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【资源】A short introduction to MEMS（已搜无重复）
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1.Why MEMS? 1.What is MEMS and comparison with microelectronics 2.Why MEMS technology 3.Major drivers for MEMS technology 4.Mutual benefits between MEMS and microelectronics 2.Fundamentals of MEMS design 1.Physical scaling laws 2.The principles of design and reliability 3.MEMS design tools 3.How MEMS are made 1.Overview of MEMS fabrication process 2.The MEMS materials 3.Bulk micromachining, wet and dry etching 1.Isotropic and anisotropic wet etching 2.Dry etching 3.Wafer bonding 4.Surface micromachining and thin-films 1.Thin-film fabrication 2.Design limitation 3.Microstructure release 5.DRIE micromachining 6.Other microfabrication techniques 1.Micro-molding and LIGA 2.Polymer MEMS 7.Problems 4.MEMS technology 1.MEMS system partitioning 2.Passive Structure 1.Mechanical structures 2.Fluidic structures 3.Sensor technology 1.Piezoresistive sensing 2.Capacitive sensing 3.Other sensing mechanism 4.Actuator technology 1.Magnetic actuator 2.Electrostatic actuator 3.Thermal actuator 5.Problems 5.MEMS packaging, assembly and test 6.Challenges, trends, and conclusions 1.MEMS current challenges 2.Future trend of MEMS 3.Conclusion 7.Readings and References 1.Online resources and journals 2.Other MEMS resources 8.Bibliography 9.Index http://g.zhubajie.com/urllink.php?id=5136339yvgirw42ya08saoc http://g.zhubajie.com/urllink.php?id=5136339yvgirw42ya08saoc |
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