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It exhibits a remarkable richness with regard to the array of equilibrium and metastable phases that can form and is used, for example, in coatings for cutting tools and wear-resistant layers, as well as for thin-film resistors and diffusion barriers in integrated circuits.

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It exhibits a remarkable richness with regard to the array of equilibrium and metastable phases that can form and is used, for example, in coatings for cutting tools and wear-resistant layers, as well as for thin-film resistors and diffusion barriers in integrated circuits.

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