[½»Á÷] ¡¾ÇóÖú¡¿¼üºÏ½Ì²ÄSemiconductor Wafer Bonding: Science and Technology¡¾ÒÑËÑË÷ÎÞÖظ ÒÑÓÐ1È˲ÎÓë

Publisher Comments: A one-stop resource on all aspects of semiconductor wafer bonding for materials scientists and electrical engineers Semiconductor Wafer Bonding addresses the entire spectrum of mainstream and likely future applications of wafer bonding. It examines all of the important issues surrounding this technology, including basic interactions between flat surfaces, the influence of particles, surface steps and cavities, surface preparation and room-temperature wafer bonding, thermal treatment of bonded wafer pairs, and much more. This unique, one-stop resource consolidates information previously available only by time-consuming searches through technical journals, proceedings, and book chapters for more than 1,000 published articles on wafer bonding. It covers all materials used for wafer bonding-including silicon, III-V compounds, fused and crystalline quartz, glass, silicon carbide, sapphire, ferroelectrics, and many others. For materials scientists and electrical engineers who need to exploit the potential of this flourishing technology, Semiconductor Wafer Bonding is a convenient one-stop resource for answers to many common questions. It is also an excellent text/reference for graduate students eager to learn about this interdisciplinary field, which spans surface chemistry, solid-state physics, materials science, and electrical engineering. Product Details ISBN:9780471574811 Subtitle:Science and Technology Author:Gosele, U. Authoruml Author:G . Author:sele, U. Author:Gu Author:sele Author:Tong, Q. -Y Author:& Author:Gvsele, U. Author:Tong, Q. Y. Publisher:Wiley-Interscience Location:New York : Subject:Engineering - Electrical & Electronic Subject:Engineering - General Subject:Electronics - Semiconductors Subject:Semiconductors Subject:Chemistry - Physical & Theoretical Subject:Semiconductor wafers. Subject:Bonding Subject:Electricity Subject:Semiconductors -- Bonding. Series:Electrochemical Society Series Volume:33 Publication Dateecember 1998 Binding:Hardcover Grade Level:General/trade Language:English Illustrations:Yes Pages:320 Dimensions:960x598x78 125

»Ø¸´´ËÂ¥