| ²é¿´: 1150 | »Ø¸´: 3 | |||
[½»Á÷]
ÇóÖúººÓï·Òë³ÉÓ¢ÓïÒ»¸öǰÑÔ
|
|
·Ö×ÓÁ¿Îª¼¸Ê®Íòµ½¼¸°ÙÍòµÄ´ó·Ö×ÓÀ©É¢µ½´ß»¯¼ÁÄÚ²¿½øÐз´Ó¦µÄ¹Ì¶¨´²´ß»¯¼¼ÊõÒ»Ö±ÊÇ¿ÆÑ§½çÑо¿µÄÈȵã[1]¡£¼Ó¹¤Á¤ÇàÖÊ·Ö×ÓºÜÀ§ÄÑ£¬ÒòΪÆä·Ö×Ӻܴ󣬾ßÓм«ÐÔ¡¢·Ç¾§Ìå¡¢¶à¼¶¶Ñµþ½á¹¹£¬Í¬Ê±º¬ÓдóÁ¿ÔÓÔ×Ó£¬ÕâЩÔÓÔ×ÓÔÚ¼Ó¹¤¹ý³ÌÖÐÈÝÒ×µ¼Ö¼ÓÇâ´ß»¯¼Áʧ»î[2] [3]¡£ÔüÓÍÖнðÊô´ó²¿·Ö¼¯ÖÐÔÚÁ¤ÇàÖÊÖУ¬Á¤ÇàÖʴ󲿷ÖÒÔ½ºÍÅÐÎʽ´æÔÚ£¬Á¤ÇàÖÊ·Ö×ÓÖ±¾¶´óԼΪ4nm~5 nm[4]£¬ÐγɵĽºÍÅÖ±¾¶´ó²¿·ÖÔÚ20nmÒÔÉÏ¡£¸ù¾Ý·´Ó¦¶¯Á¦Ñ§£¬À©É¢¿×µÀÓë·´Ó¦ÎïÖ®±ÈÊÇ2~6±¶Ê±£¬×îÓÐÀûÓÚ·´Ó¦ÎïÀ©É¢£¬ËùÒÔÁ¤ÇàÖʽºÍÅÀ©É¢µÄ×îÊÊÒ˿׵ÀÊÇÔÚ30nm~300nmÇø¼ä¡£¸ù¾ÝGPCÖù×ÓµÄÑ¡Ôñ£¬¿ÉÒÔ´óÖÂÖªµÀÎÞ¹æÏßÍŸ߷Ö×ÓµÄÏßÍÅÖ±¾¶´óÔ¼ÔÚ10nm~100nmÖ®¼ä£¬ÔÚÈܼÁÖи߷Ö×Ó¾ÛºÏÎïËùÐèÒªµÄÀ©É¢¿×µÀ×î¼Ñ·Ö²¼Ò²Ó¦ÊÇ30nm~300nm¡£ ÔÚ¶þÊ®ÊÀ¼Í¾ÅÊ®Äê´ú£¬Õë¶ÔÖØÓͺʹó·Ö×Ó»¯ºÏÎï¹Ì¶¨´²´ß»¯µÄÐèÒª£¬ÃÀ¹úMobil¹«Ë¾¿ÆÑ§¼Ò·¢Ã÷ÁËÒ»Àà¾ßÓдó¿×Èݺ͸߿×϶ÂʵĽé¿×·Ö×Óɸ²ÄÁÏ[5]¡£½é¿×·Ö×ÓɸµÄÐγɻúÀíÊÇÒÔ±íÃæ»îÐÔ¼ÁºÍ¸ß·Ö×ÓǶ¶Î¼¯ºÏÎïΪģ°å¼Á£¬²úÉúÓÐÐòµÄÎÞ»úÁýÐͽṹµÄÒ»´ÎÄÉÃ××Ô×é×°¹ý³Ì[6]¡£Ä£°å¼ÁÊܵ½³ß´çºÍ¾ÛºÏ¶ÈµÄÏÞÖÆ£¬×î´óµÄ¸ß·Ö×ÓÄ£°å¼ÁÖÆ±¸³öµÄ½é¿×·Ö×ÓɸÁýµÄ¿×¾¶½ö´ïµ½30nm[7]¡£Óø߷Ö×Ó½ºÌ¬¾§Ìå[8]£¬Î¢ÈéÒº[9]ºÍ½é¿×·äÎÑ×´ÅÝÄÌå¼¼Êõ[10]ºÏ³ÉµÄÒ»Àà¿×¾¶ÔÚ0.1~30µmµÄ΢Ã×¼¶ÁýÐͽṹ²ÄÁÏÒ²ÊÇĿǰÓÃÓڸ߷Ö×ÓÀ©É¢Ñо¿µÄÈȵ㡣ĿǰµÄÏÖ×´ÊÇ¿ÆÑ§½çÑо¿µÄÈȵã½é¿×·Ö×ÓɸºÍ΢Ã×¼¶ÁýÐͽṹ²ÄÁÏ£¬Æä¿×µÀ²»ÊÇÒÔ30nm~300nmΪÖ÷µÄ¹á´©ÐÔ¿×µÀ£¬ÒÔ´°¿ÚΪÖ÷ÒªÀ©É¢¿×µÀ½é¿×ÁýÐͲÄÁϲ»ÊÊÓÃÔüÓͼÓÇâ´¦Àí¡£ ÓÉÓÚ»·¾³·¨¹æµÄÈÕÇ÷ÑÏÀ÷£¬È¼ÁÏÓÍÅÅ·ÅÆøÌåµÄÔÓÖʺ¬Á¿ÒªÇóÔ½À´Ô½µÍ£¬Å·¢õ±ê×¼²ñÓ͵ÄÁòº¬Á¿²»³¬¹ý10ppm¡£ÁíÍâËæ×ÅʯÓ͵ÄÖØÖÊ»¯£¬ÔüÓͼÓÇâ´¦Àí´ß»¯¼Áʧ»î¹ý³ÌÖ÷ÒªÊÇÓÉÓÚ½ðÊôºÍ»ýÌ¿ÔÚ´ß»¯¼Á±íÃæ³Á»ý£¬½ðÊô»ò½¹Ì¿×î¿ÉÄܳÁ»ýÓڿ׿ڣ¬Õ⽫¶ÂÈû¿×¿Ú£¬»òÏÞÖÆ½Ï´óµÄ¡¢¸´ÔÓµÄÁ¤ÇàÖÊ·Ö×ÓÀ©É¢µ½¿×ÄÚ[11],ÕâʹµÃÒªÌá¸ß·´Ó¦Æ÷µÄ²Ù×÷¿Á¿Ì¶È£¨Ìá¸ß·´Ó¦Î¶ȣ©À´Î¬³Öת»¯ÂÊ£¬×îÖÕµ¼ÖÂÍ£¹¤À´¸ü»»´ß»¯¼Á[12] [13] [14]¡£ËæÔËתʱ¼äµÄÑÓ³¤£¬´ß»¯¼Á»îÐÔÊÇ·ñ±£³ÖÒ»ÖÂÓëÆä¿×϶ÂÊÓйأ¬ÖØÓͼÓÇâ´¦Àí´ß»¯¼Á¿×϶ÂÊÓëÆäÎȶ¨ÐԳɱÈÀý[15]¡£ÓÉÓÚĿǰ¹¤ÒµÓ¦ÓõÄÑõ»¯ÂÁÔØÌåµÄ¿×µÀÔÚ10nm×óÓÒ£¬¿×µÀµÄ·Ö²¼²»ÀûÓÚÔüÓÍ´ó·Ö×ÓµÄÀ©É¢£¬Ä¿Ç°µÄÔüÓͼÓÇâ×°ÖÃÔËתÖÜÆÚ¶¼ºÜ¶Ì£¬½á½¹ºÍ½ðÊôµÄ³Á»ýʹ¿×¿ÚºÜ¿ì¶ÂÈû£¬´²²ãºÜ¿ì³öÏÖÈȵ㣬װÖÃÔËתÖÜÆÚ½áÊø£¬Ò»°ã¶¼ÔÚ1-2Äê¾ÍÐèÒª¸ü»»´ß»¯¼Á¡£ ¹¤ÒµÉÏÔüÓͼÓÇâ´¦Àí¹ý³Ì£¬¹ã·ºÓ¦ÓõϹÊÇÓÃÆÕͨ·½·¨ÖƱ¸µÄÑõ»¯ÂÁ£¬´ó¿×¶à²ÉÓÃÎïÀíÔì¿×·¨[16]¡¢¸ßαºÉÕ·¨[17]ºÍʹÓÃPHÖµ°Ú¶¯·¨µÄÇâÑõ»¯ÂÁ·ÛÌå[18]¡£ÎïÀíÔì¿×·¨Ò»°ã¾ßÓÐË«·å½á¹¹£¬ÔÚ100nmÖÁ΢Ã×¼¶µÄ¿×µÀÊÇÎïÀíÌí¼Ó¼ÁµÃµ½µÄ£¬²»ÄÜÖÆ±¸ÌرðÊʺÏÁ¤ÇàÖʽºÍÅÀ©É¢µÄ¼¯Öп׵À£¬Î»ÓÚÁ½¸ö·åÖ®¼äÖмä¿×µÀµÄȱʧ£¬Ê¹´ó¿×³ÉΪÁËīˮƿÐͿ׵À¡£pHÖµ°Ú¶¯·¨µÃµ½30nm~70nm´ó¿×µÄÇâÑõ»¯ÂÁ£¬ÔÚ³ÉÐ͵Ĺý³ÌÖУ¬Êܵ½ËáÐÔ½ºÈܼÁ¼°³ÉÐÍѹÁ¦µÄ×÷Ó㬿×ÈݺͿ׾¶½«»á¼±¾ç½µµÍ£¬´ó¿×½«±äΪ20nmÒÔϵIJ»ÊÊÓÃÓÚÁ¤ÇàÖʽºÍÅ»ò¸ß·Ö×ÓÀ©É¢¿×µÀ¡£IFP¹«Ë¾ÑÐÖÆµÄ°åÀõ×´Ñõ»¯ÂÁ£¬²ÉÓ÷ÇѹÁ¦³ÉÐÍ·¨£¬ÓÉÓÚûÓÐѹÁ¦£¬20~80nm¿×µÀ¿ÉÒԵõ½²¿·Ö±£Áô[19]¡£¸ßαºÉÕ·¨ÓÐËðʧËáÐÔºÍÀ©¿×ÓÐÏÞµÄȱµã£¬Ñõ»¯ÂÁµÄ¹ý¶È±ºÉÕ£¬ËáÐԵļõÉÙ£¬´ó·ù¶È½µµÍÁËÍÑÁò»îÐÔ¡£ÒÔÉÏ·½·¨¶¼ÎÞ·¨µÃµ½30nm~300nm×îÊÊÒËÁ¤ÇàÖʽºÍŵĹᴩÐÔÀ©É¢¿×µÀ¡£ ·´Ó¦ÎïÔÚ´ß»¯¼Á¿×µÀµÄÀ©É¢Êǿ׵ÀµÄÀàÐÍËù¾ö¶¨£¬¹á´©ÐÔÊǷdz£ÖØÒªµÄ£¬Öù×´¿×µÀÊÇ×îÊʺÏÀ©É¢µÄ¹á´©ÐÔ¿×µÀ£¬¶øÀ©É¢ÏÞÖÆµÄīˮƿ¿×µÀÊǶàÊýÁýÐͽṹËù¾ßÓеÄÌØµã¡£×î½ü£¬ÎÒÃÇ·¢Ã÷ÁËÒ»ÖÖÖÆ±¸ÄÉÃ×Ñõ»¯ÂÁÔØÌåµÄз½·¨£¬µÃµ½Ò»ÖÖÓÐÀûÓڸ߷Ö×Ó·´Ó¦ÎïÀ©É¢µÄ¿ò¼Üʽ½á¹¹¹á´©ÐÔ¿×µÀ[20]¡£²ÉÓöþ´ÎÄÉÃ××Ô×é×°µÄ·½·¨£ºÊ×ÏȽøÐÐÒ»´ÎÄÉÃ××Ô×é×°£¬ÓÃÈÛÑÒ-³¬ÔöÈܽºÍÅΪÄÉÃ×·´Ó¦Æ÷[21]¡£½«ÈÛÈÚµÄÂÁÑκͼîÔöÈÜÓÚ·´Ïà½ºÊøÖУ¬Ðγɳ¬ÔöÈܽºÊø¡£È»ºó½øÐжþ´ÎÄÉÃ××Ô×é×°£¬ÔÚ¸ßθßѹÏ£¬ÈÛÈÚµÄÂÁÑκͼîÔÚ½ºÊøÖнøÐÐÔλÄÉÃ××Ô×é×°£¬Öкͷ´Ó¦µÄÇâÑõ»¯ÂÁ³ÁµíÁ¢¼´ÔλÓë·´Ïà½ºÊøµÄVBֵСÓÚ1[22]µÄ±íÃæ»îÐÔ¼ÁºÍÓлúÎï×Ô×é×°³ÉÖ±¾¶Îª200nm~400nm´øÓÐ50%ÓлúÎïµÄ°ô×´ÇâÑõ»¯ÂÁ¡£200nm~400nm°ô×´ÇâÑõ»¯ÂÁ³ÉÐÍ¡¢±ºÉÕ£¬Íѳý±íÃæ»îÐÔ¼ÁºÍÓлúÎïÄ£°å¼Á£¬ÖƱ¸³ö¾ßÓдó¿×ÈÝ¡¢¸ß±È±íÃæ¡¢¸ß¿×϶ÂÊ£¬ÊÊÓÚ´ó·Ö×ӿɹᴩÀ©É¢100nm~200nm°ô×´ÇâÑõ»¯ÂÁ¹¹¼Ü²ÄÁÏ¡£¿×·Ö²¼30nm~300nmÕ¼×Ü¿×ÈݵÄ57%£¬ºÍ30nm~100nmÕ¼×Ü¿×ÈݵÄ55%£¬¼°10nm~1000nmÕ¼×Ü¿×ÈݵÄ58%µÄÄÉÃ××Ô×é×°Ñõ»¯ÂÁÔØÌå¡£ |
» ²ÂÄãϲ»¶
312Çóµ÷¼Á
ÒѾÓÐ15È˻ظ´
304Çóµ÷¼Á
ÒѾÓÐ7È˻ظ´
»¯¹¤Çóµ÷¼Á£¡
ÒѾÓÐ15È˻ظ´
284Çóµ÷¼Á
ÒѾÓÐ8È˻ظ´
362Çóµ÷¼Á
ÒѾÓÐ5È˻ظ´
Ò»Ö¾Ô¸¹þ¹¤´ó£¬³õÊÔ329£¬Çó»·¾³¿ÆÑ§Ó빤³Ìµ÷¼Á£¡
ÒѾÓÐ5È˻ظ´
327Çóµ÷¼Á
ÒѾÓÐ3È˻ظ´
Ò»Ö¾Ô¸¼ª´ó»¯Ñ§327Çóµ÷¼Á
ÒѾÓÐ5È˻ظ´
26×ÔÈ»µØÀíѧ303·ÖÇóµ÷¼Á
ÒѾÓÐ8È˻ظ´
336Çóµ÷¼Á£¬Ò»Ö¾Ô¸Öпƴó
ÒѾÓÐ4È˻ظ´
» ÇÀ½ð±ÒÀ²£¡»ØÌû¾Í¿ÉÒԵõ½:
½Î÷¿Æ¼¼Ê¦·¶´óѧ ²ÄÁÏÓëÄÜÔ´ÕÐÊÕµ÷¼ÁÑо¿Éú
+1/92
´óÁ¬´óѧ-ÁùÅÌˮʦ·¶Ñ§ÔºÁªºÏÅàÑøÑо¿Éú½ÓÊÕµ÷¼Á
+2/56
²ÄÁÏ¡¢»¯Ñ§Àà˶ʿÑо¿Éú×îºóµ÷¼Á»ú»á£¬Ñ§Ë¶×¨Ë¶¾ù¿É£¬ÓÐÒâÇëÁªÏµ£¬·Ç³ÏÎðÈÅ£¡
+2/42
¸£½¨Ò½¿Æ´óѧÉúÐÅϵÈÄÊÀÌÎÀÏʦ2026ÄêÕÐÊÕµ÷¼ÁÓÅÐã˶ʿÉú1Ãû-ÉúÎïҽѧÐÅϢѧ
+1/39
ÄÜÔ´¶¯Á¦×¨Ë¶£¨Çå½àÄÜÔ´¼¼Êõ£©½ÓÊÕ085410È˹¤ÖÇÄÜ¡¢0859ÍÁľˮÀûµÈרҵµ÷¼Á˶ʿÉú
+1/37
ºþ±±Æû³µ¹¤ÒµÑ§Ôº½ÓÊÜ˶ʿµ÷¼Á£¡
+1/36
³£ÖÝ´óѧ»¯Ñ§¼°Ïà¹Ø×¨ÒµË¶Ê¿µ÷¼ÁÕÐÉúÐÅÏ¢
