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【其他】非真空塗?逊ㄑu備I-III-VI 族化合物CuGaSe2薄膜之研究
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?????T????u??I-III-VI ?廯????CuGaSe2?????о? 2009/12/17 [ [url= ocPrint(8253)]?? ?? ?? ?[/url] | ?? ?] ?? ?? ]?????????T?????????a?~????(CIGS)????????g????????O???????????Nanosolar ????2009??9?????Q?????_?l????g??С??e?D?QЧ????_16.4%?????a??????eС??M???D?QЧ????????_11.75%????????X???????u?? 100 kW?????CIGS????????CIGS?T???????????a????N?O?????????????????????l?a?I????????????????I-III-VI?? CIGS????????????????T????~扶???(CuGaSe2)???棬???о??????????u?京?????Cu2Se ?cGa2Se3??????{???????{?ωT?????????u???????????t????M?п??????????????о??Y???l?F????r?g?????????????????????c????????w???????????????S?~?V?????CuGaSe2?????Ψ?????????????????????^?????????????}?? ?о????? ????????????????????c?????c?????塣????????x??????C?u???????????????????????Cu2Se ?cGa2Se3 ???????{????K????T????????????u???????????????????????t?M?П????(400~800??C) ?????????????d?????K???d????w?????????????壬??????????^???????]?l??p???????????Cе??D?????????????3 ?? 10-2Torr????????_???U?????????????(5??10-5 Torr)???p????????????????????????????w??????????u????o???w????????????w?????????2~5 Torr????B???M?в??????????u????????????????M?з????? ?T??CuGaSe2????@??M?????? ?D???Cu-rich ??????????????????@??Y??????D?п?????鼚С?w????Y?????S????????????????????????@???????????400??C ?l?????Ga-Se/Cu-Se ???????@?? Ga-Se ????鼚С?w???Y??????Cu-Se ????w????????L?????650??C ?l?????????Ga-Se/Cu-Se ??????????U??????a???????^??750??C ??????m??????^??????????????????????п?????a?????D????Cu-poor???Y???????????????@??Y??????????????cCu- rich ?Y??????????????鼚С???????????@Ga-Se/Cu-Se ???棬?????????650~700??C ?r????????????U????Σ?????750??C ????????п???????????????FGa-Se ????????c?]?l???Σ???F???????????????????w??d????????l?F?б????e????Σ??????????????????????^????????p????0.3~0.5 ??m ???????ж???Ga-Se ??]?l?????l??????????????????????g??Cu-Se ?????????С???^1 ??m ??  ?D???Cu-rich CuGaSe2??????????????????@??Y????(a) 600??C??(b) 650??C ?T??CuGaSe2????Y????????? ?D???Cu-poor ?????????????XRD ?D?V?????e??Ga-Se ?cCu-Se ???????Йz?y?????????T???Ga-Se ?????Ga2Se3?????緽?????Cu-Se ?????XRD?????У??H????Cu2Se ?????緽?????????e??Cu-Se ??????Cu2Se ??Y???? ??Cu-poor CuGaSe2 ??????????650??C ????_????FCuGaSe2??????(112)??(204)?c(312)????????緽???Ga-Se ???????(111)??(208)??(311)?c(200)??????緽??????????650??C ????_???????@?Cu-Se ?????????cGa-Se ?????????_??????U????L?γ?CuGaSe2??????????????650??C ?r??CuGaSe2????????(112)??淽???????L??????????650??C????XRD ?D?V?з????????????CuGaSe2????????淽???@???????????L??CuGaSe2????????????????????750??C ?r??????F??????????緽???c?????EDS ??????????????????y??????????O2 ??_???????c?L?r?g?l??????c????a??????????????F??CuO ??Se2O3???????????????CuGaSe2??????|???????????????  ?D???Cu-poor CuGaSe2???????????????XRD?D?V ?????????\??????|???~??ɡ??????????????/??????β?????W ?S???P/??F???????Cе?о??l????? ????????????I?????s?I276??????????Y??????http://www.materialsnet.com.tw/DocView.aspx?id=8220 |
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不错啊。不过用这种方法制成的薄膜附着力不好，也容易出现孔隙。 
2楼2010-03-29 15:16:36
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