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【资源】Electroceramic-Based MEMS Fabrication-Technology and Applications
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http://rapidshare.com/files/219986090/6.ElecMEMS.rar Electroceramic-Based MEMS Fabrication-Technology and Applications Book Series Electronic Materials: Science & Technology ISSN 1386-3290 Subject Chemistry, Optical and Electronic Materials, Nanotechnology, Characterization and Evaluation Materials, Ceramics, Glass, Composites, Natural Methods and Electronics and Microelectronics, Instrumentation Volume Volume 9 Subject Chemistry, Optical and Electronic Materials, Nanotechnology, Characterization and Evaluation Materials, Ceramics, Glass, Composites, Natural Methods and Electronics and Microelectronics, Instrumentation Publisher Springer US DOI 10.1007/b101200 Copyright 2005 ISBN 978-0-387-23310-9 (Print) 978-0-387-23319-2 (Online) Subject Collection: Chemistry and Materials Science Subject: Chemistry, Optical and Electronic Materials, Nanotechnology, Characterization and Evaluation Materials, Ceramics, Glass, Composites, Natural Methods and Electronics and Microelectronics, Instrumentation SpringerLink Date Thursday, March 30, 2006 Front Matter Part A Applications and Devices Chapter MEMS-Based Thin Film and Resonant Chemical Sensors H. Tuller Chapter Microactuators Based on Thin Films R. Maeda, J.J. Tsaur, S.H. Lee and M. Ichiki Chapter Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films P. Muralt Chapter Thick-Film Piezoelectric and Magnetostrictive Devices N.M. White, S.P. Beeby and N.J. Grabham Chapter Micromachined Infrared Detectors Based on Pyroelectric Thin Films P. Muralt Chapter RF Bulk Acoustic Wave Resonators and Filters H.P. Loebl, C. Metzmacher, R.F. Milsom, P. Lok and A. Tuinhout Chapter High Frequency Tuneable Devices Based on Thin Ferroelectric Films S. Gevorgian Chapter MEMS for Optical Functionality S.-G. Kim, G. Barbastathis and H. Tuller Part B Materials, Fabrication-Technology, and Functionality Chapter Ceramic Thick Films for MEMS R.A. Dorey and R.W. Whatmore Chapter Thin Film Piezoelectrics for MEMS S. Trolier-McKinstry and P. Muralt Chapter Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices O. Auciello, S. Saha, W. Fan, B. Kabius, S. Streiffer, D. Kaufman, J. Im and P. Baumann Chapter Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics A.K. Tagantsev, V.O. Sherman, K.F. Astafiev, J. Venkatesh and N. Setter Chapter Microfabrication of Piezoelectric MEMS J. Baborowski Chapter Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics M. Alexe, C. Harnagea and D. Hesse Chapter Low-Cost Patterning of Ceramic Thin Films C. Martin and I. Aksay Back Matter |
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