+1/35
Õã½áéÖÝ£¬áéÖÝѧԺ»¯Ñ§Óë²ÄÁϹ¤³ÌѧԺÕÐÊÕÈ«Ìå08¡¢²¿·Ö07¡¢09µ÷¼Áͬѧ
+1/23
»ªÄÏʦ·¶´óѧ»·¾³Ñ§Ôº´ó·Ö×ÓÌåϵ¶à³ß¶ÈÄ£ÄâÓëʵÑéÑо¿ÍŶÓÕÐÊÕ2026Ä꿼Ñе÷¼ÁÉú
+1/20
´óÁ¬¹¤Òµ´óѧ ¸ß·Ö×Ó²ÄÁÏ ½ÓÊÕ¿¼Ñе÷¼Á
+1/18
½Î÷ʦ´ó»¯Ñ§¹¤³ÌѧԺ½ÓÊÕ2026µ÷¼ÁÉú
+1/15
Ïã¸Û¿Æ¼¼´óѧ »úÆ÷ÈË/ÉúÎïҽѧ
+1/10
ɽ¶«Å©Òµ´óѧ»¯Ñ§Óë²ÄÁÏ¿ÆÑ§Ñ§Ôº 2026Äê˶ʿÑо¿ÉúÄâ½ÓÊÕµ÷¼Á
+1/7
¸£½¨Àí¹¤´óѧÕÐÊÕרҵ´úÂë08¿ªÍ·Ñ§ÊõÐÍ˶ʿÑо¿Éú
+1/5
½ÜÇà/³¤½ÍŶÓÕÐÊÕ˶ʿµ÷¼Á
+1/5
ºÓ±±´óѧÕÐÊÕÉúÎïÓëҽҩרҵµ÷¼Á¿¼Éú
+1/5
º¼ÖÝʦ·¶´óѧ-Õã½Ê¡ÊªµØÖǻۼà²âÓëÉú̬ÐÞ¸´ÖصãʵÑéÊÒÍŶÓ˶ʿµ÷¼Á¹«¸æ
+1/4
̨ÖÝѧԺ½ÓÊÕ»¯Ñ§¡¢»¯¹¤Óë²ÄÁÏ·½Ïòµ÷¼Á
+1/3
2026Äê³¶«´óѧˮ²úרҵ¿¼Ñе÷¼Á-±õº£Éú̬¸ßµÈÑо¿Ôº
+1/3
ÖØÇ콻ͨ´óѧ¿ÎÌâ×é½ÓÊÕµ÷¼ÁÉú£¨²ÄÁÏÓ뻯¹¤/²ÄÁÏ¿ÆÑ§Ó빤³Ì/½»Í¨ÔËÊä/½»Í¨ÔËÊ乤³Ì£©
+1/1
cheeryong
½ð³æ (СÓÐÃûÆø)
- ·ÒëEPI: 14
- Ó¦Öú: 0 (Ó×¶ùÔ°)
- ½ð±Ò: 677.5
- Ìû×Ó: 94
- ÔÚÏß: 27.8Сʱ
- ³æºÅ: 1176980
ÓÞ¹«8538(½ð±Ò+5, ·ÒëEPI+1): 2011-01-07 13:04:27
ringzhu(·ÒëEPI-1):·¢·Å´íÎó 2011-01-08 12:16:10
ringzhu(·ÒëEPI-1):·¢·Å´íÎó 2011-01-08 12:16:10
| Ì«³¤ÁË |
2Â¥2011-01-07 11:47:31
3Â¥2011-01-07 13:04:13
4Â¥2011-01-07 13:07:47














»Ø¸´´ËÂ¥