of the oxygen vacancies conduce£ó to¡¡improve the mobility and diffusion speed of ions£® |
7Â¥2011-07-27 11:00:10
LittleBush
ÖÁ×ðľ³æ (ÖøÃûдÊÖ)
- ·ÒëEPI: 15
- Ó¦Öú: 0 (Ó×¶ùÔ°)
- ½ð±Ò: 30705.8
- ºì»¨: 32
- Ìû×Ó: 1348
- ÔÚÏß: 712.4Сʱ
- ³æºÅ: 107112
- ×¢²á: 2005-11-17
- ÐÔ±ð: GG
- רҵ: ÊýÂÛ
¡¾´ð°¸¡¿Ó¦Öú»ØÌû
¡ï
sltmac(½ð±Ò+1): ллӦÖú~ 2011-07-27 00:02:10
Ë®ÖÐÂÌÖÞ(½ð±Ò+8, ·ÒëEPI+1): лл ÕæµÄлл 2011-07-30 16:06:27
sltmac(½ð±Ò+1): ллӦÖú~ 2011-07-27 00:02:10
Ë®ÖÐÂÌÖÞ(½ð±Ò+8, ·ÒëEPI+1): лл ÕæµÄлл 2011-07-30 16:06:27
| The structural change of film from 111 to 100 is also regarded as the change of activation energy¡£The increase of substrate temperature can induce the oxygencontent of film and increase the oxygen vacancies which in turn can increase the ion mobility and facilitate ion diffusion of film¡£ |
2Â¥2011-07-26 21:36:16
LittleBush
ÖÁ×ðľ³æ (ÖøÃûдÊÖ)
- ·ÒëEPI: 15
- Ó¦Öú: 0 (Ó×¶ùÔ°)
- ½ð±Ò: 30705.8
- ºì»¨: 32
- Ìû×Ó: 1348
- ÔÚÏß: 712.4Сʱ
- ³æºÅ: 107112
- ×¢²á: 2005-11-17
- ÐÔ±ð: GG
- רҵ: ÊýÂÛ
3Â¥2011-07-26 21:37:10
8814402
ÖÁ×ðľ³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 509
- Ó¦Öú: 18 (СѧÉú)
- ¹ó±ö: 0.381
- ½ð±Ò: 12916.1
- É¢½ð: 47
- ºì»¨: 16
- Ìû×Ó: 4183
- ÔÚÏß: 357.8Сʱ
- ³æºÅ: 1184404
- ×¢²á: 2011-01-06
- רҵ: Ò©ÎïѧÆäËû¿ÆÑ§ÎÊÌâ
¡¾´ð°¸¡¿Ó¦Öú»ØÌû
¡ï
sltmac(½ð±Ò+1): ¸ÐлӦÖú~ 2011-07-27 09:19:40
Ë®ÖÐÂÌÖÞ(½ð±Ò+7): лл 2011-07-31 19:28:34
sltmac(½ð±Ò+1): ¸ÐлӦÖú~ 2011-07-27 09:19:40
Ë®ÖÐÂÌÖÞ(½ð±Ò+7): лл 2011-07-31 19:28:34
| ±¡Ä¤(film)´Ó[111]µ½[100]½á¹¹µÄ±ä»¯Ò²±»ÈÏΪÊǼ¤»îÄÜ(activation energy)µÄ¸Ä±ä¡£»ùƬζÈ(substrate temperature)Éý¸ßÓÐÖúÓÚ¼õÉÙ±¡Ä¤ÖеÄÑõº¬Á¿£¬Ê¹Ñõ¿Õλ(oxygen vacancies)Ôö¼Ó£¬¶øÑõ¿ÕλµÄÔö¼ÓÓÐÖúÓÚÌá¸ß±¡Ä¤ÖÐÀë×ÓµÄÇ¨ÒÆÂÊ(mobility)£¬¼ÓËÙÀë×ÓÀ©É¢(diffusion)£» The change of the film structure from ¡¾111¡¿ to ¡¾100¡¿ is also considered as the change of activation energy¡£The increase of substrate temperature is helpful for the decrease of oxygen content in film and thus increase the oxygen vacancies which is condusive to enhancing ion mobility and facilitating ion diffusion in film¡£ |
4Â¥2011-07-27 08:55:57













»Ø¸´´ËÂ¥