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mabo2008(½ð±Ò+5, ²©Ñ§EPI+1): 2010-05-21 11:42:42
mabo2008(½ð±Ò+3):лл 2010-05-27 08:18:38
mabo2008(½ð±Ò+3):лл 2010-05-27 08:18:38
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²Î¿¼ÎÄÏ×£ºY.C.Lin,Y.C.Jian,J.H.Ji.. A study on the wet etching behavior of AZO (ZnO:Al) transparent conducting film [J]. AppliedSurfaceScience,2008£¬(254): 2671-2677 ÀûÓÃTMAHÈÜÒº¶ÔËùÖÆ±¸µÄAZO±¡Ä¤½øÐпÌÊ´£¬µÃµ½²»Í¬Å¨¶ÈµÄTMAHÈÜÒºÔÚ²»Í¬µÄζÈϵĸ¯Ê´ÂÊ£¬ÆäÖÐÔÚTMAH£ºH2O£½2.38£º97.62µÄÈÜÒºÖУ¬µ±Î¶ÈΪ45¡æÊ±£¬ÑùÆ·µÄ¸¯Ê´ÂÊΪ22nm/min ITOʪ·¨¸¯Ê´ ²Î¿¼£º https://www.2ic.cn/html/26/t-310026.html [ Last edited by qfw_68 on 2010-5-14 at 17:02 ] |

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