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yt.yutian.金虫 (小有名气)
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We predict the separation distance of the particles away from the wall using the linear theory of streamline amplification as proposed in eq 1 and developed by Yamada.39 Figure 5 shows a plot of measured and predicted distance as a function of the particle diameter. The distance between the particle stream center and the wall increases with increasing diameter as expected. Large particles, however, move 20-60% closer to the sidewall than expected. The chrome-on-glass devices result in larger aspect ratio devices than the Mylar mask devices for identical designs. As we expect, the chrome-on-glass devices result in particle peaks that have larger z values. However, these values are still lower than what is predicted by the simple theory. |
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