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zhydem银虫 (小有名气)
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[求助]
Silvaco TCAD LTPS双栅器件仿真收敛不了，有没有好的解决办法
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Silvaco TCAD LTPS双栅器件仿真语言如下： # (c) Silvaco Inc., 2013 go atlas TITLE polysilicon TFT simulation mesh nx=104 ny=55 # x.m n=1 l=0 r=1 x.m n=104 l=16 r=1 # # y.m n=1 l=-0.12 r=1 y.m n=24 l=0 r=1 y.m n=50 l=0.0450 r=1 y.m n=55 l=0.6 r=1.6 # # # **************** regions ******************************* # 1=oxide 2=silicon 3-oxide # region num=1 y.min=-0.12 y.max=-0.08 nitride region num=2 y.min=-0.08 y.max=0. oxide region num=3 y.min=0. y.max=0.0450 silicon region num=4 y.min=0.0450 y.max=0.6 oxide # # **************** electrodes **************************** # 1=gate 2=substrate 3=source 4=drain # elec num=1 x.min=3.5 x.max=5.5 y.min=-0.12 y.max=-0.12 name=gate elec num=2 x.min=10.5 x.max=12.5 y.min=-0.12 y.max=-0.12 name=gate elec num=3 substrate name=substrate elec num=4 x.min=0. x.max=2 y.min=0. y.max=0. name=source elec num=5 x.min=14 x.max=16 y.min=0. y.max=0. name=drain # # **************** doping profiles *********************** # doping reg=3 uniform conc=1.e10 n.type doping reg=3 gauss conc=9.e21 n.type x.min=0. x.max=2 char=0.3 doping reg=3 gauss conc=1.8e18 n.type x.min=2 x.max=3.5 char=0.3 doping reg=3 gauss conc=1.8e18 n.type x.min=5.5 x.max=7 char=0.3 doping reg=3 gauss conc=9.e21 n.type x.min=7. x.max=9 char=0.3 doping reg=3 gauss conc=1.8e18 n.type x.min=9 x.max=10.5 char=0.3 doping reg=3 gauss conc=1.8e18 n.type x.min=12.5 x.max=14 char=0.3 doping reg=3 gauss conc=9.e21 n.type x.min=14 x.max=16 char=0.3 # # # Set parameters for polysilicon # material region=3 mun=300 mup=30 # # Use the continuous defect model defects continuous numa=24 numd=24 \ nta=7.3e20 ntd=8.5e20 wta=0.047 wtd=0.03 \ nga=2.4829e17 ngd=3.5e17 ega=0.7 egd=0.3 wga=0.125 wgd=0.12 \ sigtae=1.e-16 sigtah=1.e-14 sigtde=1.e-14 sigtdh=1.e-16 \ siggae=1.e-16 siggah=1.e-14 siggde=1.e-14 siggdh=1.e-16 # contact num=1 n.polysilicon contact name=source contact name=drain models srh temp=300 models print bbt.kl bb.b=1.05e7 # output con.band val.band method newton solve init save outf=sim.str tonyplot sim.str -set tftex07_0.set # # Electrode #1 - Gate, #2 - Substrate, #3 - Source, #4 - Drain # method newton trap maxtrap=10 # solve vdrain=0.1 solve vdrain=0.2 solve vdrain=0.5 solve vdrain=1 vstep=0.01 vfinal=10. name=drain # # Solve id versus vg curve # # log outf=sim_10v.log solve vstep=0.1 vfinal=15 name=gate vgate=-15 vdrain=10 solve vgate=-0.1 solve vgate=-0.2 solve vgate=-0.5 solve vgate=-1 vstep=-1 vfinal=-15. name=gate log outf=sim_0.1v.log solve vstep=0.1 vfinal=15 name=gate vgate=-15 vdrain=0.1 #tonyplot -overlay tftex07_1.log tftex07_2.log -set tftex07_1.set tonyplot -overlay sim_10v.log sim_0.1v.log -set tftex07_2.set extract init inf ="sim_10v.log" extract name = "IOFF" y.val from curve (v."gate",i."drain"  where x.val =-7extract name = "ION" y.val from curve (v."gate",i."drain" where x.val =8# quit |
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