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[资源] 【资源】Electroceramic-Based MEMS Fabrication-Technology and Applications

http://rapidshare.com/files/219986090/6.ElecMEMS.rar
Electroceramic-Based MEMS
Fabrication-Technology and Applications


Book Series Electronic Materials: Science & Technology

ISSN 1386-3290

Subject Chemistry, Optical and Electronic Materials, Nanotechnology, Characterization and Evaluation Materials, Ceramics, Glass, Composites, Natural Methods and Electronics and Microelectronics, Instrumentation

Volume Volume 9

Subject Chemistry, Optical and Electronic Materials, Nanotechnology, Characterization and Evaluation Materials, Ceramics, Glass, Composites, Natural Methods and Electronics and Microelectronics, Instrumentation

Publisher Springer US
DOI 10.1007/b101200
Copyright 2005

ISBN 978-0-387-23310-9 (Print) 978-0-387-23319-2 (Online)

Subject Collection: Chemistry and Materials Science

Subject:
Chemistry, Optical and Electronic Materials, Nanotechnology, Characterization and Evaluation Materials, Ceramics, Glass, Composites, Natural Methods and Electronics and Microelectronics, Instrumentation
SpringerLink Date Thursday, March 30, 2006

Front Matter

Part A
Applications and Devices

Chapter
MEMS-Based Thin Film and Resonant Chemical Sensors
H. Tuller

Chapter
Microactuators Based on Thin Films
R. Maeda, J.J. Tsaur, S.H. Lee and M. Ichiki

Chapter
Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
P. Muralt

Chapter
Thick-Film Piezoelectric and Magnetostrictive Devices
N.M. White, S.P. Beeby and N.J. Grabham

Chapter
Micromachined Infrared Detectors Based on Pyroelectric Thin Films
P. Muralt

Chapter
RF Bulk Acoustic Wave Resonators and Filters
H.P. Loebl, C. Metzmacher, R.F. Milsom, P. Lok and A. Tuinhout

Chapter
High Frequency Tuneable Devices Based on Thin Ferroelectric Films
S. Gevorgian

Chapter
MEMS for Optical Functionality
S.-G. Kim, G. Barbastathis and H. Tuller

Part B
Materials, Fabrication-Technology, and Functionality

Chapter
Ceramic Thick Films for MEMS
R.A. Dorey and R.W. Whatmore

Chapter
Thin Film Piezoelectrics for MEMS
S. Trolier-McKinstry and P. Muralt

Chapter
Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices
O. Auciello, S. Saha, W. Fan, B. Kabius, S. Streiffer, D. Kaufman, J. Im and P. Baumann

Chapter
Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics
A.K. Tagantsev, V.O. Sherman, K.F. Astafiev, J. Venkatesh and N. Setter

Chapter
Microfabrication of Piezoelectric MEMS
J. Baborowski

Chapter
Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics
M. Alexe, C. Harnagea and D. Hesse

Chapter
Low-Cost Patterning of Ceramic Thin Films
C. Martin and I. Aksay

Back Matter
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